<!DOCTYPE html PUBLIC "-//W3C//DTD XHTML 1.0 Strict//EN" "http://www.w3.org/TR/xhtml1/DTD/xhtml1-strict.dtd"> <html xmlns="http://www.w3.org/1999/xhtml" xml:lang="ja" lang="ja"> <head> <META name="Keywords" content="qgN]mi'Yf[, Tokyo Institute of Technology, Tokyo Tech, |[]f[xvz@b, Precision and Intelligence Laboratory, Green, ICE, pu.z_jƖMzxvz0000, pu.z_j, ICT, 0000000xvz_ji, Solutions Research Laboratory, vxvz[, Masu Laboratory, Masu Group, RF, CMOS, LSI, 000000, transceiver, MEMS, O}, transmission line, 00000O}, on-chip transmission line, 00000, inductor, S Y00000, tunable inductor, variable inductor, Yd\M}, v NT, v, NT, Kazuya Masu, Kazuya, Masu, wS f, wS, f, Noboru, Ishihara, :u0u KQKN, :u0u, KQKN, Katsuyuki Machida, Katsuyuki, Machida, O imKN, O, imKN, Hiroyuki, Ito"> <meta http-equiv="Content-Type" content="text/html; charset=Shift_JIS" /> <title>Publications in FY2015</title> <link rel="stylesheet" href="../index_images/styles.css" type="text/css" /> </head> <body> <div id="container"> <div id="container-inner"> <div id="header"> <table border=0> <tr> <th width="350px"><p> <img src="../index_images/logo4.jpg" alt="logo" height="65pt"> </p> </th> <th width="550px"><p> qgN]mi'Yf[<br> yf[bSuRbxvzb *geg#umibSxvz@b <br> P[_j0000xvz00/uSO;Sok]f[xvz00/pu.z_jƖMzxvz00 </p></th> </tr> </table> </div> <!-- end header --> <div id="banner"> <h2>Publications in FY2015</h2> <div id="slogan"> <!-- <p><strong>Green ICE Center</strong><br /> Solutions Research Lab., Tokyo Tech </p>--> <p><strong></strong><br /><br /> </p> </div> <!-- end slogan --> </div> <!-- end banner --> <div id="nav"> <ul> <li><a href="../index.html">Home</a></li> <li><a href="../member.html">Member</a></li> <li><a href="../research.html">Research</a></li> <li><a href="../publications.html">Publications</a></li> <li><a href="../access.html">Access</a></li> <li><a href="../blogs.html">Blogs</a></li> <li><a href="../links.html">Links</a></li> <li><a href="../index_e.html"><u>ENGLISH</u></a></li> </ul> </div> <!-- end nav --> <div id="main"> <div id="content"> </br> <a name="Journals"><h3>0Journals</h3></a> <ol> <li> Atsushi Shirane, Yiming Fang, Haowei Tan, Taiki Ibe, Hiroyuki Ito, Noboru Ishihara, and Kazuya Masu, "RF-Powered Transceiver With an Energy and Spectral-Efficient IF-Based Quadrature Backscattering Transmitter, " IEEE Journal of Solid-State Circuits, Vol. 50, No. 12, pp. 2975-2987, Dec. 2015. </li> <li> Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida, "A 0.1G-to-20G Integrated MEMS Inertial Sensor, " Japanese Journal of Applied Physics, vol. 54, no. 8, 2015, pp. 087202-1-4. DOI: 10.7567/JJAP.54.087202 </li> <li> Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida, "A Sub-1G MEMS Sensor, " ECS Transactions, vol. 66, issue 5, 2015, pp.131-138. DOI: 10.1149/06605.0131ecst </li> <li> Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida, "A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass, " Microsystem Technologies, vol. 22, 2016, pp.459-464. (online version: published on April 26, 2015) DOI: 10.1007/s00542-015-2539-y </li> <li> Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Shota Kamei, Kazuya Masu, and Katsuyuki Machida, "An Evaluation Method of Brownian Noise in Highly Sensitive Capacitive Sensors" IEEJ Transaction on Sensors and Micromachines, vol.135, no.4, pp.142-143, April 2015. </li> </ol> <a name="IntConf"><h3>0International Conferences</h3></a> <ol> <li> Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida, "A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology, " in Proc. IEEE Inertial Sensors 2016, Surf & Sand Resort, Laguna Beach, California, USA, Feb.23-25, pp. 148-149, 2016. </li> <li> Kohei Ohba, Yoshihiro Yoneda, Koji Kurihara, Takashi Suganuma, Hiroyuki Ito, Noboru Ishihara, Kunihiko Gotoh, Koichiro Yamashita, and Kazuya Masu, "Environmental data recovery using polynomial regression for large-scale wireless sensor networks", SENSORNETS 2016 - 5th International Conference on Sensor Networks, Barcel Aran Mantegna Hotel, Rome, Italy, Feb.19-21, pp.161-168, 2016 </li> <li> Masaharu Yoshiba, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone, "Micro-Mechanical Properties of Electrodeposited Gold Thin Films, " in Proc. TACT 2015 International Thin Films Conference, National Cheng Kung Univerisity, Tainan, Taiwan, Nov.15-18, 2015. </li> <li> Kazuya Masu, "Development of High Sensitivity Inertia Sensor and its Application to Early-Stage Diagnosis of Parkinson Disease", The 17th Takayanagi Kenjiro Memorial Symposium, Shizuoka Univ. Nov. 17-18, 2015 (Invited) </li> <li>Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida, "A Sub-1G CMOS-MEMS Accelerometer, "in Proc. IEEE Sensors 2015, BEXCO, Busan, South Korea, Nov, 1-4, 2015, pp. 513-516. </li> <li>Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, and Masato Sone, "Study on Ti/Au Two-Layered Cantilevers with Different Aspect Ratio for MEMS Devices, " in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015, pp. 52-53. </li> <li>Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Masato Sone, "Mechanical Properties of Electrodeposited Gold for MEMS Device, " in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015, pp. 48-49. </li> <li>Toshifumi Konishi, Daisuke Yamane, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Kazuya Masu, Hiroshi Toshiyoshi, and Katsuyuki Machida, "Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer, " in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015, pp.798-799. </li> <li>Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, and Katsuyuki Machida, "Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology, " in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015, Late News, pp. 786-787. </li> <li>Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, and Masato Sone, "Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers, " in Proc. 41st Micro and Nano Engineering (MNE2015), World Forum, Hague, Netherlands, Sept. 21-24, 2015, Wed-C-p81. </li> <li>Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone, "High Mechanical Strength Gold Micro-Components Fabricated by Pulse Electroplating, " in Proc. 41st Micro and Nano Engineering (MNE2015), World Forum, Hague, Netherlands, Sept. 21-24, 2015, Wed-C-p5. </li> <li>Masaharu Yoshiba, Chun-Yi Chen, Tsu-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, and Masato Sone, "Sample Size Effect on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test, " in Proc. 41st Micro and Nano Engineering (MNE2015), World Forum, Hague, Netherlands, Sept. 21-24, 2015, Wed-C-p19. </li> <li>Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida, "A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology, " in Proc. 41st Micro and Nano Engineering (MNE2015), World Forum, Hague, Netherlands, Sept. 21-24, 2015, Wed-C-p11. </li> <li>Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, and Katsuyuki Machida, "A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology, " in Proc. 25th Advanced Metallization Conference Asian Session (ADMETAplus2015), Sept. 16-18, 2015, Global Convention Plaza, Seoul National University, Seoul, Korea. </li> <li>Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, and Katsuyuki Machida, "A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology, " in Proc. 32nd Advanced Metallization Conference (AMC2015), Sept. 9-11, 2015, the West Pickle Research Building (WPR) of The University of Texas at Austin, Austin, Texas, US. </li> <li> Hiroyuki Ito, Atsushi Shirane, Noboru Ishihara and Kazuya Masu, "An Ultra-Low-Power 32QAM RF Transmitter, " IEEE International Symposium on Radio-Frequency Integration Technology (RFIT), pp. 16-18, 2015. (Invited) </li> <li> Masaharu Yoshiba, Chun-yi Chen, Tso-fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone, "Compression Deformation of Micro-components Fabricated by FIB from Gold Electrodeposited Films, " in Proc. International Symposium for Advanced Materials Research (ISAMR 2015), Sun Moon Lake, Taiwan, Aug. 16-20, 2015, P13. </li> <li> Daisuke Yamane, Kazuya Masu, and Katsuyuki Machida, "A Sub-1G MEMS Inertial Sensor, " in Proc. International Symposium for Advanced Materials Research (ISAMR 2015), Sun Moon Lake, Taiwan, Aug.16-20, 2015, ID20.(invited) </li> <li> Hiroyuki Ito, Atsushi Shirane, Sho Ikeda, Yosuke Ishikawa, Noboru Ishihara and Kazuya Masu, "Ultra-Low-Power RF Transceiver Technology for Sensor Network Application, " The 6th International Conference on Integrated Circuits, Design, and Verification, 2015. (Invited) </li> <li> Motohiro Takayasu, Toshiaki Gonda, Yosuke Ishikawa, Hiroyuki Ito, Noboru Ishihara, and Kazuya Masu, "An RF Universal Board for SSOP Elements, " Vietnam-Japan Microwave (VJMW 2015), Ho Chi Minh City University of Science, Ho Chi Minh City, Vietnum, Aug. 10-11, 2015. </li> <li> Motohiro Takayasu, Toshiaki Gonda, Yosuke Ishikawa, Hiroyuki Ito, Noboru Ishihara, and Kazuya Masu, "An RF Universal Board for SSOP Elements, " Thailand-Japan MicroWave (TJMW 2015), Chulalongkorn University, Bangkok, Thailand, Aug. 6-8, 2015. </li> <li> Noboru Ishihara, and Kazuya Masu, "Innovation challenges from materials, devices and circuits in IoT/IoE era, " Thailand-Japan MicroWave 2015(TJMW 2015), Chulalongkorn University, Bangkok, Thailand, Aug. 6-8, 2015, SA3-01, 2015. (Invited) </li> <li> Masato Sone, Tso-Fu Mark Chang, and Kazuya Masu, "Integration of Biocompatible MEMS by Gold Electrodeposition Using Supercritical Carbon Dioxide, " in Proc. 3rd International Conference on Integrative Biology, Melia Valencia, Valencia, Spain, Aug. 4-6, 2015, pp. 86.(invited) </li> <li> Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, and Kazuya Masu, "Nano-G metrology system and its biomedical applications by CMOS-MEMS technology, " in Proc. 3rd International Conference on Integrative Biology, Melia Valencia, Valencia, Spain, Aug. 4-6, 2015, pp. 87.(invited) </li> <li> Hiroyuki Ito, Noboru Ishihara, and Kazuya Masu, "Ultra-low power wireless transceiver systems for biomedical application, " in Proc. 3rd International Conference on Integrative Biology, Melia Valencia, Valencia, Spain, Aug. 4-6, 2015, pp. 88.(invited) </li> <li> Minami Teranishi, Tso-Fu Mark Chang, Toshifumi Konishi, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Hiroyuki Ito, Kazuya Masu, Tatsuo Sato, Masato Sone, "Stability of Movable Structure Formed by Au Electroplating for MEMS Devices, " in Proc. 8th Int. Conf. on Materials for Advanced Technologies (ICMAT 2015), SUNTEC, Singapore, June 28 - July 3, 2015. </li> <li> Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida, "A Sub-1G MEMS Sensor, " in Proc. the 227th ECS Meeting, the Hilton Chicago, Chicago, Illinois, USA, May 24-28, 2015, pp. 1332.(invited) </li> <li> Yosuke Ishikawa, Sang_yeop Lee, Shin Yonezawa, Sho Ikeda, Yiming Fang, Taisuke Hamada, Hiroyuki Ito, Noboru Ishihara, Kazuya Masu, "A 0.5-V 1.56-mW 5.5-GHz RF Transceiver IC Module with J-Shaped Folded Monopole Antenna, "Circuits and Systems (ISCAS), 2015 IEEE International Symposium on, Cultural Centre of Belem, Lisbon, Portugal, May 24, 2015, pp.1218-1221. </li> <li> Hamid Kiumarsi, Kenji Wasa, Hiroyuki Ito, Noboru Ishihara, Kazuya Masu, "E-band filters based on substrate integrated waveguide octagonal cavities loaded by complementary split-ring resonators, "IMS 2015, Phoenix, Arizona, USA, May 17-22, 2015, pp.1-4 </li> <li> Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, and Kazuya Masu, <br> "CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-, "<br> in Proc. 2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC 2015), Kyoto Terrsa, Kyoto, Japan, April 14-17, 2015, pp. 201. (invited) </li> </ol> <a name="TutPapers"><h3>0Tutorial Papers</h3></a> N/A <br/><br/><br/> <a name="DomConf"><h3>0Domestic Conferences</h3></a> <ol> <li> \ Oee, q\9h 'Y, PO^ Cf-f, t^ T m, f9h ckN, v NT, :u0u KQKN, 0Mzd\000i 0(uD0_0 MEMS R^000n000000n00000'`i 0, ,{63V_(uirtf[O%fc[f[SoO, 13.5 0000/ƖMzSbS, 2016t^3g19 e 22e, qgN]mi'Yf[ 'Y\q\00000 [21p-P17-17]. </li> <li> q\9h 'Y, \ Oee, O imKN, t^ T m, v NT, :u0u KQKN, 0Sub-1G iQx0TQ0_0 CMOS-MEMS R^000n0i 0, ,{63V_(uirtf[O%fc[f[SoO, 13.5 0000/ƖMzSbS, 2016t^3g19 e 22e, qgN]mi'Yf[ 'Y\q\00000 [21p-P17-18]. </li> <li> [ l, Chang Tso-Fu Mark, Chen Chun-Yi, \ Oee, :u0u KQKN, t^ T m, q\9h 'Y, v NT, f9h ckN, 0ё0c0M0g0\OW0_0 Ti/Au _\000000n0i [['` 0, ,{63V_(uirtf[O%fc[f[SoO, 13.5 0000/ƖMzSbS, 2016t^3g19 e 22e, qgN]mi'Yf[ 'Y\q\00000 [21p-P17-19]. </li> <li> Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, and Masato Sone, 0Application of Supercritical Carbon Dioxide in Electroplating of Gold Materials Used in MEMS Devices 0, ,{63V_(uirtf[O%fc[f[SoO, 13.5 0000/ƖMzSbS, 2016t^3g19 e 22e, qgN]mi'Yf[ 'Y\q\00000 [21p-P17-20]. </li> <li> wZX }'Y, g0u POt, Chang Tso-Fu Mark, Chen Chun-Yi, \ Oee, :u0u KQKN, t^ T m, q\9h 'Y, v NT, f9h ckN, 00000'W.~fk000ё / 000Mzd\i n0_jhvyr'`UO 0, ,{63V_(uirtf[O%fc[f[SoO, 13.5 0000/ƖMzSbS, 2016t^3g19 e 22e, qgN]mi'Yf[ 'Y\q\00000 [21p-P17-21]. </li> <li> EmΑ SUN, U im\, Chen Chun-Yi, Chang Tso-Fu Mark, q\9h 'Y, :u0u KQKN, v NT, f9h ckN, 00000fR0fk000gёn0_jhvyr'`UO 0, ,{63V_(uirtf[O%fc[f[SoO013.5 0000/ƖMzSbS, 2016t^3g19 e 22e, qgN]mi'Yf[ 'Y\q\00000 [21p-P17-23]. </li> <li> mI \l, Chen Chun-Yi, Chang Tso-Fu Mark, q\9h 'Y, :u0u KQKN, v NT, f9h ckN, 00000'W.~fk000 MEMS (uёl0c0M0n0_jhvyr'`n0UO 0, ,{63V_(uirtf[O%fc[f[SoO, 13.5 0000/ƖMzSbS, 2016t^3g19 e 22e, qgN]mi'Yf[ 'Y\q\00000 [21p-P17-25]. </li> <li> q\9h 'Y, \ Oee, t^ T m, v NT, :u0u KQKN, 0Sub-1GiQx0TQ0_0Mzd\0003R^000n0Wyi 0, P[`1XOf[O2016t^}T'YO, 2016t^3g15e-18e, ]N]'Yf[ O000 00, y\ wy\^, C-10-16. </li> <li> 'Y4X ^s^, s|0u Vim, Ńl S, O imKN, wS f, _ f_, v NT, 0!q}000000000k0J0Q00tX`1XQuKbl0(uD0_0000000hTlpeUO 0, P[`1XOf[O2016t^}T'YO, 2016t^3g15e-18e, ]N]'Yf[ O00000, y\ wy\^ </li> <li> 'YKj Ҋ*Yΐ, Sck _ΐ, O imKN, wS f, 2ue f[, ? wL, -N,g ՈKN, ]hN fN, v NT, 0000f}0(uD0_00000000n0b_rgiSKbln0i 0, P[`1XOf[O2016t^}T'YO, 2016t^3g15e-18e, ]N]'Yf[ O00000, y\ wy\^ </li> <li> R 000, \ Oee, q\9h 'Y, O imKN, Sck _ΐ, wS f, :u0u KQKN, v NT, 0CMOSNOі00000-ln0i 0, P[`1XOf[O2016t^}T'YO, 2016t^3g15e-18e, ]N]'Yf[ O00000, y\ wy\^ </li> <li> ؚ[ W'Y, k0u `_f, w] mN, O imKN, Sck _ΐ, wS f, v NT, 0SSOPhb[ňT[_WRF000000Wg 0, P[`1XOf[O2016t^}T'YO, 2016t^3g15e-18e, ]N]'Yf[ O000 00, y\ wy\^ </li> <li> w] mN, Ng\f, s|oNa, `l0u, eN, o0ul, O imKN, wS f, v NT, 0JWb0su00000000000(uD0_00.5V 1.56mW OOK 00000000000 0, P[`1XOf[O}T'YO, ]N]'Yf[ O00000, y\ wy\^ </li> <li> 'Y\ QO*Y, wS f, v NT, \qZS, 0SPICE k000[,n000k0We0D0_0*Y}`l000n0zv 0, P[`1XOf[O}ThQV'YO, 2016t^3g14e-2016t^3g18e, ]N]'Yf[ O00000, y\ w, B-9-16, 2016. </li> <li> \S ], w] mN, `l0u , O imKN, Sck _ΐ, wS f, v NT, 0tXzvW000000000(uNOmR00000!q}O_j 0, 0000RFxvzO, 2016t^3g1e-2e, Vl[00X0~0 \gn0[, ^\ w </li> <li> [+j Py*Y, O imKN, Sck _ΐ, wS f, v NT, 0O}0(uD0_0WX4lRϑ,n[bSn0i 0, 0000RFxvzO, 2016t^3g1e-2e, Vl[00X0~0 \gn0[, ^\ w </li> <li> w] mN, O imKN, 00.5Vg0R\OY00RF00000000000 0, STARC000002015, 2015t^11g27e, e*j\mV000, WS(*j\m^/nS:Se*j\m3-18-1, e,g </li> <li> `l0u , O imKN, 0ƖV Tgsa0(uD0_00000OSubl 0, STARC000002015, 2015t^11g27e, e*j\mV000, WS(*j\m^/nS:Se*j\m3-18-1, e,g </li> <li> O imKN, }v9h {S, `l0u , w] mN, wS f, v NT, 0NORRF000000bSh0L 0, Microwave Workshops and Exhibition, TH3B-1, 2015. (b_o) </li> <li> w] mN, Ng \f, s|o Na, `l0u , e N, , o0u l, O imKN, wS f, v NT, 0JWb0_0_000000000000(uD0_0 0.5V 1.56mW RF00000000000 0, ,{42V0000RFxvzO, 2015t^11g24e, -N.Y'Yf[_}iW!h, qgNeN:S </li> <li> 'Y4X ^s^, s|0u Vim, hS ^_, Ńl S, O imKN, wS f, _ f_, q\ N imNΐ, v NT, 0'Y!j!q}000000000n0_00n0Y_V0^0(uD0_0tX`1XQuKbl 0, wvtXh0000000000xvzO, 2015t^11g5e-6e, `1XOxvz_ji ,g, qgN, P[`1XOf[ObSxvz1XJT Vol.115 no.290 p.121 </li> <li> ؚ[ W'Y, q\9h 'Y, \ Oee, O imKN, Sck _ΐ, wS f, t^ T m, v NT, :u0u KQKN, 0yRSO6R_k0J0Q00ca'`000i(u'`n0i 0, ,{7VƖMzSMEMS000000, 2015t^10g28e-30e, e_o000000000001g000 , e_o we_o^, 30pm1-D-6. </li> <li> Qg PyxQ, w0u , o0u Tf, wN N, :u0u KQKN, v NT, s 8^}i, 0u ePNΐ, K IQck, T0u wN, 00000AmQg0n000000^\̃n00000_T{ 0, ,{7VƖMzSMEMS000000, 2015t^10g28e-30e, e_o000000000001g000 , e_o we_o^, 30pm1-D-3. </li> <li> PO^ Cf-f, \ Oee, ~g\ f, q\9h 'Y, t^ T m, f9h ckN, v NT, :u0u KQKN, 0MEMSR^000n0_00n0ё^\i SOn0[@wRUO 0, ,{7VƖMzSMEMS000000, 2015t^10g28e-30e, e_o000000000001g000 , e_o we_o^, 29pm3-PM-5. </li> <li> \ Oee, q\9h 'Y, ؚ[ W'Y, O imKN, Sck _ΐ, wS f, v NT, t^ T m, :u0u KQKN, 000000000000000000(uD0_0CMOS-MEMS R^000n0_00n00006R_000Vn0i 0, ,{7VƖMzSMEMS000000, 2015t^10g28e-30e, e_o000000000001g000 , e_o we_o^, 29pm2-D-4. </li> <li> q\9h 'Y, \ Oee, t^ T m, v NT, :u0u KQKN, 0Sub-1G^20GƖMzSMEMSca'`000 0, ,{7VƖMzSMEMS000000, 2015t^10g28e-30e, e_o000000000001g000 , e_o we_o^, 29pm3-PM-2. </li> <li> Qg PyxQ, w0u , o0u Tf, wN N, :u0u KQKN, v NT, s 8^}i, 0u ePNΐ, K IQck, T0u wN, 00000(uD0_0PDMS0}̃Ucrs000n0 ic! -+}YIQgq\k00000000n0IQ_T{n0,n- 0, ,{76V_(uirtf[Oyc[ f[SoO013.4 Si00000M}0MEMS0ƖMzSbS, 2015t^9g13e-16 e, TSK\VOp4X aw w TSK\^ [14a-1C-10]. </li> <li> PO^ Cf-f, \ Oee, ~g\ f, q\9h 'Y, t^ T m, f9h ckN, v NT, :u 0uKQKN, 0MEMSR^000n0_00n0ё^\i SOn0[@wRUO 0, ,{76V_(uirt f[Oyc[f[SoO013.4 Si00000M}0MEMS0ƖMzSbS, 2015t^9g13 e-16e, TSK\VOp4X aw w TSK\^ [15a-PB4-3]. </li> <li> \ Oee, q\9h 'Y, ؚ[ W'Y, O imKN, Sck _ΐ, wS f, v NT, t^ T m, :u0u KQKN, 00006R_WCMOS-MEMSR^000Vn0i 0, ,{76V_(uir tf[Oyc[f[SoO013.4 Si00000M}0MEMS0ƖMzSbS, 2015t^9g 13e-16e, TSK\VOp4X aw w TSK\^ [15a-PB4-2]. </li> <li> q\9h 'Y, \ Oee, t^ T m, v NT, :u0u KQKN, 0Sub-1G^20GƖMzSMEMS R^000n0W,gUO 0, ,{76V_(uirtf[Oyc[f[SoO013.4 Si000 00M}0MEMS0ƖMzSbS02015t^9g13e-16e, TSK\VOp4X aw w TSK\^ [15a-PB4-1]. </li> <li> 'Y\ QO*Y, wS f, v NT, \qZS 0[q\ w\4l0W:Sk0J0Q00*Y}IQzvϑn0[,nUO 0, s^b27t^^lOf[OSx0W:S#T'YO, 2015t^9g12e-13e, ёl]mi'Yf[, ёl w, e,g, A2-8, 2015. </li> <li> [ l, Chang Tso-Fu Mark, \ Oee, ~g\ f, :u0u KQKN, t^ T m, q\ 9h'Y, O imKN, v NT, f9h ckN 0ё0c0M0g0\OW0_0MEMS0000 k0J0Q00R\Oi [['` 0, _(uirtf[OƖMzSMEMSbSxvzO ,{6VƖMzS MEMSbSxvz0000000, 2015t^7g31e, NHK>ebSxvz@b, qgNN0u 7:S, IMWS-06-P7. </li> <li> ؚ[ W'Y, q\9h 'Y, \ Oee, O imKN, Sck _ΐ, wS f, t^ T m, v NT, :u0u KQKN, 0MEMSca'`0000(uD0_0yRSO6R_n0i 0, _(uirtf[O ƖMzSMEMSbSxvzO ,{6VƖMzSMEMSbSxvz0000000, 2015t^7g31 e, NHK>ebSxvz@b, qgNN0u7:S, IMWS-06-P6. </li> <li> ؚ[ W'Y, w] mN, }v9h {S, O imKN, wS f, v NT, 0hb[ňT[_RF000000Wg 0, 0000RFxvzO, 2015t^7g20e-23e, K\EN\tXeSQg0000, PQ\ w, e,g </li> <li> `l0u , O imKN, wS f, v NT, 0ƖV TgWhTlpe000000[sk0TQ0_0Li 0, 0000RFxvzO, 2015t^7g20e-23e, K\EN\tXeSQg0000, PQ\ w, e,g </li> <li> ؚ[ W'Y, q\9h 'Y, \ Oee, NN \*Y, O imKN, Sck _ΐ, wS f, t^ T m, v NT, :u0u KQKN, 0ca'`0000(uD0_0yRSO6R_n0Wyi 0, s^b27t^lf[O00000000000萀}TxvzO0]N]'Yf[;Sf[~v t^X, 2015t^7g2e 3e, PHS-15-18/CHS-15-31/MSS-15-3/BMS-15-24, pp.5-8. </li> <li> [ l, Chang Tso-Fu Mark, q\9h 'Y, \ Oee, ~g\ f, O imKN, t^ T m, :u0u KQKN, v NT, f9h ckN, 0ё0c0M0g0\OW0_0_\000000n0b_r[['`UO 0, s^b27t^lf[O00000000000萀}TxvzO, ]N]'Yf[;Sf[~v t^X, 2015t^7g2e 3e, PHS-15-20/CHS-15-33/MSS-15-5/BMS-15-26, pp.15-18. </li> <li> Qg PyxQ, w0u , o0u Tf, wN N, :u0u KQKN, v NT, s 8^}i, 0u ePNΐ, K IQck, T0u wN, 00000AmQg0n000000^\̃n00000_T{ 0, s^b27t^lf[O00000000000萀}TxvzO, ]N]'Yf[;Sf[~vt^ X, 2015t^7g2e 3e, BMS-15-46, pp.49-52. </li> <li> v NT, 0pu.z_jƖMzbSn0eU\ 00G,nh0]0n0_(u 0, P[`1XOf[O0000RFxvzO, 2015t^6g25e, qgN]mi'Yf[b_o </li> </ol> <a name="ConfWo"><h3>0Conferences/Meetings without Abstract</h3></a> N/A <br/><br/><br/> <a name="Books"><h3>0Books</h3></a> N/A <br/><br/><br/> <a name="Exhibitions"><h3>0Exhibitions</h3></a> <ol> <li> QU\: v0 Oxvz[( O imKN), qgN]mi'Yf[ 0N__ 0, 0000qQuRxvzc2_ji U\:yO: ,{4VD00M00n0e0O000000000 Pe: 2015t^12g18e^19e P0W: y\ wD00M0^ </li> <li> QU\: v0 Oxvz[( O imKN), qgN]mi'Yf[ 0N__ 0, 0000qQuRxvzc2_ji U\:yO: ϊ*W]mi0002015 Pe: 2015t^10g15e^17e P0W: wΑ wϊ*^ </li> <li> QU\: v0 Oxvz[, qgN]mi'Yf[ 0N__ 0, 0000qQuRxvzc2_ji U\:yO: J0J0_0]mi0002016 Pe: 2015t^2g4e^6e P0W: qgN'Y0u:S </li> </ol> <a name="Other"><h3>0Other</h3></a> <ol> <li> O imKN, 0000R:CMOS-RFƖMzV-h0o 0, s^b27t^^VDEC000000Ye VLSI-Ye000, 2015t^5g21e^22e, qgN'Yf[fk0uHQzw00 </li> </ol> </div> <!-- end content --> <div class="sidebar"> <!-- ---------------------------------------------Highlights--------------------------------------------- --> <div class="sidebar-inner"> <h4>Contents</h4> <!-- ------------------------- --> <div class="news-item"> <a href="#Journals">Journals</a><br/><br/> <a href="#IntConf">International Conferences</a><br/><br/> <a href="#TutPapers">Tutorial Papers</a><br/><br/> <a href="#DomConf">Domestic Conferences</a><br/><br/> <a href="#ConfWo">Conferences/Meetings without Abstract</a><br/><br/> <a href="#Books">Books</a><br/><br/> <a href="#Exhibitions">Exhibitions</a><br/><br/> <a href="#Other">Other</a> </div> </div> <!-- end <div class="sidebar-inner"> --> </div> <!-- end sidebar --> <div class="clear"></div> </div> <!-- end main --> </div><!-- end container-inner --> </div><!-- end container --> <div id="footer"> <p> S0n0000QY0y0f0n00000ezn0!qe 0XO0yX0~0Y0<br> 000{tN<A href="mailto:masu(at)pi(dot)titech(dot)ac(dot)jp">Prof. Kazuya Masu</a><br> Designed by Hiroyuki Ito</p> </div><!-- end footer --> </body> </html>