・Journals

  1. Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "Deformation behavior of electroplated gold composed of nano-columnar grains embedded in micro-columnar textures," Materials Letters, Vol.202, Sep.2017, pp.82-85.
  2. Keisuke Asano, Hao-Chun Tang, Takashi Nasgoshi, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone, "Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices," Microelectronics Engineering, vol.180, Aug.2017, pp.15-19.
  3. Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu and Masato Sone, "Tensile Tests of Micro-Specimens Made of Electroplated Gold," Microelectronics Engineering, vol.174, April 2017, pp.6-10.DOI: 10.1016/j.mee.2016.12.004.

・International Conferences

  1. Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test," in Proc. 43rd Micro and Nano Engineering (MNE2017), Braga, Portugal, Sept. 18-22, 2017.
  2. Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone, "Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End," in Proc. 43rd Micro and Nano Engineering (MNE2017), Braga, Portugal, Sept. 18-22, 2017.
  3. Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone, "Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices," in Proc. 43rd Micro and Nano Engineering (MNE2017), Braga, Portugal, Sept. 18-22, 2017.
  4. Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Kazuya Masu, and Masato Sone, "Enahnced Bending Strength of Electrodeposited Pure Gold Canrilevers in Micro-Bending Test," in Proc. 43rd Micro and Nano Engineering (MNE2017), Braga, Portugal, Sept. 18-22, 2017.
  5. Shota Otobe, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu, "A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes," in Proc. 2017 International Conference on Solid State Devices and Materials (SSDM 2017), Sendai International Center, Miyagi, Japan, Sept. 19-22, 2017.
  6. Ippei Tsuji, Motohiro Takayasu, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu, "Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology," in Proc. 2017 International Conference on Solid State Devices and Materials (SSDM 2017), Sendai International Center, Miyagi, Japan, Sept. 19-22, 2017.
  7. Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara, and Kazuya Masu, "A Capacitive Sensor Circuit Based on Relaxation Oscillator for Sub-1mG MEMS Inertial Sensors," in Proc. 2017 International Conference on Solid State Devices and Materials (SSDM 2017), Sendai International Center, Miyagi, Japan, Sept. 19-22, 2017.
  8. Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone, "Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications," in Proc. RACI National Centenary Conference, Melbourne, Australia, July 23-28, 2017
  9. Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone, "FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices," in Proc. 21th International Conference on Solid State Ionics, SSI-21, Padua, Italy, June. 18-23, 2017.
  10. Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone, "Micro-Mechanical Property Evaluation of Electroplated Au-Cu Alloys toward Applications in MEMS Accelerometers," in Proc. 21th International Conference on Solid State Ionics, SSI-21, Padua, Italy, June. 18-23, 2017.
  11. Chun-Yi Chen, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone, "Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components," in Proc. 21th International Conference on Solid State Ionics, SSI-21, Padua, Italy, June. 18-23, 2017.
  12. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, and Kazuya Masu, "Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology," in Proc. The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), June 18-22, 2017, Kaohsiung Exhibition Center, Kaohsiung, Taiwan, pp. 2187-2190.
  13. Takuya Yamaguchi, Shiro Dosho, Noboru Ishihara, Hiroyuki Ito, Kazuya Masu, Hiroyuki Nakamoto, "A topology exploration and an optimization of planar inverted "F" antenna (PIFA) with Generic Algorithm," 2017 Thailand - Japan Microwave(TJMW2017), KMUTT Knowledge Exchange for Innovation Center (KX), King Mongkut's University of Technology Thonburi (KMUTT), Bangkok, Thailand, June 14-16, 2017.
  14. Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Noboru Ishihara, Kazuya Masu, "A High-Resolution Capacitive-Sensor Interface Based on a Relaxation Oscillator," 2017Thailand - Japan Microwave (TJMW2017), KMUTT Knowledge Exchange for Innovation Center (KX), King Mongkut's University of Technology Thonburi (KMUTT), Bangkok, Thailand, June 14-16, 2017.
  15. Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Noboru Ishihara, Kazuya Masu, "A High-Resolution Capacitive-Sensor Interface Based on a Relaxation Oscillator," 2017 Vietnam - Japan Microwave (VJMW 2017), Hanoi University of Science and Technology, Hanoi, Vietnam, June 13-14, 2017.
  16. Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone, "Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer," in Proc. 21st Topical Meeting of the International Society of Electrochemistry, Szeged, Hungary, April 23-26, 2017.
  17. Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Yoshihiro Miyake, and Kazuya Masu, "MEMS inertial sensors for biomedical applications," in Proc. 12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017), UCLA Meyer & Renee Luskin Conference Center, Los Angeles, CA, USA, April 9-12, 2017. (invited)
  18. Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Masato Sone and Kazuya Masu, "A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices," in Proc. 12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017), UCLA Meyer & Renee Luskin Conference Center, Los Angeles, CA, USA, April 9-12, 2017, MoP2.6, pp. 264-267.

・Tutorial Papers

    N/A

・Domestic Conferences

  1. 山根 大輔, 小西 敏文, 佐布 晃昭, 橘 航一朗, 寺西 美波, 陳 君怡, Tso-Fu Mark Chang, 曽根 正人, 町田 克之, 益 一哉, 「金めっきで形成したMEMS加速度センサの長期振動特性に関する検討」, 第78回 応用物理学会秋季学術講演会, 13.4 Si系プロセス・Si系薄膜・配線・MEMS・集積化技術, 2017年9月5日−8日, 福岡国際会議場・福岡国際センター・福岡サンパレスホテル[8p-PA2-13], 福岡県, 日本
  2. 古賀 達也, 辻 一平, 高安 基大, 伊藤 浩之, 山根 大輔, 道正 志郎, 小西 敏文, 石原 昇, 町田 克之, 益 一哉, 「積層メタル技術を用いた高感度MEMS慣性センサの傾斜計応用の検討」, 第78回 応用物理学会 秋季学術講演会, 2017年9月5日-8日, 福岡国際会議場・国際センター・福岡サンパレス, 福岡県, 日本
  3. 辻 一平, 高安 基大, 伊藤 浩之, 山根 大輔, 道正 志郎, 小西 敏文, 石原 昇, 町田 克之, 益 一哉, 「積層メタル技術を用いた高感度MEMS慣性センサの傾斜計応用の検討」, 第78回 応用物理学会 秋季学術講演会, 2017年9月5日-8日, 福岡国際会議場・国際センター・福岡サンパレス, 福岡県, 日本
  4. 高安 基大, 道正 志郎, 伊藤 浩之, 山根 大輔, 小西 敏文, 町田 克之, 石原 昇, 益 一哉, 「MEMS加速度センサ用高分解能容量検出回路」, 第78回 応用物理学会 秋季学術講演会, 2017年9月5日-8日, 福岡国際会議場・国際センター・福岡サンパレス, 福岡県, 日本
  5. 高安 基大, 道正 志郎, 伊藤 浩之, 山根 大輔, 小西 敏文, 町田 克之, 石原 昇, 益 一哉, 「MEMS加速度センサ用高分解能容量検出回路の評価」, 第8回 集積化MEMS技術研究ワークショップ, 2017年7月26日, 香川大学 林町キャンパス 社会連携・知的財産センター棟 3F, 香川県, 日本
  6. 辻 一平, 高安 基大, 伊藤 浩之, 山根 大輔, 小西 敏文, 道正 志郎, 石原 昇, 町田 克之, 益 一哉, 「積層メタル技術を用いた高感度MEMS傾斜計の検討」, 第8回 集積化MEMS技術研究ワークショップ, 2017年7月26日, 香川大学 林町キャンパス 社会連携・知的財産センター棟 3F, 香川県, 日本
  7. 高安 基大, 權田 惇晟, 小西 敏文, 山根 大輔, 伊藤 浩之, 石原 昇, 道正 志郎, 町田 克之, 益 一哉, 「人体振動測定のためのMEMS慣性センサを用いたモジュールの検討」, LSIとシステムのワークショップ2017, 2017年5月15日−2017年5月16日, 東京大学 生産技術研究所 コンベンションホール, 東京都, 日本

・Conferences/Meetings without Abstract

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・Books

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・Exhibitions

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・Other

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