Daisuke Yamane
News@
2019/12/11
ySeminar TalkzTalked about Vibrational Energy Harvester in "•ĒŽqƒiƒmƒeƒNƒmƒƒW[‘æ174ˆĪˆõ‰ī Œ¤‹†‰ī"i☞ Detailj

2019/12/2 - 6
yInt. ConferencezPowerMEMS2019i@Krakow, Polandj, 1 paperi☞Detailj

2019/11/6
ySeminar TalkzTalked about Vibrational Energy Harvester in "Žž‘ã‚đüV‚ˇ‚é‰ī"i☞ Detailj

2019/10/9
yAwardzDaisuke Yamane received Award of Senior Membership from IEEJ (The Institute of Electrical Engineers of Japan)

2019/9/20
yJournal PaperzResearch on Twins for MEMS structures has been accepted for Metalsi☞ Detailj

2019/8/30
yExhibition: Talk and DemozPresentation and Demonstration about the research results of Vibrational Energy Harvester in Innovation Japan 2019i☞ Detailj

2019/7/23 - 2019/8/9
yPress Release, Journal PaperzResearch on High-resolution MEMS Accelerometers has been accepted for Sensors and Materials i☞ Detailj
Tokyo Tech News, etc.FJuly 23, 2019i☞Detailj
EE Times Japan, etc.FJuly 25, 2019i☞Detailj
The Science News, etc.FAug. 2-9, 2019i☞Detailj

2019/7/20
yJournal PaperzResearch papers on Au-Cu Alloy Micro Structures have been accepted for Journal of Solid State Science and Technology‚ÆMicroelectronic Engineeringi☞ Detailj

2019/7/11
yNewspaperzResearch on Vibrational Energy Harvester, Nikkei Sangyo Shimbuni☞Detailj

2019/7/8
yMediazInterview with the award winners, Nature Digesti☞ Detailj

2019/7/5
ySeminar TalkzTalked about Vibrational Energy Harvester in Nano Salon Seminar No.3i☞ Detailj

2019/6/26
yPress ReleasezResearch on Vibrational Energy Harvester, JST press release jointed with Tokyo Techi☞ Detailj

2019/5/17
yMediazSpringer Nature has released a YouTube video on the research presentation and award ceremony of SDGs Award in Nature's 150th anniversary symposium i☞ Detailj

2019/4/27
yJournal PaperzResearch on a High-Sensitivity Tactile Sensor has been accepted for Sensors and Actuators A: Physicali☞ Detailj

2019/4/4
yAwardzDaisuke Yamane received SDGs Award in Nature's 150th anniversary symposiumi☞ Detailj

2019/3/28
yInvited TalkzTalked about Vibrational Energy Harvester in JSAP SDRJ BCiBeyond CMOS/ERMiEmerging Research MaterialsjjMeetingi☞ Detailj

2019/3/26
yMediazResearch on Vibrational Energy Harvester, Tokyo Tech Bulletin No. 54i☞ Detailj

2019/3/20
yInt. ConferencezTransducers2019 (@Berlin, Germany), 1 paper accepted as Late Newsi☞ Detailj

2019/3/12
yDomestic ConferencezJSAP Spring Meeting (@Tokyo Tech), 6 presentations

2019/2/4
yMediazResearch on Vibrational Energy Harvester, IEEE SPECTRUMi☞ Detailj

2019/1/28
yMediazResearch on Vibrational Energy Harvester, Tokyo Tech News, EE Times Japan etc.i☞ Detailj

2019/1/27
yPress ReleasezResearch on Vibrational Energy Harvester, JST press release jointed with Tokyo Techi☞ Detailj

2019/1/27-31
yInt. ConferencezIEEE-MEMS2019 (@South, Korea), 2 papersi☞ Detailj

2018/12/4 - 7
yInt. ConferencezPowerMEMS2018i@Florida, USAj, 1 paperi☞Detailj

Affiliation Laboratory for Future Interdisciplinary Research of Science and Technology, Institute of Innovative Research, Tokyo Institute of Technology
Current Research Topics
  • Integrated CMOS-MEMS
  • MEMS Inertial Sensor
  • MEMS Energy Harvester
Education & Career
  • 2017.10 - now@@@ Japan Science and Technology Agency, PRESTO Research Director
  • 2016. 4  - now@@@ Laboratory for Future Interdisciplinary Research of Science and Technology (FIRST),
    @@@@@@@@@@Institute of Innovative Research (IIR), Tokyo Institute of Technology, Assistant Professor
  • 2012. 4  - 2016. 3@@Precision and Intelligence Laboratory, Tokyo Institute of Technology, Assistant Professor
  • 2011. 6  - 2012. 3@@University of California, Los Angeles(UCLA), Visiting Scholar
  • 2011. 4  - 2012. 3@@Japan Society for the Promotion of Science (JSPS), Research FellowiPD)
  • 2011. 3@@ Ph.D.@@Electrical Engineering and Information Systems, Graduate School of Engineering,
    @@@@@@@@@@The University of Tokyo
  • 2010. 4  - 2011. 3@@Japan Society for the Promotion of Science, Research Fellow@iDC2j
  • 2008. 4  - 2010. 3@@G-COE program in theDepartment of Electrical Engineering an‚„ Information Systems,
    @@@@@@@@@@The University of Tokyo, Research Assistant
  • 2008. 3 @@M.E.@@ Electrical Engineering, Graduate School of Engineering, The University of Tokyo
  • 2007. 7  - 2008. 3@@Kanagawa Academy of Science and Technology (KAST), Technical Assistant
  • 2006.11 - 2008. 3@@Institute of Industrial Science, The University of Tokyo, Technical Assistant
  • 2006. 3 @@B.S.@@ Electronic Engineering, The University of Tokyo
Dissertation
    "A Study on SOI RF-MEMS Passive Devices by Functional Layer-wise Design Method"
    Ph.D.@March 2011



Journal Paper
(40 papers)
  1. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Hiroyuki Ito, and Kazuya Masu,
    "A MEMS Accelerometer for Sub-mG Sensing,"
    Sensors and Materials, vol. 31, no.9, pp.2883-2894,2019.
    DOI:https://doi.org/10.18494/SAM.2019.2122
  2. Haochun Tang, Tso-Fu Mark Chang, Yaw-Wang Chai, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu and Masato Sone,
    "Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect,"
    Metals, vol. 9, no.9, pp.987-1 - 987-9, Sept. 2019.
    DOI:https://doi.org/10.3390/met9090987
  3. Keisuke Asano, Tso-Fu Mark Chang, Haochun Tang, Takashi Nagoshi, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu and Masato Sone,
    "High Strength Electrodeposited Au-Cu Alloys Evaluated by Bending Test toward Movable Micro-Components,"
    ECS Journal of Solid State Science and Technology, vol. 8, no. 8, pp.412-415, July 2019.
    DOI:https://doi.org/10.1149/2.0151908jss
  4. Kyotaro Nitta, Tso-Fu Mark Chang, Koichiro Tachibana, Hao-chun Tang, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test,"
    Microelectronic Engineering, vol. 215, pp.111001-1 ? 111001-4, July 2019.
    DOI:https://doi.org/10.1016/j.mee.2019.111001
  5. Yu-Hong Gao, Yu-Hao Jen, Rongshun Chen, Daisuke Yamane, and Cheng-Yao Lo,
    "Five-fold sensitivity enhancement in a capacitive tactile sensor by reducing material and structural rigidity,"
    Sensors & Actuators: A. Physical, vol.293, 1 July 2019, pp.167-177.
    DOI:https://doi.org/10.1016/j.sna.2019.04.043
  6. Ken Hashigata, Tso-Fu Mark Chang, Haochun Tang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Strengthening of micro-cantilever by Au/Ti bi-layered structure evaluated by micro-bending test toward MEMS devices,"
    Microelectronic Engineering, vol.213, 15 May 2019, pp.13-17.
    DOI:https://doi.org/10.1016/j.mee.2019.04.008
  7. KoichiroTachibana, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Long-term structure stability of Ti/Au layered micro-cantilever evaluated by vibration test,"
    Microelectronic Engineering, vol.207, 15 Feb. 2019, pp.33-36.
    DOI:https://doi.org/10.1016/j.mee.2019.01.002
  8. Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nasgoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications,"
    Microelectronic Engineering, vol. 195, 2018, pp. 20-24. (Available online 30 April 2018)
    DOI:https://doi.org/10.1016/j.mee.2018.04.021
  9. Hao-Chun Tang, Ken Hashigata, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Toshifumi Konishi, Daisuke Yamane,Katsuyuki Machida, Kazuya Masu, Masato Sone
    "Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide,"
    Elsevier Surface and Coatings Technology, vol. 350, 2018, pp. 1065-1070. (Available online 12 February 2018)
    DOI:https://doi.org/10.1016/j.surfcoat.2018.02.041
  10. Motohiro Takayasu, Ippei Tsuji, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu
    "Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer,"
    Sensors and Materials, vol. 30, no. 12, 2018, pp.2919-2926.
    DOI:https://doi.org/10.18494/SAM.2018.1840
  11. Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
    "Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices,"
    Journal of The Electrochemical Society, vol. 165, 2018, pp.D58-D63.
    DOI: 10.1149/2.0441802jes
  12. Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara, and Kazuya Masu
    "A 0.18-ƒĘm CMOS Time-Domain Capacitive-Sensor Interface for Sub-1mG MEMS Accelerometers,"
    IEICE Electronics Express (ELEX), vol. 15, no. 2, 2018, pp.20171227.
    DOI:https://doi.org/10.1587/elex.15.20171227
  13. Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, and Masato Sone
    "Enhancement in Structure Stability of Gold Micro-Cantilever by Constraints at the Fixed-End for Applications as Movable Structures of MEMS,"
    Microelectronics Engineering, vol. 187-188, 2018, pp.105-109.
    DOI: https://doi.org/10.1016/j.mee.2017.11.015
  14. Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Deformation behavior of electroplated gold composed of nano-columnar grains embedded in micro-columnar textures,"
    Materials Letters, Vol. 202, Sep. 2017, pp. 82-85.
    DOI: https://doi.org/10.1016/j.matlet.2017.05.066
  15. Keisuke Asano, Hao-Chun Tang, Takashi Nasgoshi, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices,"
    Microelectronics Engineering, vol. 180, Aug. 2017, pp.15-19.
    DOI: https://doi.org/10.1016/j.mee.2017.05.044
  16. Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu and Masato Sone,
    "Tensile Tests of Micro-Specimens Made of Electroplated Gold,"
    Microelectronics Engineering, vol. 174, April 2017, pp. 6-10.
    DOI: https://doi.org/10.1016/j.mee.2016.12.004
  17. Hao-Chun Tang, Chun-Yi Chen, Masaharu Yoshiba, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices,"
    Journal of The Electrochemical Society, vol. 164, issue 4, Feb. 2017, pp. D244-D247.
    DOI: 10.1149/2.141704jes
  18. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu and Katsuyuki Machida,
    "Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer,"
    Microelectronics Reliability, vol. 66, November 2016, pp. 78-84.
    DOI: 10.1016/j.microrel.2016.09.018
  19. Hao-chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Enhancement of Mechanical Strength in Au Films Electroplated with Supercritical Carbon Dioxide,"
    Electrochemistry Communications, vol. 72, November 2016, pp. 126-130.
    DOI: http://dx.doi.org/10.1016/j.elecom.2016.09.019
  20. Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression,"
    Materials Transactions, Vol. 57, No. 8, 2016, pp. 1257-1260.
    DOI: http://doi.org/10.2320/matertrans.MG201612
  21. Chun-Yi Chen, Masaharu Yoshiba, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Pulse Electroplating of Ultra-Fine Grained Au Films with High Compressive Strength,"
    Electrochemistry Communications, Vol.67, 2016, pp. 51-54.
    DOI: http://dx.doi.org/10.1016/j.elecom.2016.03.017
  22. Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "A 1-mG MEMS Sensor,"
    ECS Transactions, vol. 72, issue 3, 2016, pp. 7-14.
    DOI: 10.1149/07203.0007ecst
  23. Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, and Masato Sone
    "Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers,"
    Microelectronics Engineering, vol. 153, 2016, pp.90-93.
    DOI: http://dx.doi.org/10.1016/j.mee.2016.02.054
  24. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "A 0.1G-to-20G Integrated MEMS Inertial Sensor,"
    Japanese Journal of Applied Physics, vol. 54, no. 8, 2015, pp. 087202.1-087202.4.
    DOI: 10.7567/JJAP.54.087202
  25. Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass,"
    Microsystem Technologies, vol. 22, 2016, pp. 459-464.
    (online version: published on April 26, 2015)
    DOI: 10.1007/s00542-015-2539-y
  26. Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "A Sub-1G MEMS Sensor,"
    ECS Transactions, vol. 66, issue 5, 2015, pp.131-138.
    DOI: 10.1149/06605.0131ecst
  27. Daisuke Yamane, Toshifumi Konishi,, Takaaki Matsushima, Shota Kamei, Kazuya Masu, and Katsuyuki Machida,
    "An Evaluation Method of Brownian Noise in Highly Sensitive Capacitive Sensors"
    IEEJ Transaction on Sensors and Micromachines, vol.135, no.4, pp.142-143, April 2015.
    DOI: http://dx.doi.org/10.1541/ieejsmas.135.142
  28. Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, and Kazuya Masu,
    "Integrated CMOS-MEMS Technology and Its Applications,"
    ECS Transactions, vol. 61, issue 6, 2014, pp.21-39.
    DOI: 10.1149/06106.0021ecst
  29. Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Kazuya Masu, Katsuyuki Machida, and Hiroshi Toshiyoshi,
    "A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology,"
    Japanese Journal of Applied Physics, vol. 53, 2014, pp. 04EE15.1-7.
    (Special issue on SSDM 2013)
    DOI: 10.7567/JJAP.53.04EE15
  30. Motohiro Takayasu, Atsushi Shirane, Sangyeop Lee, Daisuke Yamane, Hiroyuki Ito, Xiaoyu Mi, Hiroaki Inoue, Fumihiko Nakazawa, Satoshi Ueda, Noboru Ishihara, and Kazuya Masu,
    "An 8 channel, 20 V output CMOS switching driver with 3.3 V power supply using triple-well biasing techniques for integrated MEMS device control,"
    Japanese Journal of Applied Physics, vol. 53, 2014, pp. 04EE13.1-8.
    (Special issue on SSDM 2013)
    DOI: 10.7567/JJAP.53.04EE13
  31. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi and Kazuya Masu,
    "Design of sub-1g microelectromechanical systems accelerometers,"
    Applied Physics Letters, Vol. 104, Issue 7, 074102, Feb. 2014.
    DOI: 10.1063/1.4865377
  32. Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Kazuya Masu, Katsuyuki Machida, and Hiroshi Toshiyoshi,
    "An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology,"
    Japanese Journal of Applied Physics, Vol. 53, 027202, pp. 027202-1 - 027202-9, 2014.
    DOI:10.7567/JJAP.53.027202
  33. Daisuke Yamane, Winston@Sun, Shigeo Kawasaki, Hiroyuki Fujita and Hiroshi Toshiyoshi,
    "A Methodology for RF Performance Evaluation on Laterally-movable RF-MEMS Waveguides in Electrostatic Operation"
    IEICE Transaction on Electronics, Vol. J97-C, No. 1, pp.37-45, Jan. 2014.
  34. Daisuke Yamane, Yi-Chien Wu, Ting-Hsiang Wu, Hiroshi Toshiyoshi, Michael Teitell, and Pei-Yu Chiou,
    "Electrical impedance monitoring of photothermal porated mammalian cells,"
    Journal of Laboratory Automation, vol. 19, no. 1, pp.50-59, Feb. 2014.
    (online version: published on June 24, 2013)
    DOI:10.1177/2211068213494390
  35. Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Gou Motohashi, Ken Kagaya, Hiroyuku Ito, Noboru Ishihara,@Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    "Novel Sensor Structure and its Evaluation for Integratd Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer,"
    Japanese Journal of Applied Physics (special issue on MNC 2012), Vol. 52, No. 6, pp.06GL04, June 2013.
    DOI:10.7567/JJAP.52.06GL04
  36. Daisuke Yamane, Winston@Sun, Shigeo Kawasaki, Hiroyuki Fujita and Hiroshi Toshiyoshi,
    "A Study of Air-suspended Silicon CPW for Ku-band RF-MEMS Switch Application"
    IEICE Transaction on Electronics,Vol. J95-C, No. 10, pp.219-227, Oct. 2012.
  37. Daisuke Yamane, Winston Sun, Harunobu Seita, Shigeo Kawasaki, Hiroyuki Fujita, and@Hiroshi Toshiyoshi,
    "A Ku-band Dual-SPDT RF-MEMS Switch by Double-Side SOI Bulk Micromachining,"
    IEEE Journal of Microelectromechanical Systems, vol.20, no.5, pp.1211-1221, Oct. 2011.
    DOI: 10.1109/JMEMS.2011.2162490
  38. Daisuke Yamane, Yuheon Yi, Hiroyuki Fujita and Hiroshi Toshiyoshi,
    "A Fabrication Process of MEMS Coplanar Waveguide Using a Thick Plated Gold Layer as DRIE Mask"
    IEEJ Transaction on Sensors and Micromachines, vol.131, no.3, pp.130-131, March 2011.
  39. Daisuke Yamane, Winston Sun, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    "A 12GHz bulk-micromachined RF-MEMS phase shifter by SOI layer-separation design,"
    IEICE Electronics Express, vol.7, no.24, pp.1785-1789, Dec. 2010.
  40. Daisuke Yamane, Winston Sun, Harunobu Seita, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    "An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism,"
    IEICE Electronics Express, vol.7, no.2, pp.80-85, Jan. 2010.



International Conference
(156 papers, including 23 invited)
  1. Tso-Fu Mark Chang, Hao-Chun Tang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Electrodeposition of Au-Cu Alloys and the Micro-Mechanical Properties,"
    237th ECS Meeting with the 18th International Meeting on Chemical Sensors (IMCS 2020), May 10-14, 2020, Montr?al, Canada. (Accepted, Oral)
  2. Tatsuya Koga, Takashi Ichikawa, Daisuke Yamane, Shinichi Iida, Noboru Ishihara, Hiroyuki Ito, Katsuyuki Machida, and Kazuya Masu,
    "A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing,"
    The 7th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2020), March 23-26, 2020, Hiroshima, Japan. (Accepted, LateNews)
  3. Yukiya Tohyama, Hiroaki Honma, Noboru Ishihara, Hidehiko Sekiya, Hiroshi Toshiyoshi, and Daisuke Yamane,
    "Energy Harvesting from Non-Stational Environmental Vibrations using a Voltage-Boost Rectifier Circuit,"
    The 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Power MEMS 2019), December 2-6, 2019, Krakow, Poland. (LateNews Poster)
  4. Yu-An Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Micro-Mechanical Properties of Electrodeposited Au-TiO2 Composite Film,"
    in Proc. MRS Fall Meeting 2019, Boston, Massachusetts, U.S., Dec. 1-6, 2019. (Poster)
  5. Kyotaro Nitta, Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone,
    "Electrodepostion of Au-Cu Alloy Micro-Cantilevers and the Youngfs modulus by Resonance Frequency Method,"
    in Proc. MRS Fall Meeting 2019, Boston, Massachusetts, U.S., Dec. 1-6, 2019. (Poster)
  6. Tomoki Iriya, Kyotaro Nitta, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Electroplating of Au-Pd Alloy Films and the Mechanical Properties,"
    in Proc. International Thin Films Conference (TACT 2019), Taipei, Taiwan, Nov. 17-20, 2019. (Poster)
  7. Cheng-Yao Lo and Daisuke Yamane
    "High-Sensitivity Capacitive Tactile Sensor with Vertically Stacked Hollow Structures,"
    in Proc. The 4th International Symposium on Biomedical Engineering, Act City Congress Center, Hamamatsu, Japan, November 14-15, 2019. (Poster)
  8. Atsushi Fujii, Kento Hisa, Musashi Kakugawa, Daisuke Yamane, Takayuki Shibata and Moeto Nagai
    "High-throughput Screening Device for Genes Related to Algal Phototaxis: Parallel Micro-Liquid Handling,"
    in Proc. The 4th International Symposium on Biomedical Engineering, Act City Congress Center, Hamamatsu, Japan, November 14-15, 2019. (Poster)
  9. Yu-Hao Jen, Chia-Tso Mo, Kean Aw, Daisuke Yamane, Cheng-Yao Lo,
    "Extensive Sensitivity Enhancement in Stacked Capacitive Tactile Sensors,"
    in Proc. IEEE Sensors 2019, Montreal, Canada, Oct. 27-30, 2019. (Poster)
  10. Kyotaro Nitta, Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone,
    "Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability,"
    in Proc. IEEE Sensors 2019, Montreal, Canada, Oct. 27-30, 2019. (Poster)
  11. Tatsuya Koga, Takashi Ichikawa, Naoto Tanaka, Taiki Ogata, Hiroki Ora, Daisuke Yamane, Noboru Ishihara, Hiroyuki Ito, Masato Sone, Katsuyuki Machida, Yoshihiro Miyake, Kazuya Masu,
    "High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds,"
    in Proc. IEEE Biomedical Circuits and Systems Conference 2019 (BioCAS2019), Nara, Japan, Oct. 17-19, 2019. (Poster)
  12. yInvitedz
    Katsuyuki Machida, Daisuke Yamane, Toshifumi Konishi, Shin-ichi Iida, Noboru Ishihara, Tso-Fu Mark Chang, Masato Sone, Hiroyuki Ito and Kazuya Masu,
    "MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology,"
    in Proc. 236th ECS Meeting, Atlanta, GA, Oct. 13-17, 2019.
  13. Kosuke Suzuki, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Sample Geometry Effect on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test,"
    in Proc. 45th International Conference on Micro & Nano Engineering (MNE2019), Rhodes, Greece, Sept. 23-26, 2019. (Poster)
  14. Kyotaro Nitta, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone,
    "Fabrication and Evaluation of Au-Cu Alloy 3D Structures toward MEMS Movable Components,"
    in Proc. 45th International Conference on Micro & Nano Engineering (MNE2019), Rhodes, Greece, Sept. 23-26, 2019. (Poster)
  15. Hitomi Watanabe, Chun-Yi Chen, Tso-Fu Mark Chang, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Effects of Fixed End Structure on Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever toward MEMS Applications,"
    in Proc. 45th International Conference on Micro & Nano Engineering (MNE2019), Rhodes, Greece, Sept. 23-26, 2019. (Poster)
  16. Yu-An Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Electrodeposition of TiO2 Nanoparticle Reinforced High Strength Au Film for MEMS Applications,"
    in Proc. 45th International Conference on Micro & Nano Engineering (MNE2019), Rhodes, Greece, Sept. 23-26, 2019. (Poster)
  17. Yukiya Tohyama, Hiroaki Honma, Noboru Ishihara, Hiroshi Toshiyoshi, and Daisuke Yamane,
    "Bandwidth Enhancement of Vibrational Energy Harvesters by a Voltage-Boost Rectifier Circuit,"
    in Proc. 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2019 - EUROSENSORS XXXIII), 23-27 June 2019, Estrel Berlin Hotel&Congress Center, Berlin, Germany (Late news, Poster)
  18. Kosuke Suzuki, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Takanshi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test,"
    in Proc. The 2nd International Conference on Material Strength and Applied Mechanics (MSAM 2019), Kiev, Ukraine, May 27-30, 2019. (Poster)
  19. Hitomi Watanabe, Takuma Suzuki, Chun-Yi Chen, Takanshi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    "High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence,"
    in Proc. The 2nd International Conference on Material Strength and Applied Mechanics (MSAM 2019), Kiev, Ukraine, May 27-30, 2019. (Poster)
  20. Masato Sone, Hao-Chun Tang, Masaharu Yoshiba, Chun-Yi Chen, Takanshi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, and Kazuya Masu
    "Mechanical properties of electrodeposited gold-copper alloy by micro-compression test,"
    in Proc. The 2nd International Conference on Material Strength and Applied Mechanics (MSAM 2019), Kiev, Ukraine, May 27-30, 2019. (Poster)
  21. Ken Atsumi, Shota Otobe, Tatsuya Koga, Takashi Ichikawa, Daisuke Yamane, Shinichi Iida, Hiroyuki Ito, Noboru Ishihara, Masato Sone, Katsuyuki Machida, and Kazuya Masu
    "Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers,"
    in Proc. Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2019), 12-15 May 2019, Paris, France, pp.121-124. (Oral)
  22. Daisuke Yamane, Shota Otobe, Ken Atsumi, Tatsuya Koga, Toshifumi Konishi, Teruaki Safu, Shinichi Iida, Hiroyuki Ito, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu,
    "A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS,"
    in Proc. 32nd Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019), Seoul, Korea, Jan. 27-31, 2019, pp. 684-687. (Poster)
  23. Daisuke Yamane, Hiroaki Honma, and Hiroshi Toshiyoshi,
    "A MEMS VIBRATORY ENERGY HARVESTER CHARGED BY AN OFF-CHIP ELECTRET,"
    in Proc. 32nd IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019), Seoul, Korea, Jan. 27-31, 2019, pp. 1025-1028. (Poster)
  24. Yukiya Tohyama, Hiroaki Honma, Noboru Ishihara, Hidehiko Sekiya, Hiroshi Toshiyoshi, and Daisuke Yamane,
    "A Voltage-Boost Rectifier Circuit for Energy Harvesting from Environmental Vibrations,"
    in Proc. 18th IEEE International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2018), December 4-7, 2018, Daytona Beach, FL, USA, PT-11d. (Poster)
  25. yInvitedz
    Daisuke Yamane, Katsuyuki Machida, Hiroyuki Ito and Kazuya Masu,
    "Sub-1mG MEMS Inertial Sensor for Biomedical Applications,"
    in Proc. The 20th Takayanagi Kenjiro Memorial Symposium joined with the 4th International Conference on Nano Electronics Research and EducationiICNERE2018j, Research Institute of Electronics, Shizuoka University, Japan, Nov. 27-29, 2018.
  26. Shota Otobe, Tatsuya Koga, Ken Atsumi, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Shin-ichi Iida, Hiroyuki. Ito, Noboru Ishihara, Katsuyuki Machida and Kazuya Masu,
    "A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes,"
    in Proc. 31st International Microprocesses and Nanotechnology Conference (MNC2018), November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan, 15P-7-121L (Poster)
  27. Cheng-Yao Lo and Daisuke Yamane
    "Vibration Characteristics of a High-Sensitivity Flexible Capacitive Tactile Sensor with Reduced Structural Rigidity,"
    in Proc. The 3rd International Symposium on Biomedical Engineering, Satake Memorial Hall, Hiroshima University, Hiroshima, Japan, November 8-9, 2018. (Poster)
  28. Musashi Kakugawa, Kento Hisa, Daisuke Yamane, Takayuki Shibata and Moeto Nagai
    "Parallel Manipulation of Small-volume Solutions for Analyzing Phototaxis and Gene Expression of Algae,"
    in Proc. The 3rd International Symposium on Biomedical Engineering, Satake Memorial Hall, Hiroshima University, Hiroshima, Japan, November 8-9, 2018. (Poster)
  29. Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Mechanical Characterization of Constant Current Electroplated Au-Cu Alloy Micro-Cantilever,"
    in Proc. IUMRS-ICA (19th International Union of Materials Research Societies International Conference in Asia), Bali, Indonesia, Oct. 31 - Nov. 2, 2018. (Poster)
  30. Ken Hashigata, Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone,
    "Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever,"
    in Proc. IUMRS-ICA (19th International Union of Materials Research Societies International Conference in Asia), Bali, Indonesia, Oct. 31 - Nov. 2, 2018. (Poster)
  31. Hitomi Watanabe, Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    "Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability,"
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  32. Takahiro Yamamoto, Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    "Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys for Reliability of MEMS Devices,"
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  33. Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    "Youngfs Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device,"
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  34. Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    "High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices,"
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  35. Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    "Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test,"
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  36. Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    "Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test,"
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  37. Kyotaro Nitta, Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    "Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever,"
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  38. Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Kyotaro Nitta, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    "Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test,"
    in Proc. 44rd Micro and Nano Engineering (MNE2018), Copenhagen, Denmark, Sept. 24-27, 2018. (Poster)
  39. Tso-Fu Mark Chang, Hao-Chun Tang, Kyotaro Nitta, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu and Masato Sone,
    "Electrodeposition of High Strength Au-Cu Alloys for MEMS Devices,"
    in Proc. 2018 International Conference on Solid State Devices and Materials (SSDM2018), The University of Tokyo, Tokyo, Japan, Sept. 9-13, 2018. (Oral)
  40. yInvitedz
    Daisuke Yamane, Katsuyuki Machida, Hiroyuki Ito, and Kazuya Masu, "High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology,"
    Taiwan-Japan-US Joint Workshop on Energy Materials and Sustainable Development, September 3-4, 2018, National Chiao Tung University (NCTU), Hsinchu, Taiwan.
  41. yInvitedz
    Kazuya Masu, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Tso-Fu Mark Chang, Masato Sone and Yoshihiro Miyake,
    "CMOS-MEMS accelerometer with gold proof-mass and its application in diagnosis of Parkinsons Disease,"
    4th International Conference on Condensed Matter and Materials Physics, August 16-17, 2018, London, UK.
  42. Ken Hashigata, Haochun Tang, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "The effect of acid pre-treatment on electroplating of gold on titanium substrate,"
    in Proc. 32nd International Conference on Surface Modification Technologies (SMT32), June 27-29, 2018, Gipuzkoa Science and Technology Park, San Sebastian, Spain. (Oral)
  43. Shota Otobe, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida and Kazuya Masu
    "Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection,"
    in Proc. Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018), June 24-27, 2018, HKUST, Hong Kong SAR (Oral)
  44. yInvitedz
    Masato Sone, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, and Kazuya Masu,
    "Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer,"
    Taiwan-Japan Joint Symposium (co-organized with the 2018 International Conference on Smart Sensors (ICSS 2018), June 1-2, 2018 Fullon Hotel Taipei, Taiwan. (Poster + 2 min Presentation)
  45. Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Kyotaro Nitta, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    "Structure Stability of Ti/Au Micro-Cantilever Evaluated by Long-Term Vibration Test,"
    Taiwan-Japan Joint Symposium (co-organized with the 2018 International Conference on Smart Sensors (ICSS 2018), June 1-2, 2018 Fullon Hotel Taipei, Taiwan. (Poster + 2 min Presentation)
  46. Chun-Yi Chen, Haochun Tang, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    "Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices,"
    Taiwan-Japan Joint Symposium (co-organized with the 2018 International Conference on Smart Sensors (ICSS 2018), June 1-2, 2018 Fullon Hotel Taipei, Taiwan. (Poster + 2 min Presentation)
  47. Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    "A Study on Effective Young's Modulus of Micro-Cantilevers Fabricated by Au Electroplating,"
    Taiwan-Japan Joint Symposium (co-organized with the 2018 International Conference on Smart Sensors (ICSS 2018), June 1-2, 2018 Fullon Hotel Taipei, Taiwan. (Poster + 2 min Presentation)
  48. Kyotaro Nitta, Koichiro Tachibana, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Hiroyuki Ito, Kazuya Masu, and Masato Sone,
    "Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components,"
    Taiwan-Japan Joint Symposium (co-organized with the 2018 International Conference on Smart Sensors (ICSS 2018), June 1-2, 2018 Fullon Hotel Taipei, Taiwan. (Poster + 2 min Presentation)
  49. yInviting Presentationz
    Daisuke Yamane
    "High-Sensitivity MEMS Inertial Sensor for Medical Applications,"
    The 2nd Taiwan-Japan Joint Symposium in Taiwan, Japan-Taiwan Young Researcher Mini-Workshop, May 31 - June 1, 2018, National Tsing Hua University (Hsinchu) and Fullon Hotel Taipei (Taipei), Taiwan.
  50. Kyoutarou Nitta, Koichiro Tachibana, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices,"
    in Proc .233rd ECS Meeting, Seattle, WA, USA, May 13-17, 2018. (Poster)
  51. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Shin-ichi Iida, Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Masato Sone, Katsuyuki Machida and Kazuya Masu,
    "Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology,"
    in Proc. 13th Annual IEEE International Conference on Nano-Micro Engineered and Molecular Systems (IEEE NEMS 2018), Grand Hyatt Singapore, Singapore, April 21-26, 2018, WM-II-f_3_243. (Oral)
  52. Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys,"
    in Proc. 22nd Topical Meeting of the International Society of Electrochemistry, Tokyo, Japan, April 15-18, 2018. (Poster)
  53. Ken Hashigata, Hao-Chun Tang, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film,"
    in Proc. 22nd Topical Meeting of the International Society of Electrochemistry, Tokyo, Japan, April 15-18, 2018. (Poster)
  54. Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology,"
    in Proc. 2017 MRS Fall Meeting, Boston, Massachusetts, U.S., Nov. 26- Dec. 1, 2017. (Poster)
  55. Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests,"
    in Proc. 2017 MRS Fall Meeting, Boston, Massachusetts, U.S., Nov. 26- Dec. 1, 2017.(Poster)
  56. Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology,"
    in Proc. 2017 MRS Fall Meeting, Boston, Massachusetts, U.S., Nov. 26- Dec. 1, 2017. (Poster)
  57. Cheng-Yao Lo, Daisuke Yamane, and Kazuya Masu
    "Force Response and Vibration Characteristics of Flexible Capacitive Sensors,"
    in Proc. The 2nd International Symposium on Biomedical Engineering, Multi-Purpose Digital Hall, Tokyo Institute of Technology, Tokyo, Japan, November 7-9, 2017, pp. 284-285, B-113. (Poster)
  58. Moeto Nagai, Musashi Kakugawa, Daisuke Yamane, and Kazuya Masu
    "Vibration Testing of Microfluidic Devices for Cell Analysis: Toward a Chip in Everyday Life,"
    in Proc. The 2nd International Symposium on Biomedical Engineering, Multi-Purpose Digital Hall, Tokyo Institute of Technology, Tokyo, Japan, November 7-9, 2017, pp. 312-313, B-127. (Poster)
  59. Hirofumi Niijima, Motohiro Takayasu, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu,
    "A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes,"
    in Proc. The 30th International Microprocesses and Nanotechnology Conference (MNC 2017), Nov. 6-9, 2017, Ramada Plaza Jeju Hotel, Jeju, Korea. (Late News, Poster)
  60. Toshifumi Konishi, Daisuke Yamane, Teruaki Safu, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu, and Shinichi Iida,
    "Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating,"
    in Proc. The 30th International Microprocesses and Nanotechnology Conference (MNC 2017), Nov. 6-9, 2017, Ramada Plaza Jeju Hotel, Jeju, Korea. (Oral)
  61. Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Youngfs Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition,"
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, F5-P10. (Poster)
  62. Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions,"
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, E6-P26. (Poster)
  63. Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components,"
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, F5-P09. (Poster)
  64. Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever,"
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, F5-P08. (Poster)
  65. Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Strategies of Mechanical Strengthening in Electroplated Au Materials,"
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, E6-P02. (Poster)
  66. yInvitedz
    Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu,
    "Sub-1mG Inertial Sensors by Multi-layer Metal Technology,"
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, F5-05.
  67. yInvitedz
    Tso-Fu Mark Chang, Haochun Tang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2,"
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, E6-12.
  68. yInvitedz
    Masato Sone, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu,
    "Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers,"
    in Proc. IUMRS International Conference in Asia (IUMRS-ICA) 2017, Taipei Nangang Exhibition Hall, Taipei, Taiwan, Nov. 5- 9, 2017, F5-02.
  69. Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components,"
    in Proc. TACT2017 International Thin Films Conference, National Dong Hwa University, Hualien, Taiwan, Oct. 15-18, 2017. (Poster)
  70. Shota Otobe, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida and Kazuya Masu
    "A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes,"
    in Proc. 2017 Int'l Conference on Solid State Devices and Materials (SSDM 2017), Sep. 19-22, 2017, Sendai International Center, Sendai, Miyagi, Japan. (Late News, Oral)
  71. Ippei Tsuji, Motohiro Takayasu, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu
    "Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology,"
    in Proc. 2017 Int'l Conference on Solid State Devices and Materials (SSDM 2017), Sep. 19-22, 2017, Sendai International Center, Sendai, Miyagi, Japan. (Oral)
  72. Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara and Kazuya Masu
    "A Capacitive Sensor Circuit Based on Relaxation Oscillator for Sub-1mG MEMS Inertial Sensors,"
    in Proc. 2017 Int'l Conference on Solid State Devices and Materials (SSDM 2017), Sep. 19-22, 2017, Sendai International Center, Sendai, Miyagi, Japan. (Oral)
  73. Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test,"
    in Proc. 43rd Micro and Nano Engineering (MNE2017), Braga, Portugal, Sept. 18-22, 2017. (Poster)
  74. Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End,"
    in Proc. 43rd Micro and Nano Engineering (MNE2017), Braga, Portugal, Sept. 18-22, 2017. (Poster)
  75. Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices,"
    in Proc. 43rd Micro and Nano Engineering (MNE2017), Braga, Portugal, Sept. 18-22, 2017. (Poster)
  76. Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    "Enahnced Bending Strength of Electrodeposited Pure Gold Canrilevers in Micro-Bending Test,"
    in Proc. 43rd Micro and Nano Engineering (MNE2017), Braga, Portugal, Sept. 18-22, 2017. (Poster)
  77. Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications,"
    in Proc. RACI National Centenary Conference, Melbourne, Australia, July 23-28, 2017. (Poster)
  78. Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices,"
    in Proc. 21th International Conference on Solid State Ionics, SSI-21, Padua, Italy, June. 18-23, 2017. (Poster)
  79. Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Micro-Mechanical Property Evaluation of Electroplated Au/Cu Alloys toward Applications in MEMS Accelerometers,"
    in Proc. 21th International Conference on Solid State Ionics, SSI-21, Padua, Italy, June. 18-23, 2017. (Poster)
  80. Chun-Yi Chen, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components,"
    in Proc. 21th International Conference on Solid State Ionics, SSI-21, Padua, Italy, June. 18-23, 2017. (Poster)
  81. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, and Kazuya Masu,
    "Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology,"
    in Proc. The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), June 18-22, 2017, Kaohsiung Exhibition Center, Kaohsiung, Taiwan, pp. 2187-2190. (Poster)
  82. Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer,"
    in Proc. 21st Topical Meeting of the International Society of Electrochemistry, Szeged, Hungary, April 23-26, 2017. (Poster)
  83. yInvitedz
    Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Yoshihiro Miyake, and Kazuya Masu,
    "MEMS inertial sensors for biomedical applications,"
    in Proc. 12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017), UCLA Meyer & Renee Luskin Conference Center, Los Angeles, CA, USA, April 9-12, 2017.
  84. Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Masato Sone and Kazuya Masu,
    "A Study on Youngfs Modulus of Electroplated Gold Cantilevers for MEMS Devices,"
    in Proc. IEEE NEMS 2017, UCLA Meyer & Renee Luskin Conference Center, Los Angeles, CA, USA, April 9-12, 2017, MoP2.6, pp. 264-267. (Poster)
  85. Daisuke Yamane, Kazuya Masu, and Cheng-Yao Lo,
    "A Study on Flexible Tactile Sensor for Assistance Robots,"
    in Proc. 1st International Symposium on Biomedical Engineering, Akio Suzuki Memorial Hall, M&D Tower, Tokyo Medical and Dental University, Tokyo, Japan, November 10-11, 2016, pp. 126-127. (Poster)
  86. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hideaki Nakajima, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "Youngfs modulus evaluation of electroplated Ti/Au structures for MEMS devices,"
    in Proc. 29th International Microprocesses and Nanotechnology Conference (MNC 2016), ANA Crowne Plaza Kyoto, Kyoto, Japan, November 8-11, 2016, 10D-5-1. (Oral)
  87. Toshifumi Konishi, Daisuke Yamane, Teruaki Safu, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology,"
    in Proc. IEEE Sensors 2016, Oct. 30 - Nov. 2, 2016, Orland, FL, USA., pp. 1162-1164. (Oral)
  88. Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Fine Grained Au Films with Controllable Mechanical Strength by Pulse Plating,"
    in Proc. The 2016 PRiME Meeting, Hawaii, USA, Oct. 2-7, 2016. (Poster)
  89. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, and Katsuyuki Machida,
    "A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology,"
    in Proc. 2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016), Tsukuba International Congress Center, Tsukuba, Japan, Sept. 26-29, 2016, pp. 485-486. (Oral)
  90. Toshifumi Konishi,Daisuke Yamane, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System,"
    in Proc. 2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016), Tsukuba International Congress Center, Tsukuba, Japan, Sept. 26-29, 2016, pp. 673-674. (Poster)
  91. yInvitedz
    Chun-Yi Chen, Masaharu Yoshiba, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "High Strength Au film Fabricated by Advanced Electrochemical Technique in Supercritical CO2 Emulsified Electrolyte for MEMS Accelerometers,"
    in Proc. 2nd International Conference and Expo on Separation Techniques, Valencia, Spain, Sep. 26-28.
  92. Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Mechanical Behaviour of Electroplated Gold Evaluated by Micro-Tensile Test for Application in MEMS Accelerometer,"
    in Proc. 42nd Micro and Nano Engineering (MNE2016), the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria, Sept. 19-23, 2016. (Poster)
  93. Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer,"
    in Proc. 42nd Micro and Nano Engineering (MNE2016), the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria, Sept. 19-23, 2016. (Poster)
  94. Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices,"
    in Proc. 42nd Micro and Nano Engineering (MNE2016), the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria, Sept. 19-23, 2016. (Poster)
  95. Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Enhancement of Mechanical Properties in Au Films Electroplated with Supercritical Carbon Dioxide,"
    in Proc. 42nd Micro and Nano Engineering (MNE2016), the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria, Sept. 19-23, 2016. (Poster)
  96. yInvitedz
    Kazuya Masu, Daisuke Yamane, Katsuyuki Machida, Masato Sone, Yoshihiro Miyake,
    "Development of High Sensitivity CMOS-MEMS Inertia Sensor and its Application to Early-Stage Diagnosis of Parkinson's Disease,"
    in Proc. the 46th European Solid-State Device Re-search Conference (ESSDERC), Swisstech Convention Centre, Lausanne, Switzerland, Sep. 12-15, 2016, pp.99-104.
  97. yInvitedz
    Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Enhanced mechanical property of metallic films with supercritical carbon dioxide for micro-electrical-mechanical system accelerometer,"
    in Proc. The 15th Symposium on Development of Supercritical Fluid Technology and Application and The 2nd International Workshop on Supercritical Fluid Dyeing Technology, Kaohsiung, Taiwan, Sep. 8-10.
  98. yInvitedz
    Masato Sone, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, and Kazuya Masu,
    "Electrodeposited Gold for Next Generation MEMS Accelerometer Toward Medical Applications,"
    in Proc. Integrative Biology-2016, Berlin, Germany, July 18-20 (invited lecture).
  99. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Hiroshi Toshiyohi, Kazuya Masu, and Katsuyuki Machida,
    "A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology,"
    in Proc. Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016), Kanazawa, Japan, June 26 - 29, 2016, pp. 299-300. (Poster)
  100. yInvitedz
    Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "A 1-mG MEMS Sensor,"
    in Proc. 229th ECS Meeting, San Diego, CA, USA, May 29 - June 3, 2016, MA2016-01(22):1147 (invited).
  101. Motohiro Takayasu, Daisuke Yamane, Toshifumi Konishi, Masakazu Sonobe, Takumi Kobayashi, Yamato Fukuta, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Kazuya Masu, and Katsuyuki Machida,
    "A Study of Railroad Vehicle Control by Inertial Sensors,"
    in Proc. 11th World Congress on Railway Research, Milan, Italy, May 29 - June 3, 2016. (Poster)
  102. Chun-Yi Chen, Masaharu Yoshiba, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Pulse Electroplating of Au Films with Ultra High Strength,"
    in Proc. 229th ECS Meeting, San Diego, CA, USA, May 29- June 2, 2016, MA2016-01:1123. (Poster)
  103. Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    "Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating,"
    in Proc. ISE - Topical Meeting, Auckland, New Zealand, April 17-20, 2016. (Poster)
  104. Yota Ishizuka, Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    "Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Structure,"
    in Proc. ISE - Topical Meeting, Auckland, New Zealand, April 17-20, 2016. (Poster)
  105. Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Study of Gold Electroplating by Constant and Pulse Current Method with Non-Cyanide Gold Sulfite Electrolyte,"
    in Proc. ISE - Topical Meeting, Auckland, New Zealand, April 17-20, 2016. (Poster)
  106. Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Pulse Electroplating of Ultra-Fine Grained Au Films with High Strength for Micro-Electrical-Mechanical System Devices,"
    in Proc. ISE - Topical Meeting, Auckland, New Zealand, April 17-20, 2016. (Poster)
  107. Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    "Preparation and Characterization of Gold Films by Electroplating with Supercritical Carbon Dioxide,"
    in Proc. ISE - Topical Meeting, Auckland, New Zealand, April 17-20, 2016. (Poster)
  108. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, and Katsuyuki Machida,
    "A Design of Spring Constant Arranged for MEMS Accelerometer by Multi-layer Metal Technology,"
    in Proc. IEEE NEMS 2016,Matsushima Bay and Sendai, Miyagi, Japan, April 17-20, 2016, B3P-B54. (Poster)
  109. Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology,"
    in Proc. IEEE Inertial Sensors 2016, Surf & Sand Resort, Laguna Beach, California, USA, Feb. 23-25, 2016, Late News, pp. 148-149. (Oral)
  110. Masaharu Yoshiba, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Micro-Mechanical Properties of Electrodeposited Gold Thin Films,"
    in Proc. TACT 2015 International Thin Films Conference, National Cheng Kung Univerisyt, Tainan, Taiwan, Nov, 15-18, 2015, pp. 513-516. (Poster)
  111. Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "A Sub-1G CMOS-MEMS Accelerometer,"
    in Proc. IEEE Sensors 2015, BEXCO, Busan, South Korea, Nov, 1-4, 2015, pp. 513-516. (Oral)
  112. Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, and Katsuyuki Machida,
    "Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology,"
    in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015, Late News, pp. 786-787. (Oral)
  113. Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    "Study on Ti/Au Two-Layered Cantilevers with Different Aspect Ratio for MEMS Devices,"
    in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015, pp. 52-53. (Poster)
  114. Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Mechanical Properties of Electrodeposited Gold for MEMS Device,"
    in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015, pp. 48-49. (Poster)
  115. Toshifumi Konishi, Daisuke Yamane, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Kazuya Masu, Hiroshi Toshiyoshi, and Katsuyuki Machida,
    "Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer,"
    in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015, pp. 798-799. (Oral)
  116. Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    "Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers,"
    in Proc. 41st Micro and Nano Engineering (MNE2015), World Forum, Hague, Netherlands, Sept. 21-24, 2015, Wed-C-p81. (Poster)
  117. Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "High Mechanical Strength Gold Micro-Components Fabricated by Pulse Electroplating,"
    in Proc. 41st Micro and Nano Engineering (MNE2015), World Forum, Hague, Netherlands, Sept. 21-24, 2015, Wed-C-p5. (Poster)
  118. Masaharu Yoshiba, Chun-Yi Chen, Tsu-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    "Sample Size Effect on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test,"
    in Proc. 41st Micro and Nano Engineering (MNE2015), World Forum, Hague, Netherlands, Sept. 21-24, 2015, Wed-C-p19. (Poster)
  119. Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology,"
    in Proc. 41st Micro and Nano Engineering (MNE2015), World Forum, Hague, Netherlands, Sept. 21-24, 2015, Wed-C-p11. (Poster)
  120. Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, and Katsuyuki Machida,
    "A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology,"
    in Proc. 25th Advanced Metallization Conference Asian Session (ADMETAplus2015), Sept. 16-18, 2015, Global Convention Plaza, Seoul National University, Seoul, Korea. (Poster)
  121. Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, and Katsuyuki Machida,
    "A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology,"
    in Proc. 32nd Advanced Metallization Conference (AMC2015), Sept. 9-11, 2015, the West Pickle Research Building (WPR) of The University of Texas at Austin, Austin, Texas, US. (Oral)
  122. Masaharu Yoshiba, Chun-yi Chen, Tso-fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, and Masato Sone,
    "Compression Deformation of Micro-components Fabricated by FIB from Gold Electrodeposited Films,"
    in Proc. International Symposium for Advanced Materials Research (ISAMR 2015), Sun Moon Lake, Taiwan, Aug. 16-20, 2015, P13. (Poster)
  123. yInvitedz
    Daisuke Yamane, Kazuya Masu, and Katsuyuki Machida,
    "A Sub-1G MEMS Inertial Sensor,"
    in Proc. International Symposium for Advanced Materials Research (ISAMR 2015), Sun Moon Lake, Taiwan, Aug. 16-20, 2015, ID20.
  124. yInvitedz
    Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, and Kazuya Masu,
    "Nano-G metrology system and its biomedical applications by CMOS-MEMS technology,"
    in Proc. 3rd International Conference on Integrative Biology, Melia Valencia, Valencia, Spain, Aug. 4-6, 2015, pp. 87.
  125. Minami Teranishi, Tso-Fu Mark Chang, Toshifumi Konishi, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Hiroyuki Ito, Kazuya Masu, Tatsuo Sato, Masato Sone,
    "Stability of Movable Structure Formed by Au Electroplating for MEMS Devices,"
    in Proc. 8th Int. Conf. on Materials for Advanced Technologies (ICMAT 2015), SUNTEC, Singapore, June 28 - July 3, 2015. (Poster)
  126. yInvitedz
    Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "A Sub-1G MEMS Sensor,"
    in Proc. the 227th ECS Meeting, the Hilton Chicago, Chicago, Illinois, USA, May 24-28, 2015, pp. 1332.
  127. yInvitedz
    Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, and Kazuya Masu,
    "CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-,"
    in Proc. 2015 International Conference on Electronics Packaging and iMAPS All Asia Conference, Kyoto Terrsa, Kyoto, Japan, April 14-17, 2015, pp. 201.
  128. Takaaki Matsushima, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology,"
    in Proc. 27th Int. Microprocesses and Nanotechnology Conference (MNC 2014), Hilton Fukuoka Sea Hawk, Fukuoka, Japan, Nov. 4-7, 2014, pp. 6C-5-5.
  129. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "A 1mG-to-20G Integrated MEMS Inertial Sensor,"
    in Proc. IEEE SENSORS 2014, Valencia Conference Center, Valencia, Spain, Nov. 2-5, 2014, pp. 1591-1594.
  130. Toshifumi Konishi, Takaaki Matsushima, Daisuke Yamane, Kazuya Masu, Hiroshi Toshiyoshi, and Katsuyuki Machida,
    "A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator,"
    in Proc. Int. Conf. on Solid-State Devices and Materials (SSDM 2014), Tsukuba International Congress Center, Tsukuba, Japan, Sep. 8-11, 2014, pp. 100-101.
  131. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida,
    "A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers,"
    in Proc. Int. Conf. on Solid-State Devices and Materials (SSDM 2014), Tsukuba International Congress Center, Tsukuba, Japan, Sep. 8-11, 2014, pp. 974-975.
  132. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    "A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers,"
    in Proc. 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014), EXCO, Daegu, Korea, June 29 - July 2, 2014, P2-55.
  133. Hiroyuki Ito, Shoichi Masui, Youichi Momiyama, Atsushi Shirane, Motohiro Takayasu, Yoshihiro Yoneda, Taiki Ibe, Taisuke Hamada, Sho Ikeda, Daisuke Yamane, Noboru Ishihara, and Kazuya Masu,
    "2.3 pJ/bit Frequency-Stable Impulse OOK Transmitter Powered Directly by an RF Energy Harvesting Circuit with -19.5 dBm Sensitivity,"
    IEEE Radio Frequency Integrated Circuits Symposium, Tampa Convention Center, USA, pp.13-15, Jun. 1-3, 2014.
  134. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    "A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer,"
    in Proc. 2014 IEEE International Interconnect Technology Conference/Advanced Metallization Conference (IITC/AMC 2014), San Jose, CA, USA, May 20-23, 2014, pp.113-116.
  135. yInvitedz
    Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, and Kazuya Masu,
    "Integrated CMOS-MEMS Technology and its Application,"
    The 2nd Int. Symp. on More-than-Moore, the 225th Meeting of the Electrochemical Society, Orland, Florida, USA, May 11-16, 2014, 1407.
  136. Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    "A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer,"
    in Proc. Symp. on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014), Cannes, Cote d'Azur, France, April 1-4, 2014, pp. 69-72.
  137. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Gou Motohashi, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    "Sub-1G MEMS Accelerometer,"
    in Proc. IEEE SENSORS 2013, Baltimore, Maryland, USA, Nov. 3-6, 2013, pp. 171-174.
  138. Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Satoshi Maruyama, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    "Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology,"
    2013 Int. Conf. on Solid State Devices and Materials (SSDM 2013), Hilton Fukuoka Sea Hawk, Fukuoka, Japan, Sep. 24-27, 2013, G-4-2.
  139. Motohiro Takayasu, Atsushi Shirane, Sang yeop Lee, Daisuke Yamane, Hiroyuki Ito, Mi Xiaoyu, Hiroaki Inoue, Fumihiko Nakazawa, Satoshi Ueda, Noboru Ishihara, and Kazuya Masu,
    "An 8-ch, 20-V Output CMOS Switching Driver with 3.3-V Power Supply for Integrated MEMS Devices Controlling,"
    2013 Int. Conf. on Solid State Devices and Materials (SSDM 2013), Hilton Fukuoka Sea Hawk, Fukuoka, Japan, Sep. 24-27, 2013, PS-5-1.
  140. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Gou Motohashi, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    "AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION,"
    in Proc. 17th Int. Conf on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, June 16-20, 2013, pp.22-25.
  141. Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Gou Motohashi, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    "Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers,"
    25th Int. Microprocesses and Nanotechnology Conference (MNC 2012), Kobe Meriken Park Oriental Hotel, Kobe, Japan, Oct. 30 - Nov. 2, 2012, pp. 1B-5-4.
  142. Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Gou Motohashi, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu,
    "A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer,"
    2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012), Kyoto Int. Conf. Center, Kyoto, Japan, Sep. 25-27, 2012 (Late News), pp. 1134-1135.
  143. Toshifumi Konishi, Satoshi Maruyama, Makoto Mita, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    "A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language,"
    2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012), Kyoto Int. Conf. Center, Kyoto, Japan, Sep. 25-27, 2012, pp. 1120-1121.
  144. Daisuke Yamane, Yi-Chien Wu, Ting-Hsiang Wu, Hiroshi Toshiyoshi, Michael A. Teitell, and Pei-Yu Chiou,
    "Real-Time Monitoring of Photothermal Porated Mammalian Cells by Electric Impedance Sensors,"
    IEEE International Conference on Optical MEMS & Nanophotonics, Banff, Alberta, Canada, August 6-9, 2012, pp. 220-221.
  145. yInvitedz
    Daisuke Yamane, and Hiroshi Toshiyoshi, "Monolithic integration of passive RF components by MEMS," IEEE 2011 International Symposium on VLSI Design, Automation and Test (VLSI-DAT), Hsinchu, Taiwan, Apr. 25-28, 2011.
  146. Daisuke Yamane, Winston Sun, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    "A Ku-Band RF-MEMS Phase Shifter with SOI Double-Side Bulk-Micromachining Design,"
    5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), Perth, Australia, July 6-9, 2010, pp.68.
  147. Daisuke Yamane, Hiroyuki Fujita, Hiroshi Toshiyoshi and Shigeo Kawasaki,
    "Development of a Dual-SPDT RF-MEMS Switch for Ku-band,"
    IEEE Radio and Wireless Symposium (RWS), New Orleans, LA, USA, Jan.10-14, 2010, pp.432-435.
  148. Daisuke Yamane, Kiyotaka Yamashita, Harunobu Seita, Hiroyuki Fujita, Hiroshi Toshiyoshi and Shigeo Kawasaki,
    "A Dual-SPDT RF-MEMS Switch on a Small-Sized LTCC Phase Shifter for Ku-band operation,"
    Asia-Pacific Microwave Conference (APMC), Singapore, Dec. 7-10, 2009, pp.555-558.
  149. Daisuke Yamane, Kiyotaka Yamashita, Harunobu Seita, Hiroshi Toshiyoshi, and Shigeo Kawasaki,
    "A Prototype of Ku-Band Small-Sized LTCC Phase Shifter with RF-MEMS Switches,"
    2009 Thailand-Japan MicroWave (TJMW2009), King Mongkutfs University of Technology North Bangkok Bangkok, Thailand, August 20-21, 2009, FR7-5.
  150. Kazuhiro Takahashi, Makoto Mita, Muneki Nakada, Daisuke Yamane, Akio Higo, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    "Development of Multi-user Multi-chip SOI CMOS-MEMS Process,"
    IEEE MEMS, Sorrent, Italy, Jan. 25-29, 2009, pp.701-704.
  151. Daisuke Yamane, Harunobu Seita, Winston Sun, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    "A 12-GHz DPDT RF MEMS Switch with Layer-wise Waveguide/Actuator Design Technique,"
    IEEE MEMS, Sorrent, Italy, Jan. 25-29, 2009, pp.888-891.
  152. Daisuke Yamane, Takeshi Yamamoto, Kenichiro Urayama, Kiyotaka Yamashita, Hiroshi Toshiyoshi, and Shigeo Kawasaki,
    "A Phase Shifter by LTCC Substrate with an RF-MEMS Switch,"
    The 38th European Microwave Conference (EuMC), Amsterdam, Netherlands, Oct.28-31, 2008, pp.611-613.
  153. David Dubuc, Daisuke Yamane, Zhang Rui, Yuheon Yi, Katia Grenier, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    "Modelling and Design Guidelines of Metamaterial-based Artificial Dielectric for the Miniaturization of Microwave Passive Circuit,"
    Metamaterials' 2008, Pamplona, Spain, Sep. 21-26, 2008.
  154. yInvitedz
    Daisuke Yamane, Kazuhiro Takahashi, Winston Sun, Harunobu Seita, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    "Microwave Switches by MEMS Technology and their Application to Phase-Shifter,"
    Second Japan-Taiwan Workshop on Future Frequency Control Devices, Tamkang University, Taiwan, Dec. 5, 2007.
  155. yInvitedz
    Daisuke Yamane, Kazuhiro Takahashi, Winston Sun, Harunobu Seita, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi,
    "RF-MEMS Switches for 5.8 GHz Phase Shifter Application,"
    Int. Workshop on Piezo-devices based on Latest MEMS Technologies, Nihon University, Tokyo, Nov. 26-27, 2007.
  156. Shinji Yamashita and Daisuke Yamane,
    "Stabilization of mode-locked fiber lasers using Bismuth-oxide-based highly nonlinear fiber,"
    Topical Meeting on Optical Amplifiers and Their Applications (OAA 2006), Whistler, Canada, June 25, 2006, no.OMD6.



Domestic Conference, Domestic & Int. Workshop
(156 papers, including 5 invited)
  1. Yu-an Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
    uElectrodeposited High Strength Au-TiO2 Nano Composite Film for MEMS Devicesv
    ‘æ67‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒEMEMSE‘•’u‹Zp, 2020”N3ŒŽ12“ú|15“ú, ã’q‘åŠw@Žl’JƒLƒƒƒ“ƒpƒX [15a-PB3-4].iƒ|ƒXƒ^[j
  2. “ü’J —FŽ÷, V“c‹ž‘ž˜N, Yu-An Chien, Tso-Fu Mark Chang, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, ’Ŧ“c Ž”V, ‰v ˆęÆ, ‘]Ē ŗl
    uAu-Pd‡‹ā–Œ‚Ė“d‹CƒƒbƒL‚Æ‚ģ‚Ė‹@ŠB“I“ÁĢv
    ‘æ67‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒEMEMSE‘•’u‹Zp, 2020”N3ŒŽ12“ú|15“ú, ã’q‘åŠw@Žl’JƒLƒƒƒ“ƒpƒX [15a-PB3-5].iƒ|ƒXƒ^[j
  3. ˆ­”ü ŒĢ, ŒÃ‰ę ’B–į, Žsė ’Žu, ŽRĒ ‘å•ã, ”Ņ“c Tˆę, ˆÉ“Ą _”V, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ
    uƒsƒ‰[Œ^“d‹É‚đ—p‚ĸ‚Ŋ’PˆęŽ3Ž˛MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    ‘æ67‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒEMEMSE‘•’u‹Zp, 2020”N3ŒŽ12“ú|15“ú, ã’q‘åŠw@Žl’JƒLƒƒƒ“ƒpƒX [14p-A305-11].iŒû“Ēj
  4. Žsė ’Žu, ˆ­”ü ŒĢ, ŒÃ‰ę ’B–į, ŽRĒ ‘å•ã, ”Ņ“c Tˆę, ˆÉ“Ą _”V, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ
    uƒsƒ‰[Œ^“d‹É‚É‚æ‚é’PˆęAuŽ3Ž˛MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŠ´“x‹Īˆę‰ģ‚ĖŒŸ“ĸv
    ‘æ67‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒEMEMSE‘•’u‹Zp, 2020”N3ŒŽ12“ú|15“ú, ã’q‘åŠw@Žl’JƒLƒƒƒ“ƒpƒX [14p-A305-11].iŒû“Ēj
  5. ŒÃ‰ę ’B–į, Žsė ’Žu, “c’† ’ŧ“o, •û ‘åŽ÷, ‘å—Į GŽ÷, ŽRĒ ‘å•ã, ÎŒ´ ¸, ˆÉ“Ą _”V, ‘]Ē ŗl, ’Ŧ“c Ž”V, ŽO‘î ”ü”Ž, ‰v ˆęÆ,
    u”÷Žã‹Ø‰šŒv‘Ē‚ÉŒü‚¯‚Ŋ‚•Ē‰đ”\MEMSŠĩĢƒZƒ“ƒTƒ‚ƒWƒ…[ƒ‹‚ĖŒŸ“ĸv
    ‘æ11‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2019”N11ŒŽ19“ú-11ŒŽ21“ú, ƒAƒNƒgƒVƒeƒB•lŧ.[19pm4-A-3]iŒû“Ēj
  6. Žsė ’Žu, ŒÃ‰ę ’B–į, ŽRĒ ‘å•ã, ”Ņ“c Tˆę, ÎŒ´ ¸, ˆÉ“Ą _”V, Chang Tso-Fu Mark, ‘]Ē ŗl, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uĪ‘wƒƒ^ƒ‹‹Zp‚ōėģ‚ĩ‚ŊMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖÕŒ‚“ÁĢ•]‰ŋ v
    ‘æ11‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2019”N11ŒŽ19“ú-11ŒŽ21“ú, ƒAƒNƒgƒVƒeƒB•lŧ.[19pm4-A-4]iŒû“Ēj
  7. Žsė ’Žu, ‰ŗ•” ãđž, ˆ­”ü ŒĢ, ŒÃ‰ę ’B–į, ŽRĒ ‘å•ã, ”Ņ“c Tˆę, ˆÉ“Ą _”V, ÎŒ´ ¸, ‘]Ē ŗl, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    u3Dƒsƒ‰[Œ^AuŽMEMS‰Á‘Ŧ“xƒZƒ“ƒTv
    ‘æ36‰ņuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€, 2019”N11ŒŽ19“ú-11ŒŽ21“ú, ƒAƒNƒgƒVƒeƒB•lŧ.[19am3-PS3-21]iƒ|ƒXƒ^[j
  8. Žsė ’Žu, ‰ŗ•” ãđž, ˆ­”ü ŒĢ, ŒÃ‰ę ’B–į, ŽRĒ ‘å•ã, ”Ņ“c Tˆę, ˆÉ“Ą _”V, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‘]Ē ŗl, ‰v ˆęÆ
    uAuŽ3Ž˛MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚Ė‚Ŋ‚ß‚ĖSCD“d‹É‚ĖŒŸ“ĸ (2)v
    ‘æ80‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSE‘•’u‹Zp, 2019”N9ŒŽ18“ú|21“ú, –kŠC“š‘åŠw ŽD–yƒLƒƒƒ“ƒpƒX [19a-E304-7].iŒû“Ēj
  9. Žsė ’Žu, V“‡ G•ļ, ŒÃ‰ę ’B–į, ŽRĒ ‘å•ã, ”Ņ“c Tˆę, ˆÉ“Ą _”V, ÎŒ´ ¸, ‘]Ē ŗl, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    u3Ž˛AuŽMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚É‚¨‚¯‚錟o“d‹É\‘ĸ‚ĖŒŸ“ĸv
    —ߘaŒŗ”N“d‹CŠw‰īƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“•”–呍‡Œ¤‹†‰ī, “Œ‹žH‹Æ‘åŠw‚ˇ‚¸‚Š‚¯‘äƒLƒƒƒ“ƒpƒX, 2019”N7ŒŽ1“ú|2“ú, MSS-19-26, pp.67-72.iŒû“Ēj.
  10. Daisuke Yamane
    "Energy Harvesters for Autonomous Wireless Sensors in True IoT Society"
    Nature's 150th anniversary symposium, THE FUTURE OF JAPANESE SCIENCE, Poster session: Your vision ` Foreseeing the impact of your research on society `, April 4, 2019, The University of Tokyo Yasuda AuditoriumiPoster { Award Lecturej
  11. ˆ­”ü ŒĢ, ‰ŗ•” ãđž, ŒÃ‰ę ’B–į, Žsė ’Žu, ŽRĒ ‘å•ã, ”Ņ“c Tˆę, ˆÉ“Ą _”V, ÎŒ´ ¸, ‘]Ē ŗl, ’Ŧ“c Ž”V, ‰v ˆęÆ
    uĪ‘wƒƒ^ƒ‹‹Zp‚É‚æ‚éƒsƒ‰[Œ^—e—ĘŒŸo“d‹É‚ĖŒŸ“ĸv
    ‘æ66‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSE‘•’u‹Zp, 2019”N3ŒŽ9“ú|12“ú, “Œ‹žH‹Æ‘åŠw ‘å‰ĒŽRƒLƒƒƒ“ƒpƒX [11a-W934-1].iŒû“Ēj
  12. Žsė ’Žu, V“‡ G•ļ, ŒÃ‰ę ’B–į, ŽRĒ ‘å•ã, ”Ņ“c Tˆę, ˆÉ“Ą _”V, ÎŒ´ ¸, ‘]Ē ŗl, ’Ŧ“c Ž”V, ‰v ˆęÆ
    u3Ž˛AuŽMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚É‚¨‚¯‚é•Ŋs•Ŋ”ÂŒ^“d‹É‚ĖŒŸ“ĸv
    ‘æ66‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSE‘•’u‹Zp, 2019”N3ŒŽ9“ú|12“ú, “Œ‹žH‹Æ‘åŠw ‘å‰ĒŽRƒLƒƒƒ“ƒpƒX [11a-W934-2].iŒû“Ēj
  13. “nį˛ “ĩ, —é–Ø ‘ņ^, Chen Chun-Yi, Chang Tso-Fu Mark, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ˆÉ“Ą _”V, ‰v ˆęÆ, ‘]Ē ŗl
    uTi/Au”÷ŦƒJƒ“ƒ`ƒŒƒo[‚Ė‰ˇ“xˆË‘ļĢ‚Ö‚ĖĪ‘w\‘ĸ‚Ė‰e‹ŋv
    ‘æ66‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSE‘•’u‹Zp, 2019”N3ŒŽ9“ú|12“ú, “Œ‹žH‹Æ‘åŠw ‘å‰ĒŽRƒLƒƒƒ“ƒpƒX [11a-W934-3].iŒû“Ēj
  14. ‰ŗ•” ãđž, ˆ­”ü ŒĢ, ŒÃ‰ę ’B–į, ŽRĒ ‘å•ã, ”Ņ“c Tˆę, ˆÉ“Ą _”V, ÎŒ´ ¸, ‘]Ē ŗl, ’Ŧ“c Ž”V, ‰v ˆęÆ
    uAuŽ3Ž˛MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚Ė‚Ŋ‚ß‚ĖSCD“d‹É‚ĖŒŸ“ĸv
    ‘æ66‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSE‘•’u‹Zp, 2019”N3ŒŽ9“ú|12“ú, “Œ‹žH‹Æ‘åŠw ‘å‰ĒŽRƒLƒƒƒ“ƒpƒX [12a-PB3-9].iƒ|ƒXƒ^[j
  15. —é–Ø N‰î, Ken Hashigata, ķ–ė Œ[‰î, Chun-Yi Chen, –ŧ‰z ‹MŽu, Tso-Fu Mark Chang, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ˆÉ“Ą _”V, ‰v ˆęÆ, ‘]Ē ŗl
    u”÷Ŧ‹Č‚°ŽŽŒą‚É‚æ‚é‹āŪ—ŋ‚Ė‹@ŠB“I‹­“x‚ĖƒTƒ“ƒvƒ‹Œ`ķŒø‰Ęv
    ‘æ66‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSE‘•’u‹Zp, 2019”N3ŒŽ9“ú|12“ú, “Œ‹žH‹Æ‘åŠw ‘å‰ĒŽRƒLƒƒƒ“ƒpƒX [12a-PB3-10].iƒ|ƒXƒ^[j
  16. V“c ‹ž‘ž˜N, Tang Haochun, Chen Chun-Yi, Chang Tso-Fu Mark, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ˆÉ“Ą _”V, ‰v ˆęÆ, ‘]Ē ŗl
    u“d‹C‚ß‚Á‚Ģ–@‚É‚æ‚éAu-Cu‡‹ā”÷ŦƒJƒ“ƒ`ƒŒƒo[‚Ėėģv
    ‘æ66‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSE‘•’u‹Zp, 2019”N3ŒŽ9“ú|12“ú, “Œ‹žH‹Æ‘åŠw ‘å‰ĒŽRƒLƒƒƒ“ƒpƒX [12a-PB3-11].iƒ|ƒXƒ^[j
  17. Žsė ’Žu, V“‡ G•ļ, ŒÃ‰ę ’B–į, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ”Ņ“c Tˆę, ˆÉ“Ą _”V, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uAu’PˆęŽ•Ŋs•Ŋ”ÂŒ^3Ž˛MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    ‘æ35‰ņuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€iƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“•”–å‘å‰īj, 2018”N10ŒŽ30“ú-11ŒŽ1“ú, ŽD–yŽs–¯Œđ—Ŧƒvƒ‰ƒU.[30am3-PLN-89]iƒ|ƒXƒ^[j
  18. ŒÃ‰ę ’B–į, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ”Ņ“c Tˆę, ˆÉ“Ą _”V, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    u1Ž˛MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖAuŽŒú–Œ‰ģ‚É‚æ‚鍂Ģ”\‰ģ‚ĖŒŸ“ĸv
    ‘æ35‰ņuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€iƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“•”–å‘å‰īj, 2018”N10ŒŽ30“ú-11ŒŽ1“ú, ŽD–yŽs–¯Œđ—Ŧƒvƒ‰ƒU.[01pm1-PLN-229]iƒ|ƒXƒ^[j
  19. ‰ŗ•” ãđž, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ”Ņ“c Tˆę, ˆÉ“Ą _”V, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uƒVƒ“ƒOƒ‹AuŽ‚Æ•ĒŠ„“d‹É—e—ĘŒŸo(SCD)•ûŽŽ‚đ—p‚ĸ‚Ŋ3Ž˛‘Sˇ“ŽMEMS‰Á‘Ŧ“xƒZƒ“ƒTv
    ‰ž—p•¨—Šw‰ī@WĪ‰ģMEMS‹ZpŒ¤‹†‰īŽåÃ ‘æ10‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2018”N10ŒŽ30“ú-11ŒŽ1“ú, ŽD–yŽs–¯Œđ—Ŧƒvƒ‰ƒU.[31pm1-C-4]iŒû“Ēj
  20. ’†“‡ ‰p—ē, Tso-Fu Mark Chang, Chun-Yi Chen, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ”N‹g —m, ˆÉ“Ą _”V, ‰v ˆęÆ, ‘]Ē ŗl,
    uMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ÉŒü‚¯‚Ŋ‹ā‚ß‚Á‚Ģ”÷ŦƒJƒ“ƒ`ƒŒƒo[‚Ėƒ„ƒ“ƒO—Ļ‚ÉŠÖ‚ˇ‚錤‹† v
    ‘æ79‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2018”N9ŒŽ18“ú|21“ú, –ŧŒÃ‰Ž‘Û‰ī‹cę [18a-233-6].iŒû“Ēj
  21. Žsė ’Žu, V“‡ G•ļ, ŒÃ‰ę ’B–į, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ”Ņ“c Tˆę, ˆÉ“Ą _”V, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    u‚•Ē‰đ”\3Ž˛ƒVƒ“ƒOƒ‹AuŽ•Ŋs•Ŋ”ÂŒ^MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸ v
    ‘æ79‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2018”N9ŒŽ18“ú|21“ú, –ŧŒÃ‰Ž‘Û‰ī‹cę [18p-PB2-5].iƒ|ƒXƒ^[j
  22. ŒÃ‰ę ’B–į, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ”Ņ“c Tˆę, ˆÉ“Ą _”V, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uAu ŽŒú–Œ‰ģ‚É‚æ‚éMEMS ‰Á‘Ŧ“xƒZƒ“ƒT‚Ė‚Ģ”\‰ģ‚ĖŒŸ“ĸ v
    ‘æ79‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2018”N9ŒŽ18“ú|21“ú, –ŧŒÃ‰Ž‘Û‰ī‹cę [18p-PB2-4].iƒ|ƒXƒ^[j
  23. ÜŒ´ P—S, ŒÃ‰ę ’B–į, “šŗ Žu˜Y, ˆÉ“Ą _”V, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ”Ņ“c Tˆę, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚É‚¨‚¯‚鎞ŠÔƒhƒƒCƒ“—e—ĘŒŸo‰ņ˜H‚Ė“‡ŨŒvƒ‚ƒWƒ…[ƒ‹‚ĖŒŸ“ĸ v
    ‘æ79‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2018”N9ŒŽ18“ú|21“ú, –ŧŒÃ‰Ž‘Û‰ī‹cę [18p-PB2-3].iƒ|ƒXƒ^[j
  24. ‰ŗ•” ãđž, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ”Ņ“c Tˆę, ˆÉ“Ą _”V, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    u•ĒŠ„“d‹ÉŒ^—e—ĘŒŸoiSCDj•ûŽŽ‚đ—p‚ĸ‚ŊAuŽ3Ž˛‘Sˇ“ŽMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    ‘æ79‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2018”N9ŒŽ18“ú|21“ú, –ŧŒÃ‰Ž‘Û‰ī‹cę [18p-PB2-2].iƒ|ƒXƒ^[j
  25. ŒÃ‰ę ’B–į, ‚ˆĀ Šî‘å, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, Ŧŧ •q•ļ, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uAuŽMEMSŠĩĢƒZƒ“ƒTƒ‚ƒWƒ…[ƒ‹‚Ė•]‰ŋv
    •ŊŦ30”N“d‹CŠw‰īE•”–呍‡Œ¤‹†‰ī, “Ū—ĮŒ§•ļ‰ģ‰īŠŲ, 2018”N7ŒŽ12“ú|13“ú, MSS-18-15, pp.12.iŒû“Ēj.
  26. ‰ŗ•” ãđž, V“‡ G•ļ, ‚ˆĀ Šî‘å, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, ÎŒ´ ¸, Ŧŧ •q•ļ, ˛•z Wē, ”Ņ“c Tˆę, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uƒVƒ“ƒOƒ‹AuŽ3Ž˛ˇ“ŽMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    •ŊŦ30”N“d‹CŠw‰īE•”–呍‡Œ¤‹†‰ī, “Ū—ĮŒ§•ļ‰ģ‰īŠŲ, 2018”N7ŒŽ12“ú|13“ú, MSS-18-17, pp.12.iŒû“Ēj.
  27. ŒÃ‰ę ’B–į, ‚ˆĀ Šî‘å, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, Ŧŧ •q•ļ, “šŗ Žu˜Y, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,,
    uĪ‘wƒƒ^ƒ‹‹Zp‚ōėģ‚ĩ‚ŊMEMSŠĩĢƒZƒ“ƒT‚Ėƒ‚ƒWƒ…[ƒ‹‰ģ‚ĖŒŸ“ĸ(2)v
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, S24 WĪ‰ģƒZƒ“ƒTƒVƒXƒeƒ€‚É‚æ‚郆ƒrƒLƒ^ƒXŒ’NŠĮ—‚đ–ÚŽw‚ĩ‚Ä, 2018”N3ŒŽ17“ú|20“ú, ‘ˆî“c‘åŠwŧ‘ˆî“cƒLƒƒƒ“ƒpƒX [19p-C101-10].iŒû“Ēj
  28. V“‡ G•ļ, ‰ŗ•” ãđž, ‚ˆĀ Šî‘å, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ˆÉ“Ą _”V, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    u‚Š´“xMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖBrownian Noise•]‰ŋ‚ÉŠÖ‚ˇ‚錟“ĸv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2018”N3ŒŽ17“ú|20“ú, ‘ˆî“c‘åŠwŧ‘ˆî“cƒLƒƒƒ“ƒpƒX [E 17p-P7-11].iƒ|ƒXƒ^[j
  29. Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ˛•z Wē, ’ ŒNœ}, Chang Tso-Fu Mark, ˆÉ“Ą _”V, “šŗ Žu˜Y, ÎŒ´ ¸, ‘]Ē ŗl, ’Ŧ“c Ž”V, ‰v ˆęÆ, ”Ņ“c Tˆę,
    uĪ‘wƒƒ^ƒ‹‹Zp‚đ—p‚ĸ‚ŊMEMSŠĩĢƒZƒ“ƒT‚Ė••Ž~ŠÂ‹Ģ‚É‚¨‚¯‚鉡“xˆË‘ļĢv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2018”N3ŒŽ17“ú|20“ú, ‘ˆî“c‘åŠwŧ‘ˆî“cƒLƒƒƒ“ƒpƒX [E 17p-P7-10].iƒ|ƒXƒ^[j
  30. “‚ _s, Chen Chun-Yi, Chang Tso-Fu Mark, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ‰v ˆęÆ, ‘]Ē ŗl,
    u“d‰đ‚ß‚Á‚Ģ–@‚É‚æ‚éMEMS—p‹ā“ē‡‹ā‚Ėėģ‹y‚Ņ‹@ŠB“I“ÁĢ•]‰ŋv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2018”N3ŒŽ17“ú|20“ú, ‘ˆî“c‘åŠwŧ‘ˆî“cƒLƒƒƒ“ƒpƒX [E 17p-P7-9].iƒ|ƒXƒ^[j
  31. ’†“‡ ‰p—ē, Tso-Fu Mark Chang, Chun-Yi Chen, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ”N‹g —m, ‰v ˆęÆ, ‘]Ē ŗl,
    u“d‰đ‚ß‚Á‚Ģ–@‚É‚æ‚éTi/Au”÷ŦƒJƒ“ƒ`ƒŒƒo[‚Ėƒ„ƒ“ƒO—Ļ•]‰ŋv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2018”N3ŒŽ17“ú|20“ú, ‘ˆî“c‘åŠwŧ‘ˆî“cƒLƒƒƒ“ƒpƒX [E 17p-P7-7].iƒ|ƒXƒ^[j
  32. V“c ‹ž‘ž˜N, ‹k qˆę˜N, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ‰v ˆęÆ, ‘]Ē ŗl,
    u’ˇŠúU“ŽŽŽŒą‚É‚æ‚éAu-Cu‡‹ā”÷ŦƒJƒ“ƒ`ƒŒƒo[‚Ė\‘ĸˆĀ’čĢv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2018”N3ŒŽ17“ú|20“ú, ‘ˆî“c‘åŠwŧ‘ˆî“cƒLƒƒƒ“ƒpƒX [E 17p-P7-6].iƒ|ƒXƒ^[j
  33. ķ–ė Œ[‰î, “‚ _s, Chun-Yi Chen, –ŧ‰z ‹MŽu, Tso-Fu Mark Chang, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ‰v ˆęÆ, ‘]Ē ŗl,
    u“dÍ§Œä‚É‚æ‚é”÷Ŧ‹āƒJƒ“ƒ`ƒŒƒo[‚Ė‹Č‚°“ÁĢ‚Ė‰ü‘Pv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2018”N3ŒŽ17“ú|20“ú, ‘ˆî“c‘åŠwŧ‘ˆî“cƒLƒƒƒ“ƒpƒX [E 17p-P7-5].iƒ|ƒXƒ^[j
  34. Ken Hashigata, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    uEnhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever For MEMS Accelerometersv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2018”N3ŒŽ17“ú|20“ú, ‘ˆî“c‘åŠwŧ‘ˆî“cƒLƒƒƒ“ƒpƒX [E 17p-P7-4].iƒ|ƒXƒ^[j
  35. yĩ‘Ōu‰‰z
    ˆÉ“Ą _”V, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, “šŗ Žu˜Y, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‘]Ē ŗl, ŽO‘î ”ü”Ž, ‰v ˆęÆ,
    uWĪ‰ģCMOS-MEMS‹Zp‚É‚æ‚鍂Š´“xŠĩĢƒZƒ“ƒT‚Ɖž—pƒVƒXƒeƒ€v
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, S24 WĪ‰ģƒZƒ“ƒTƒVƒXƒeƒ€‚É‚æ‚郆ƒrƒLƒ^ƒXŒ’NŠĮ—‚đ–ÚŽw‚ĩ‚Ä, 2018”N3ŒŽ17“ú|20“ú, ‘ˆî“c‘åŠwŧ‘ˆî“cƒLƒƒƒ“ƒpƒX [19p-C101-7].
  36. V“‡ G•ļ, ‰ŗ•” ãđž, ‚ˆĀ Šî‘å, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, ˛•z Wē, Ŧŧ •q•ļ, “šŗ Žu˜Y, ”Ņ“c Tˆę, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    u’PˆęAuŽ3Ž˛ˇ“ŽMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    •ŊŦ30”N“d‹CŠw‰ī‘S‘‘å‰ī, ‹ãB‘åŠw ˆÉ“sƒLƒƒƒ“ƒpƒX, 2018”N3ŒŽ14“ú|16“ú, 3-158.iŒû“Ēj
  37. ‚ˆĀ Šî‘å, ŒÃ‰ę ’B–į, ’Ō ˆę•Ŋ, ˆÉ“Ą _”V, ŽRĒ ‘å•ã, “šŗ Žu˜Y, Ŧŧ •q•ļ, ”Ņ“c Tˆę, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uŒXŽÎ‚đ—p‚ĸ‚Ŋ1mG MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚Ė•Ē‰đ”\•]‰ŋ‚ĖŒŸ“ĸv
    •ŊŦ30”N“d‹CŠw‰ī‘S‘‘å‰ī, ‹ãB‘åŠw ˆÉ“sƒLƒƒƒ“ƒpƒX, 2018”N3ŒŽ14“ú|16“ú, 3-167.iŒû“Ēj
  38. ‰ŗ•” ãđž, ‚ˆĀ Šî‘å, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ˆÉ“Ą _”V, “šŗ Žu˜Y, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    u3Ž˛MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚É‚¨‚¯‚é’PˆęAuŽ‚¨‚æ‚Ņ“d‹É•ĒŠ„•ûŽŽ‚ĖŒŸ“ĸv
    ‘æ34‰ņuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€, 2017”N10ŒŽ31“ú-11ŒŽ2“ú, L“‡‘Û‰ī‹cę [02pm1-PLN-17].iLate News, ƒ|ƒXƒ^[j
  39. ÜŒ´ P—S, ‚ˆĀ Šî‘å, “šŗ Žu˜Y, ˆÉ“Ą _”V, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    u”­UŒ^—e—ĘŒŸo‰ņ˜H‚đ—p‚ĸ‚ŊAuŽCMOS-MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    ‘æ34‰ņuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€, 2017”N10ŒŽ31“ú-11ŒŽ2“ú, L“‡‘Û‰ī‹cę [31am3-PLN-2].iLate News, ƒ|ƒXƒ^[j
  40. V“‡ G•ļ, ‚ˆĀ Šî‘å, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ˆÉ“Ą _”V, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uÃ“d—e—ĘŒ^MEMSƒZƒ“ƒT‚É‚¨‚¯‚éƒuƒ‰ƒEƒjƒAƒ“EƒmƒCƒY•]‰ŋŽč–@‚ĖŒŸ“ĸ(2)v
    ‘æ34‰ņuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€, 2017”N10ŒŽ31“ú-11ŒŽ2“ú, L“‡‘Û‰ī‹cę [01am2-PLN-8].iLate News, ƒ|ƒXƒ^[j
  41. ŒÃ‰ę’B–į, ’Ō ˆę•Ŋ, ‚ˆĀ Šî‘å, ˆÉ“Ą _”V, ŽRĒ ‘å•ã, “šŗ Žu˜Y, Ŧŧ •q•ļ, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uĪ‘wƒƒ^ƒ‹‹Zp‚É‚æ‚éMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒXŽÎŽžŠ´“x“ÁĢ‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰ī@WĪ‰ģMEMS‹ZpŒ¤‹†‰īŽåÃ ‘æ9‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2017”N10ŒŽ31“ú-11ŒŽ2“ú, L“‡‘Û‰ī‹cę [01pm1-A-5].iŒû“Ēj
  42. ’Ō ˆę•Ŋ, ‚ˆĀ Šî‘å, ˆÉ“Ą _”V, ŽRĒ ‘å•ã, “šŗ Žu˜Y, Ŧŧ •q•ļ, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uĪ‘wƒƒ^ƒ‹‹Zp‚đ—p‚ĸ‚ŊMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒXŽÎŒv‰ž—p‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰ī@WĪ‰ģMEMS‹ZpŒ¤‹†‰īŽåÃ ‘æ9‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2017”N10ŒŽ31“ú-11ŒŽ2“ú, L“‡‘Û‰ī‹cę [01pm1-A-6].iŒû“Ēj
  43. ‚ˆĀ Šî‘å, “šŗ Žu˜Y, ˆÉ“Ą _”V, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ÎŒ´ ¸, ‰v ˆęÆ,
    uMEMSŠĩĢƒZƒ“ƒT—p’o’Ŗ”­UŒ^—e—ĘŒŸo‰ņ˜H v
    ‰ž—p•¨—Šw‰ī@WĪ‰ģMEMS‹ZpŒ¤‹†‰īŽåÃ ‘æ9‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2017”N10ŒŽ31“ú-11ŒŽ2“ú, L“‡‘Û‰ī‹cę [01pm1-A-4].iŒû“Ēj
  44. Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ˛•z Wē, ‘]Ē ŗl, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uĪ‘wƒƒ^ƒ‹‹Zp‚đ—p‚ĸ‚ŊMEMSŠĩĢƒZƒ“ƒT‚Ė\‘ĸŨŒv‚Ė‚Ŋ‚ß‚Ė”SĢ’萔ƒ‚ƒfƒ‹‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰ī@WĪ‰ģMEMS‹ZpŒ¤‹†‰īŽåÃ ‘æ9‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2017”N10ŒŽ31“ú-11ŒŽ2“ú, L“‡‘Û‰ī‹cę [01am2-PM-11].iƒ|ƒXƒ^[j
  45. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ‹k qˆę˜N, Ž›ŧ ”ü”g, ’ ŒNœ}, Tso-Fu Mark Chang, ‘]Ē ŗl, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uĪ‘wƒƒ^ƒ‹MEMSŠĩĢƒZƒ“ƒT‚Ė’ˇŠúU“Ž“ÁĢ•]‰ŋv
    ‰ž—p•¨—Šw‰ī@WĪ‰ģMEMS‹ZpŒ¤‹†‰īŽåÃ ‘æ9‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2017”N10ŒŽ31“ú-11ŒŽ2“ú, L“‡‘Û‰ī‹cę [01am2-PM-12].iƒ|ƒXƒ^[j
  46. ŒÃ‰ę’B–į, ’Ō ˆę•Ŋ, ‚ˆĀ Šî‘å, ˆÉ“Ą _”V, ŽRĒ ‘å•ã, “šŗ Žu˜Y, Ŧŧ •q•ļ, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uĪ‘wƒƒ^ƒ‹‹Zp‚É‚æ‚éMEMSŠĩĢƒZƒ“ƒT‚ĖŒXŽÎŽžŠ´“x“ÁĢ‚ĖŒŸ“ĸv
    ‘æ78‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2017”N9ŒŽ5“ú|8“ú, •Ÿ‰Ē‘Û‰ī‹cęE•Ÿ‰Ē‘ÛƒZƒ“ƒ^[E•Ÿ‰ĒƒTƒ“ƒpƒŒƒXƒzƒeƒ‹ [8p-PA2-16].iƒ|ƒXƒ^[j
  47. ’Ō ˆę•Ŋ, ‚ˆĀ Šî‘å, ˆÉ“Ą _”V, ŽRĒ ‘å•ã, “šŗ Žu˜Y, Ŧŧ •q•ļ, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uĪ‘wƒƒ^ƒ‹‹Zp‚đ—p‚ĸ‚Ŋ‚Š´“xMEMSŠĩĢƒZƒ“ƒT‚ĖŒXŽÎŒv‰ž—p‚ĖŒŸ“ĸv
    ‘æ78‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2017”N9ŒŽ5“ú|8“ú, •Ÿ‰Ē‘Û‰ī‹cęE•Ÿ‰Ē‘ÛƒZƒ“ƒ^[E•Ÿ‰ĒƒTƒ“ƒpƒŒƒXƒzƒeƒ‹ [8p-PA2-15].iƒ|ƒXƒ^[j
  48. ‚ˆĀ Šî‘å, “šŗ Žu˜Y, ˆÉ“Ą _”V, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ÎŒ´ ¸, ‰v ˆęÆ,
    uMEMS‰Á‘Ŧ“xƒZƒ“ƒT—p‚•Ē‰đ”\—e—ĘŒŸo‰ņ˜Hv
    ‘æ78‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2017”N9ŒŽ5“ú|8“ú, •Ÿ‰Ē‘Û‰ī‹cęE•Ÿ‰Ē‘ÛƒZƒ“ƒ^[E•Ÿ‰ĒƒTƒ“ƒpƒŒƒXƒzƒeƒ‹ [8p-PA2-14].iƒ|ƒXƒ^[j
  49. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ‹k qˆę˜N, Ž›ŧ ”ü”g, ’ ŒNœ}, Tso-Fu Mark Chang, ‘]Ē ŗl, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    u‹ā‚ß‚Á‚Ģ‚ÅŒ`Ŧ‚ĩ‚ŊMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚Ė’ˇŠúU“Ž“ÁĢ‚ÉŠÖ‚ˇ‚錟“ĸv
    ‘æ78‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2017”N9ŒŽ5“ú|8“ú, •Ÿ‰Ē‘Û‰ī‹cęE•Ÿ‰Ē‘ÛƒZƒ“ƒ^[E•Ÿ‰ĒƒTƒ“ƒpƒŒƒXƒzƒeƒ‹ [8p-PA2-13].iƒ|ƒXƒ^[j
  50. ’Ō ˆę•Ŋ, ‚ˆĀ Šî‘å, ˆÉ“Ą _”V, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, “šŗ Žu˜Y, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uĪ‘wƒƒ^ƒ‹‹Zp‚đ—p‚ĸ‚Ŋ‚Š´“xMEMS ŒXŽÎŒv‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ8‰ņWĪ‰ģMEMS‹ZpŒ¤‹†ƒ[ƒNƒVƒ‡ƒbƒv, 2017”N7ŒŽ26“ú, ė‘åŠw —Ņ’ŦƒLƒƒƒ“ƒpƒX, P6.iƒ|ƒXƒ^[j
  51. ‚ˆĀ Šî‘å, “šŗ Žu˜Y, ˆÉ“Ą _”V, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ÎŒ´ ¸, ‰v ˆęÆ,
    uMEMS ‰Á‘Ŧ“xƒZƒ“ƒT—p‚•Ē‰đ”\—e—ĘŒŸo‰ņ˜H‚Ė•]‰ŋv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ8‰ņWĪ‰ģMEMS‹ZpŒ¤‹†ƒ[ƒNƒVƒ‡ƒbƒv, 2017”N7ŒŽ26“ú, ė‘åŠw —Ņ’ŦƒLƒƒƒ“ƒpƒX, P2.iƒ|ƒXƒ^[j
  52. ‘]Ē ŗl, Tso-Fu Mark Chang, Chun-Yi Chen, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    u”ņNPĢ‚Š´“xˆã—pƒfƒoƒCƒX‚Ė‚Ŋ‚ß‚Ė‹M‹ā‘ŽŪ—ŋ‚Ėėģ‚Æ‚ģ‚ĖŪ—ŋ•]‰ŋv
    ‘æ63‰ņ ‘—§‘åŠw‹¤“¯—˜—pE‹¤“¯Œ¤‹†‹’“_ ’m‚Ė‹’“_ƒZƒ~ƒi[, 2017”N6ŒŽ16“ú, VŠÛ‚Ė“āƒrƒ‹ƒfƒBƒ“ƒO ‹ž“s‘åŠw“Œ‹žƒIƒtƒBƒX.iŒû“Ēj
  53. —é–Ø ‘ņ^, Tso-Fu Mark Chang, Chun-Yi Chen, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ”N‹g —m, ŽRĒ ‘å•ã, ‰v ˆęÆ, ‘]Ē ŗl,
    uĪ‘wƒƒ^ƒ‹‹Zp‚É‚æ‚éTi/Auƒ}ƒCƒNƒƒJƒ“ƒ`ƒŒƒo[‚Ė‰ˇ“xˆË‘ļĢ‚ĖƒVƒ~ƒ…ƒŒ[ƒVƒ‡ƒ“‚ĖŒŸ“ĸv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2017”N3ŒŽ14“ú|17“ú, ƒpƒVƒtƒBƒR‰Ą•l [14p-P3-11].iƒ|ƒXƒ^[j
  54. ‹k qˆę˜N, Tso-Fu Mark Chang, Chun-Yi Chen, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ”N‹g —m, ŽRĒ ‘å•ã, ‰v ˆęÆ, ‘]Ē ŗl,
    uĪ‘wƒƒ^ƒ‹‹Zp‚É‚æ‚éTi/Auƒ}ƒCƒNƒƒJƒ“ƒ`ƒŒƒo[‚Ė”æ˜J“ÁĢ‚ĖŒŸ“ĸv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2017”N3ŒŽ14“ú|17“ú, ƒpƒVƒtƒBƒR‰Ą•l [14p-P3-12].iƒ|ƒXƒ^[j
  55. ”Ņ’Ë ˜aŠķ, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˆÉ“Ą _”V, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uU“ŽŒ^ƒGƒlƒ‹ƒM[ƒn[ƒxƒXƒeƒBƒ“ƒOƒfƒoƒCƒX‚Ė‚Ŋ‚ß‚ĖSPICEŒn“‡ŨŒv‚ĖŒŸ“ĸv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2017”N3ŒŽ14“ú|17“ú, ƒpƒVƒtƒBƒR‰Ą•l [14p-P3-13].iƒ|ƒXƒ^[j
  56. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ’†“‡ ‰p—ē, Ž›ŧ ”ü”g, ’ ŒNœ}, Tso-Fu Mark Chang, ‘]Ē ŗl, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uĪ‘wƒƒ^ƒ‹‹Zp‚É‚æ‚éTi/Au‚ß‚Á‚Ģ\‘ĸ‘Ė‚Ėƒ„ƒ“ƒO—Ļ•]‰ŋi‚Pjv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2017”N3ŒŽ14“ú|17“ú, ƒpƒVƒtƒBƒR‰Ą•l [14p-P3-14].iƒ|ƒXƒ^[j
  57. ’†“‡ ‰p—ē, Tso-Fu Mark Chang, Chun-Yi Chen, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ”N‹g —m, ŽRĒ ‘å•ã, ‰v ˆęÆ, ‘]Ē ŗl,
    uĪ‘wƒƒ^ƒ‹‹Zp‚É‚æ‚éTi/Au‚ß‚Á‚Ģ\‘ĸ‘Ė‚Ėƒ„ƒ“ƒO—Ļ•]‰ŋi‚Qjv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2017”N3ŒŽ14“ú|17“ú, ƒpƒVƒtƒBƒR‰Ą•l [14p-P3-15].iƒ|ƒXƒ^[j
  58. Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ˛•z Wē, ‘]Ē ŗl, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uĪ‘wƒƒ^ƒ‹‹Zp‚đ—p‚ĸ‚ŊMEMSŠĩĢƒZƒ“ƒT‚É‚¨‚¯‚é”SĢ’萔‚ĖŒŸ“ĸv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2017”N3ŒŽ14“ú|17“ú, ƒpƒVƒtƒBƒR‰Ą•l [14p-P3-16].iƒ|ƒXƒ^[j
  59. ˛•z Wē, Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ”N‹g —m, ‘]Ē ŗl, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uĪ‘wƒƒ^ƒ‹‹Zp‚É‚æ‚é3Ž˛MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚Ė‚΂˒萔ŨŒv•û–@v
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2017”N3ŒŽ14“ú|17“ú, ƒpƒVƒtƒBƒR‰Ą•l [14p-P3-17].iƒ|ƒXƒ^[j
  60. ‚ˆĀ Šî‘å, žÜ“c “՝î, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, Ŧŧ •q•ļ, “šŗ Žu˜Y, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uĪ‘wƒƒ^ƒ‹‹Zp‚ōėģ‚ĩ‚ŊMEMSŠĩĢƒZƒ“ƒT‚Ėƒ‚ƒWƒ…[ƒ‹‰ģ‚ĖŒŸ“ĸv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2017”N3ŒŽ14“ú|17“ú, ƒpƒVƒtƒBƒR‰Ą•l [14p-P3-18].iƒ|ƒXƒ^[j
  61. žÜ“c “՝î, ‚ˆĀ Šî‘å, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, Ŧŧ •q•ļ, “šŗ Žu˜Y, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uˆÚ“Ž‘Ė§Œä‚É‚æ‚éŠĩĢƒZƒ“ƒT•]‰ŋŒn‚Ė\’zv
    ‘æ64‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2017”N3ŒŽ14“ú|17“ú, ƒpƒVƒtƒBƒR‰Ą•l [14p-P3-19].iƒ|ƒXƒ^[j
  62. yĩ‘Ōu‰‰z
    ‘]Ē ŗl, Tso-Fu Mark Chang, Chun-yi Chen, ŽRĒ ‘å•ã, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    u”÷Ŧ“dŽq‹@ŠBƒVƒXƒeƒ€‚Ė‚Ŋ‚ß‚Ė’´—ÕŠE—Ŧ‘Ė‚đ—p‚ĸ‚Ŋ‹ā‘Ž”į–ŒŒ`Ŧ‹Zp v
    ‘æ6‰ņCSJ‰ģŠwƒtƒFƒXƒ^, 2016”N11ŒŽ15“ú.
  63. ķ–ė Œ[‰î, “‚ _s, Chen Chun-Yi, Chang Tso-Fu Mark, –ŧ‰z ‹MŽu, ŽRĒ ‘å•ã, ’Ŧ“c Ž”V, ‰v ˆęÆ, ‘]Ē ŗl,
    u”÷Ŧ‹Č‚°ŽŽŒą‚É‚æ‚é‹ā‚ß‚Á‚Ģ‚ōėģ‚ĩ‚Ŋ”÷ŦƒJƒ“ƒ`ƒŒƒo[‚Ė‹@ŠB“I“ÁĢ•]‰ŋv
    ‘æ33‰ņƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒ“ƒ|ƒWƒEƒ€, 2016”N10ŒŽ24“ú-26“ú, •ŊŒË•ļ‰ģƒZƒ“ƒ^[, ’ˇčŒ§•ŊŒËŽs [25pm4-PS-020].iƒ|ƒXƒ^[j
  64. äŅ—t ĢŽĄ, Chen Chun-Yi, –ŧ‰z ‹MŽu, Chang Tso-Fu Mark, ŽRĒ ‘å•ã, ’Ŧ“c Ž”V, ‰v ˆęÆ, ‘]Ē ŗl,
    u‚Š´“xMEMS ‰Á‘Ŧ“xƒZƒ“ƒT[—p‹ā“d‹C‚ß‚Á‚Ģ‚Ė•ĪŒ`‹““Ž ‚¨‚æ‚Ņ‹­“x‚ĖŒ‹ģ•ûˆĘˆË‘ļĢ•]‰ŋv
    ‘æ33‰ņƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒ“ƒ|ƒWƒEƒ€, 2016”N10ŒŽ24“ú-26“ú, •ŊŒË•ļ‰ģƒZƒ“ƒ^[, ’ˇčŒ§•ŊŒËŽs [25pm4-PS-002].iƒ|ƒXƒ^[j
  65. Ž›ŧ ”ü”g, Chang Tso-Fu Mark, Chen Chun-Yi, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ”N‹g —m, ŽRĒ ‘å•ã, ‰v ˆęÆ, ‘]Ē ŗl,
    u“d‰đ‹ā‚ß‚Á‚Ģ–@‚É‚æ‚čėģ‚ĩ‚Ŋ‹ā/ƒ`ƒ^ƒ“Ī‘w\‘ĸ‚đ—L‚ˇ‚é”÷ŦƒJƒ“ƒ`ƒŒƒo[‚Ė\‘ĸˆĀ’čĢ‚Ė•]‰ŋv
    ‘æ33‰ņƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒ“ƒ|ƒWƒEƒ€, 2016”N10ŒŽ24“ú-26“ú, •ŊŒË•ļ‰ģƒZƒ“ƒ^[, ’ˇčŒ§•ŊŒËŽs [25pm2-PS-017].iƒ|ƒXƒ^[j
  66. –ö“c ˛—, Chang Tso-Fu Mark, Chen Chu-Yi, –ŧ‰z ‹MŽu, ŽRĒ ‘å•ã, ’Ŧ“c Ž”V, ‰v ˆęÆ, ‘]Ē ŗl,
    u”÷Ŧˆø’ŖŽŽŒą•Đ‚đ—p‚ĸ‚ŊMEMS —p‹ā‚ß‚Á‚ĢŪ—ŋ‚Ė‹@ŠB“I“ÁĢ‚Ė•]‰ŋv
    ‘æ33‰ņƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒ“ƒ|ƒWƒEƒ€, 2016”N10ŒŽ24“ú-26“ú, •ŊŒË•ļ‰ģƒZƒ“ƒ^[, ’ˇčŒ§•ŊŒËŽs [25pm2-PS-003].iƒ|ƒXƒ^[j
  67. žÜ“c “՝î, ‚ˆĀ Šî‘å, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˆÉ“Ą _”V, “šŗ Žu˜Y, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uĪ‘wƒƒ^ƒ‹‹Zp‚É‚æ‚éMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚đ—p‚ĸ‚ŊŠĩĢƒZƒ“ƒTƒ‚ƒWƒ…[ƒ‹‚ĖŒŸ“ĸv
    ‘æ8‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2016”N10ŒŽ24“ú-26“ú, •ŊŒË•ļ‰ģƒZƒ“ƒ^[, ’ˇčŒ§•ŊŒËŽs [25pm4-PM-006].iƒ|ƒXƒ^[j
  68. ‚ˆĀ Šî‘å, “šŗ Žu˜Y, ˆÉ“Ą _”V, ÎŒ´ ¸, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uRC”­UŠíŒ^‚Š´“x—e—ĘŒŸo‰ņ˜Hv
    ‘æ8‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2016”N10ŒŽ24“ú-26“ú, •ŊŒË•ļ‰ģƒZƒ“ƒ^[, ’ˇčŒ§•ŊŒËŽs [24am2-E-4]. iŒû“Ēj
  69. Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, “šŗ Žu˜Y, ÎŒ´ ¸, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uƒ}ƒ‹ƒ`ƒtƒBƒWƒNƒXƒVƒ~ƒ…ƒŒ[ƒVƒ‡ƒ“‚đ—p‚ĸ‚ŊCMOS-MEMSŠĩĢƒZƒ“ƒT‚ĖƒmƒCƒY‰đÍŽč–@v
    ‘æ8‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2016”N10ŒŽ24“ú-26“ú, •ŊŒË•ļ‰ģƒZƒ“ƒ^[, ’ˇčŒ§•ŊŒËŽs [25pm2-PM-007].iƒ|ƒXƒ^[j
  70. ˛•z Wē, Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ”N‹g —m, ‘]Ē ŗl, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uĪ‘wƒƒ^ƒ‹‹Zp‚É‚æ‚éMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚Ė‚΂˒萔ŨŒv•û–@v
    ‘æ8‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2016”N10ŒŽ24“ú-26“ú, •ŊŒË•ļ‰ģƒZƒ“ƒ^[, ’ˇčŒ§•ŊŒËŽs [25pm4-PM-008].
  71. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ˆÉ“Ą _”V, ‘]Ē ŗl, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uˇ“ŽŒ^Ī‘wƒƒ^ƒ‹MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    ‘æ8‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2016”N10ŒŽ24“ú-26“ú, •ŊŒË•ļ‰ģƒZƒ“ƒ^[, ’ˇčŒ§•ŊŒËŽs [25pm2-PM-003]. iƒ|ƒXƒ^[j
  72. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ‘]Ē ŗl, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uSub-1mGŒŸo‚ÖŒü‚¯‚ŊĪ‘wƒƒ^ƒ‹MEMSŠĩĢƒZƒ“ƒTv
    ‘æ8‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2016”N10ŒŽ24“ú-26“ú, •ŊŒË•ļ‰ģƒZƒ“ƒ^[, ’ˇčŒ§•ŊŒËŽs [25pm2-PM-001].iƒ|ƒXƒ^[j
  73. yĩ‘Ōu‰‰z
    ‘]Ē ŗl, Tso-Fu Mark Chang, ’ ŒNœ}, ŽRĒ ‘å•ã, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    u‚Š´“xMEMS‰Á‘Ŧ“xƒZƒ“ƒT[‚Ė‚Ŋ‚ß‚Ė‹ā‚ß‚Á‚ĢŪ—ŋ‚Ė‡Ŧ‚Æ‚ģ‚Ė‹@ŠB“I“ÁĢ•]‰ŋv
    “ú–{ŠwpU‹ģ‰īE‘æ172ˆĪˆõ‰ī, 2016”N10ŒŽ21“ú.
  74. ‚ˆĀ Šî‘å, “šŗ Žu˜Y, ˆÉ“Ą _”V, ÎŒ´ ¸, ŽRĒ ‘å•ã, ‰v ˆęÆ,
    uRC”­UŠíŒ^—e—ĘŒŸo‰ņ˜H‚Ė‚Š´“x‰ģ‚ĖŒŸ“ĸv
    “dŽqî•ņ’ʐMŠw‰īƒ\ƒTƒCƒGƒeƒB‘å‰ī, 2016”N9ŒŽ20“ú|23“ú, –kŠC“š‘åŠwŽD–yƒLƒƒƒ“ƒpƒX, –kŠC“š. iŒû“Ēj
  75. Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    uHigh Mechanical Strength in Gold Films Electroplated with Supercritical Carbon Dioxide for MEMS Applicationsv
    ‘æ77‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2016”N9ŒŽ13“ú|16“ú, VŠƒŒ§VŠƒŽs ŽéëƒƒbƒZ [15a-B10-13].iŒû“Ēj
  76. Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, “šŗ Žu˜Y, ÎŒ´ ¸, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uCMOS-MEMSŠĩĢƒZƒ“ƒT‚É‚¨‚¯‚é‹@ŠB“IƒmƒCƒY‚Ė‰đÍŽč–@v
    ‘æ77‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2016”N9ŒŽ13“ú|16“ú, VŠƒŒ§VŠƒŽs ŽéëƒƒbƒZ [14p-P5-1].iƒ|ƒXƒ^[j
  77. ˛•z Wē, Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ”N‹g —m, ‘]Ē ŗl, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uĪ‘wƒƒ^ƒ‹‹Zp‚É‚æ‚éMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚Ė‚΂˒萔ŨŒv•û–@iIjv
    ‘æ77‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2016”N9ŒŽ13“ú|16“ú, VŠƒŒ§VŠƒŽs ŽéëƒƒbƒZ [15p-B10-8].iƒ|ƒXƒ^[j
  78. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ˆÉ“Ą _”V, “šŗ Žu˜Y, ÎŒ´ ¸, ‘]Ē ŗl, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uĪ‘wƒƒ^ƒ‹ˇ“ŽŒ^MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŠî‘bŒŸ“ĸv
    ‘æ77‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2016”N9ŒŽ13“ú|16“ú, VŠƒŒ§VŠƒŽs ŽéëƒƒbƒZ [14p-P5-3]. iƒ|ƒXƒ^[j
  79. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˛•z Wē, ‘]Ē ŗl, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    u1mGˆČ‰ēŒŸo‚ÖŒü‚¯‚ŊĪ‘wƒƒ^ƒ‹MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŠî‘bŒŸ“ĸv
    ‘æ77‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰ī, 13.4 SiŒnƒvƒƒZƒXESiŒn”––ŒE”züEMEMSEWĪ‰ģ‹Zp, 2016”N9ŒŽ13“ú|16“ú, VŠƒŒ§VŠƒŽs ŽéëƒƒbƒZ [14p-P5-2].iƒ|ƒXƒ^[j
  80. ‚ˆĀ Šî‘å, žÜ“c “՝î, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˆÉ“Ą _”V, “šŗ Žu˜Y, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uŦŒ^‚Š´“xMEMSŠĩĢƒZƒ“ƒTƒ‚ƒWƒ…[ƒ‹‚ĖŽŽė•]‰ŋv
    LSI‚ƃVƒXƒeƒ€‚Ėƒ[ƒNƒVƒ‡ƒbƒv, 2016”N5ŒŽ16“ú|2016”N5ŒŽ17“ú,
    “Œ‹ž‘åŠw ļŽY‹ZpŒ¤‹†Š ‘‡Œ¤‹†ŽĀŒą“(An“) 2ŠK ƒRƒ“ƒxƒ“ƒVƒ‡ƒ“ƒz[ƒ‹ iƒ|ƒXƒ^[j
  81. Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ˛•z Wē, ”N‹g —m, ‘]Ē ŗl, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uĪ‘wƒƒ^ƒ‹\‘ĸ‚đ—p‚ĸ‚Ŋ MEMS ‰Á‘Ŧ“xƒZƒ“ƒT‚ĖƒXƒgƒbƒp[‚ĖƒƒoƒXƒgĢŒŸ“ĸv
    ‘æ63‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.5 ƒfƒoƒCƒX/WĪ‰ģ‹Zp, 2016”N3ŒŽ19“ú|22“ú, “Œ‹žH‹Æ‘åŠw ‘å‰ĒŽRƒLƒƒƒ“ƒpƒX [21p-P17-17].iƒ|ƒXƒ^[j
  82. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˆÉ“Ą _”V, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uSub-1G ŒŸo‚ÖŒü‚¯‚Ŋ CMOS-MEMS ‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    ‘æ63‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.5 ƒfƒoƒCƒX/WĪ‰ģ‹Zp, 2016”N3ŒŽ19“ú|22“ú, “Œ‹žH‹Æ‘åŠw ‘å‰ĒŽRƒLƒƒƒ“ƒpƒX [21p-P17-18].iƒ|ƒXƒ^[j
  83. Ž›ŧ ”ü”g, Chang Tso-Fu Mark, Chen Chun-Yi, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ”N‹g —m, ŽRĒ ‘å•ã, ‰v ˆęÆ, ‘]Ē ŗl,
    u“d‰đ‹ā‚ß‚Á‚Ģ‚ōėģ‚ĩ‚Ŋ Ti/Au ”÷ŦƒJƒ“ƒ`ƒŒƒo[‚Ė\‘ĸˆĀ’čĢv
    ‘æ63‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.5 ƒfƒoƒCƒX/WĪ‰ģ‹Zp, 2016”N3ŒŽ19“ú|22“ú, “Œ‹žH‹Æ‘åŠw ‘å‰ĒŽRƒLƒƒƒ“ƒpƒX [21p-P17-19].iƒ|ƒXƒ^[j
  84. Haochun Tang,Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, and Masato Sone,
    uApplication of Supercritical Carbon Dioxide in Electroplating of Gold Materials Used in MEMS Devicesv
    ‘æ63‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.5 ƒfƒoƒCƒX/WĪ‰ģ‹Zp, 2016”N3ŒŽ19“ú|22“ú, “Œ‹žH‹Æ‘åŠw ‘å‰ĒŽRƒLƒƒƒ“ƒpƒX [21p-P17-20].iƒ|ƒXƒ^[j
  85. Î’Ë —z‘å, –ö“c ˛—, Chang Tso-Fu Mark, Chen Chun-Yi, Ŧŧ •q•ļ, ’Ŧ“c Ž”V, ”N‹g —m, ŽRĒ ‘å•ã, ‰v ˆęÆ, ‘]Ē ŗl,
    uƒ}ƒCƒNƒˆŗkŽŽŒą‚É‚æ‚é‹ā / ƒ`ƒ^ƒ“Ī‘w\‘ĸ‚Ė‹@ŠB“I“ÁĢ•]‰ŋv
    ‘æ63‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.5 ƒfƒoƒCƒX/WĪ‰ģ‹Zp, 2016”N3ŒŽ19“ú|22“ú, “Œ‹žH‹Æ‘åŠw ‘å‰ĒŽRƒLƒƒƒ“ƒpƒX [21p-P17-21].iƒ|ƒXƒ^[j
  86. ķ–ė Œ[‰î, “‚ _s, Chen Chun-Yi, Chang Tso-Fu Mark, ŽRĒ ‘å•ã, ’Ŧ“c Ž”V, ‰v ˆęÆ, ‘]Ē ŗl,
    uƒ}ƒCƒNƒ‹Č‚°ŽŽŒą‚É‚æ‚é“dÍ‹ā”––Œ‚Ė‹@ŠB“I“ÁĢ•]‰ŋv
    ‘æ63‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.5 ƒfƒoƒCƒX/WĪ‰ģ‹Zp, 2016”N3ŒŽ19“ú|22“ú, “Œ‹žH‹Æ‘åŠw ‘å‰ĒŽRƒLƒƒƒ“ƒpƒX [21p-P17-23].iƒ|ƒXƒ^[j
  87. äŅ—t ĢŽĄ, Chen Chun-Yi, Chang Tso-Fu Mark, ŽRĒ ‘å•ã, ’Ŧ“c Ž”V, ‰v ˆęÆ, ‘]Ē ŗl,
    uƒ}ƒCƒNƒˆŗkŽŽŒą‚É‚æ‚é MEMS —p‹ā“d‹C‚ß‚Á‚Ģ‚Ė‹@ŠB“I“ÁĢ‚Ė•]‰ŋv
    ‘æ63‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.5 ƒfƒoƒCƒX/WĪ‰ģ‹Zp, 2016”N3ŒŽ19“ú|22“ú, “Œ‹žH‹Æ‘åŠw ‘å‰ĒŽRƒLƒƒƒ“ƒpƒX [21p-P17-25].iƒ|ƒXƒ^[j
  88. —Ģ ˆĀûh, Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, “šŗ Žu˜Y, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uCMOS’áŽG‰šƒIƒyƒAƒ“ƒvŨŒv–@‚ĖŒŸ“ĸv
    “dŽqî•ņ’ʐMŠw‰ī2016”N‘‡‘å‰ī, 2016”N3ŒŽ15“ú-18“ú, ‹ãB‘åŠwˆÉ“sƒLƒƒƒ“ƒpƒX, •Ÿ‰ĒŒ§•Ÿ‰ĒŽs, C-12-13.iŒû“Ēj
  89. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uSub-1GŒŸo‚ÖŒü‚¯‚ŊĪ‘wƒƒ^ƒ‹3Ž˛‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŠî‘bŒŸ“ĸv
    “dŽqî•ņ’ʐMŠw‰ī2016”N‘‡‘å‰ī, 2016”N3ŒŽ15“ú-18“ú, ‹ãB‘åŠwˆÉ“sƒLƒƒƒ“ƒpƒX, •Ÿ‰ĒŒ§•Ÿ‰ĒŽs, C-10-16.iŒû“Ēj
  90. ˛•z Wē, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ŽRĒ ‘å•ã, ”N‹g —m, ‘]Ē ŗl, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚Ė‚Ŋ‚ß‚Ė‹ā‘Ž\‘ĸ‘Ė‚Ė–§’…—Í•]‰ŋv
    ‘æ7‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2015”N10ŒŽ28“ú-30“ú, VŠƒƒRƒ“ƒxƒ“ƒVƒ‡ƒ“ƒZƒ“ƒ^[iŽéëƒƒbƒZj, VŠƒŒ§VŠƒŽs, 29pm3-PM-5.iƒ|ƒXƒ^[j
  91. Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ‚ˆĀ Šî‘å, ˆÉ“Ą _”V, “šŗ Žu˜Y, ÎŒ´ ¸, ‰v ˆęÆ, ”N‹g —m, ’Ŧ“c Ž”V,
    uƒ}ƒ‹ƒ`ƒtƒBƒWƒNƒXƒVƒ~ƒ…ƒŒ[ƒVƒ‡ƒ“‚đ—p‚ĸ‚ŊCMOS-MEMS ‰Á‘Ŧ“xƒZƒ“ƒT‚Ė‚Ŋ‚ß‚ĖƒQƒCƒ“§ŒäƒZƒ“ƒT‰ņ˜H‚ĖŒŸ“ĸv
    ‘æ7‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2015”N10ŒŽ28“ú-30“ú, VŠƒƒRƒ“ƒxƒ“ƒVƒ‡ƒ“ƒZƒ“ƒ^[iŽéëƒƒbƒZj, VŠƒŒ§VŠƒŽs, 29pm2-D-4.iƒ|ƒXƒ^[j
  92. ‚ˆĀ Šî‘å, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˆÉ“Ą _”V, “šŗ Žu˜Y, ÎŒ´ ¸, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uˆÚ“Ž‘Ė§Œä‚É‚¨‚¯‚éŠĩĢƒZƒ“ƒT“K—pĢ‚ĖŒŸ“ĸv
    ‘æ7‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2015”N10ŒŽ28“ú-30“ú, VŠƒƒRƒ“ƒxƒ“ƒVƒ‡ƒ“ƒZƒ“ƒ^[iŽéëƒƒbƒZj, VŠƒŒ§VŠƒŽs, 30pm1-D-6.iŒû“Ēj
  93. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uSub-1G`20GWĪ‰ģMEMSŠĩĢƒZƒ“ƒTv
    ‘æ7‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2015”N10ŒŽ28“ú-30“ú, VŠƒƒRƒ“ƒxƒ“ƒVƒ‡ƒ“ƒZƒ“ƒ^[iŽéëƒƒbƒZj, VŠƒŒ§VŠƒŽs, 29pm3-PM-2.iƒ|ƒXƒ^[j
  94. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uSub-1G`20GWĪ‰ģMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŠî–{•]‰ŋv
    ‘æ76‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰īE13.4 SiƒvƒƒZƒXE”züEMEMSEWĪ‰ģ‹Zp, 2015”N9ŒŽ13“ú-16“ú, –ŧŒÃ‰Ž‘Û‰ī‹cę ˆ¤’mŒ§–ŧŒÃ‰ŽŽs [15a-PB4-1].iƒ|ƒXƒ^[j
  95. Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ‚ˆĀ Šî‘å, ˆÉ“Ą _”V, “šŗ Žu˜Y, ÎŒ´ ¸, ‰v ˆęÆ, ”N‹g —m, ’Ŧ“c Ž”V,
    uƒQƒCƒ“§ŒäŒ^CMOS-MEMS‰Á‘Ŧ“xƒZƒ“ƒT‰ņ˜H‚ĖŒŸ“ĸv
    ‘æ76‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰īE13.4 SiƒvƒƒZƒXE”züEMEMSEWĪ‰ģ‹Zp, 2015”N9ŒŽ13“ú-16“ú, –ŧŒÃ‰Ž‘Û‰ī‹cę ˆ¤’mŒ§–ŧŒÃ‰ŽŽs [15a-PB4-2].iƒ|ƒXƒ^[j
  96. ˛•z Wē, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ŽRĒ ‘å•ã, ”N‹g —m, ‘]Ē ŗl, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚Ė‚Ŋ‚ß‚Ė‹ā‘Ž\‘ĸ‘Ė‚Ė–§’…—Í•]‰ŋv
    ‘æ76‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰īE13.4 SiƒvƒƒZƒXE”züEMEMSEWĪ‰ģ‹Zp, 2015”N9ŒŽ13“ú-16“ú, –ŧŒÃ‰Ž‘Û‰ī‹cę ˆ¤’mŒ§–ŧŒÃ‰ŽŽs [15a-PB4-3].iƒ|ƒXƒ^[j
  97. Ž›ŧ ”ü”g, Chang Tso-Fu Mark, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ’Ŧ“c Ž”V, ”N‹g —m, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, ‰v ˆęÆ, ‘]Ē ŗl
    u“d‰đ‹ā‚ß‚Á‚Ģ‚ōėģ‚ĩ‚ŊMEMSƒfƒoƒCƒX‚É‚¨‚¯‚é“Žė\‘ĸˆĀ’čĢv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ6‰ņWĪ‰ģMEMS‹ZpŒ¤‹†ƒ[ƒNƒVƒ‡ƒbƒv, 2015”N7ŒŽ31“ú, NHK•ú‘—‹ZpŒ¤‹†Š, “Œ‹ž“sĸ“c’J‹æ, IMWS-06-P7.iƒ|ƒXƒ^[j
  98. ‚ˆĀ Šî‘å, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˆÉ“Ą _”V, “šŗ Žu˜Y, ÎŒ´ ¸, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V
    uMEMSŠĩĢƒZƒ“ƒT‚đ—p‚ĸ‚ŊˆÚ“Ž‘Ė§Œä‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ6‰ņWĪ‰ģMEMS‹ZpŒ¤‹†ƒ[ƒNƒVƒ‡ƒbƒv, 2015”N7ŒŽ31“ú, NHK•ú‘—‹ZpŒ¤‹†Š, “Œ‹ž“sĸ“c’J‹æ, IMWS-06-P6. iƒ|ƒXƒ^[j
  99. ‚ˆĀ Šî‘å, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ‹Tˆä Ģ‘ž, ˆÉ“Ą _”V, “šŗ Žu˜Y, ÎŒ´ ¸, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V
    uŠĩĢƒZƒ“ƒT‚đ—p‚ĸ‚ŊˆÚ“Ž‘Ė§Œä‚ĖŠî‘bŒŸ“ĸv
    •ŊŦ27”N“d‹CŠw‰īƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“•”–呍‡Œ¤‹†‰ī, ‹ãB‘åŠwˆãŠw•”•S”Nu“°, 2015”N7ŒŽ2“ú|3“ú, PHS-15-18/CHS-15-31/MSS-15-3/BMS-15-24, pp.5-8.iŒû“Ēj
  100. Ž›ŧ ”ü”g, Chang Tso-Fu Mark, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ˆÉ“Ą _”V, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ, ‘]Ē ŗl
    u“d‰đ‹ā‚ß‚Á‚Ģ‚ōėģ‚ĩ‚Ŋ”÷ŦƒJƒ“ƒ`ƒŒƒo[‚ĖŒ`ķˆĀ’čĢ•]‰ŋv
    •ŊŦ27”N“d‹CŠw‰īƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“•”–呍‡Œ¤‹†‰ī, ‹ãB‘åŠwˆãŠw•”•S”Nu“°, 2015”N7ŒŽ2“ú|3“ú, PHS-15-20/CHS-15-33/MSS-15-5/BMS-15-26, pp.15-18.iŒû“Ēj
  101. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uSub-1GŒŸo‰Â”\‚Č3Ž˛MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŠî‘bŒŸ“ĸv
    •ŊŦ27”N“d‹CŠw‰ī‘S‘‘å‰ī, “Œ‹ž“sŽs‘åŠwĸ“c’JƒLƒƒƒ“ƒpƒX, 2015”N3ŒŽ24“ú|26“ú, 13P-A3 3-113. iŒû“Ēj
  102. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uSub-1G‚Š‚į20G‚Ü‚ÅŒŸ’m‰Â”\‚ȏWĪ‰ģMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    ‘æ62‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, •Ē‰ČŠé‰æƒVƒ“ƒ|ƒWƒEƒ€ 13”ŧ“ą‘Ė, 2015”N3ŒŽ11“ú|14“ú, “ŒŠC‘åŠw Ã“ėƒLƒƒƒ“ƒpƒX [12p-D15-3], pp. 17-189.iŒû“Ēj
  103. Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ŧ“‡ —˛–ž, ‰v ˆęÆ, ”N‹g —m, ’Ŧ“c Ž”V
    uƒGƒlƒ‹ƒM[ƒn[‚׃XƒeƒBƒ“ƒOƒfƒoƒCƒX‚ĖŒŸ“ĸi5jv
    ‘æ62‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī, 13.4 SiƒvƒƒZƒXE”züEMEMSEWĪ‰ģ‹Zp, 2015”N3ŒŽ11“ú|14“ú, “ŒŠC‘åŠw Ã“ėƒLƒƒƒ“ƒpƒX [11p-A29-5], pp. 12-125.iƒ|ƒXƒ^[j
  104. Daisuke Yamane, Katsuyuki Machida, and Kazuya Masu,
    "MEMS for sensing sub-1G"
    The First Joint Workshop on Electrical Engineering between Tokyo Tech & KAIST, KAIST, Korea, Nov.21, 2014, pp. 19 iŒû“Ēj
  105. Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ŽRĒ ‘å•ã, ‰v ˆęÆ, ”N‹g —m, ’Ŧ“c Ž”V
    u‰ņ˜HƒVƒ~ƒ…ƒŒ[ƒ^‚đ—p‚ĸ‚ŊMEMSƒGƒlƒ‹ƒM[ƒn[ƒxƒXƒeƒBƒ“ƒOƒfƒoƒCƒX‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ6‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€i“¯ŽžŠJÃF‘æ31‰ņ“d‹CŠw‰īuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€j, 2014”N10ŒŽ20“ú-22“ú, ‚­‚É‚Ņ‚ĢƒƒbƒZ, “‡ĒŒ§ŧ]Žs[22am2-C1].iŒû“Ēj
  106. ŧ“‡ —˛–ž, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V
    uAuĪ‘wŒ`Ŧ‹Zp‚É‚æ‚é3Ž˛MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ6‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€€i“¯ŽžŠJÃF‘æ31‰ņ“d‹CŠw‰īuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€j, 2014”N10ŒŽ20“ú-22“ú, ‚­‚É‚Ņ‚ĢƒƒbƒZ, “‡ĒŒ§ŧ]Žs[22am2-C5].iŒû“Ēj
  107. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ‹Tˆä Ģ‘ž, ‰v ˆęÆ, ’Ŧ“c Ž”V
    u‚Š´“xÃ“d—e—ĘŒ^ƒZƒ“ƒT‚É‚¨‚¯‚éƒuƒ‰ƒEƒjƒAƒ“EƒmƒCƒY•]‰ŋ‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ6‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€i“¯ŽžŠJÃF‘æ31‰ņ“d‹CŠw‰īuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€j, 2014”N10ŒŽ20“ú-22“ú, ‚­‚É‚Ņ‚ĢƒƒbƒZ, “‡ĒŒ§ŧ]Žs[22am2-C4].iŒû“Ēj
  108. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V
    uWĪ‰ģCMOS-MEMS‹Zp‚É‚æ‚éSub-1G‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŠî‘bŒŸ“ĸv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ6‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€i“¯ŽžŠJÃF‘æ31‰ņ“d‹CŠw‰īuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€j, 2014”N10ŒŽ20“ú-22“ú, ‚­‚É‚Ņ‚ĢƒƒbƒZ, “‡ĒŒ§ŧ]Žs[22am2-C3].iŒû“Ēj
  109. ‹Tˆä Ģ‘ž, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uWĪ‰ģCMOS|MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ÖŒü‚¯‚Ŋsub-1GÃ“d—e—ĘŒ^ƒZƒ“ƒT‚ĖŒŸ“ĸv
    ‘æ75‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰īE”ŧ“ą‘ĖAi13.3 SiƒvƒƒZƒXE”züEMEMSEWĪ‰ģ‹Zpj, 2014”N9ŒŽ17“ú|20“ú, –kŠC“š‘åŠw ŽD–yƒLƒƒƒ“ƒpƒX [17p-PA1-4], pp. 13-065.iƒ|ƒXƒ^[j
  110. ŧ“‡ —˛–ž, Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V,
    uĪ‘wƒƒ^ƒ‹\‘ĸ‚É‚æ‚é‚RŽ˛‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    ‘æ75‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰īE”ŧ“ą‘ĖAi13.3 SiƒvƒƒZƒXE”züEMEMSEWĪ‰ģ‹Zpj, 2014”N9ŒŽ17“ú|20“ú, –kŠC“š‘åŠw ŽD–yƒLƒƒƒ“ƒpƒX [17p-PA1-5], pp. 13-066. iƒ|ƒXƒ^[j
  111. Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ŧ“‡ —˛–ž, ‰v ˆęÆ, ”N‹g —m, ’Ŧ“c Ž”V,
    uƒGƒlƒ‹ƒM[ƒn[‚׃XƒeƒBƒ“ƒOƒfƒoƒCƒX‚ĖŒŸ“ĸi4jv
    ‘æ75‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰īE”ŧ“ą‘ĖAi13.3 SiƒvƒƒZƒXE”züEMEMSEWĪ‰ģ‹Zpj, 2014”N9ŒŽ17“ú|20“ú, –kŠC“š‘åŠw ŽD–yƒLƒƒƒ“ƒpƒX [17p-PA1-6], pp. 13-067.iƒ|ƒXƒ^[j
  112. Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ŧ“‡ —˛–ž, ‰v ˆęÆ, ”N‹g —m, ’Ŧ“c Ž”V
    uƒ}ƒ‹ƒ`ƒtƒBƒWƒbƒNƒXƒVƒ~ƒ…ƒŒ[ƒ^‚đ—p‚ĸ‚ŊCMOS-MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ5‰ņWĪ‰ģMEMS‹ZpŒ¤‹†ƒ[ƒNƒVƒ‡ƒbƒv, 2014”N7ŒŽ11“ú, –L‹´‹Zp‰ČŠw‘åŠw, P7. iƒ|ƒXƒ^[j
  113. ŧ“‡ —˛–ž, Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ‹Tˆä Ģ‘ž, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V
    uĪ‘wƒƒ^ƒ‹‚É‚æ‚éÃ“d—e—ĘŒ^3Ž˛‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŠî‘bŒŸ“ĸv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ5‰ņWĪ‰ģMEMS‹ZpŒ¤‹†ƒ[ƒNƒVƒ‡ƒbƒv, 2014”N7ŒŽ11“ú, –L‹´‹Zp‰ČŠw‘åŠw, P5. iƒ|ƒXƒ^[j
  114. ŽRĒ ‘å•ã, ‹Tˆä Ģ‘ž, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ”N‹g —m, ‰v ˆęÆ, ’Ŧ“c Ž”V
    uWĪ‰ģCMOS-MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ÉŒü‚¯‚ŊSub-1GƒZƒ“ƒTv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ5‰ņWĪ‰ģMEMS‹ZpŒ¤‹†ƒ[ƒNƒVƒ‡ƒbƒv, 2014”N7ŒŽ11“ú, –L‹´‹Zp‰ČŠw‘åŠw, P4. iƒ|ƒXƒ^[j
  115. ŽRĒ ‘å•ã, ŧ“‡ —˛–ž, Ŧŧ •q•ļ, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uWĪ‰ģCMOS-MEMS‚ÖŒü‚¯‚Ŋ2Ž˛‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŠî‘bŒŸ“ĸv
    •ŊŦ26”N“d‹CŠw‰īƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“•”–呍‡Œ¤‹†‰ī, “Œ‹ž‘åŠwļŽY‹ZpŒ¤‹†Š, 2014”N5ŒŽ27“ú|28“ú, MSS-14-002.iŒû“Ēj
  116. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚É‚æ‚éSub-1GŒŸo‚ĖŠî‘bŒŸ“ĸv
    •ŊŦ26”N“d‹CŠw‰ī‘S‘‘å‰ī, ˆ¤•Q‘åŠwé–kƒLƒƒƒ“ƒpƒX, 2014”N3ŒŽ18“ú|20“ú, 53-C1 3-128.iŒû“Ēj
  117. ‰Á‰ę’J ŒĢ, Ŧŧ•q•ļ, ŽRĒ ‘å•ã, ŧ“‡ —˛–ž, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uƒGƒlƒ‹ƒM[ƒn[ƒxƒXƒeƒBƒ“ƒOƒfƒoƒCƒX‚ĖŒŸ“ĸi2jv
    ‘æ61‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī@13.3uSiƒvƒƒZƒXE”züEMEMSEWĪ‰ģ‹Zpv, 2014”N3ŒŽ17“ú|20“ú, ÂŽRŠw‰@‘åŠw‘Š–ÍŒ´ƒLƒƒƒ“ƒpƒX, 19p-PG3-3, pp. 13-157.iƒ|ƒXƒ^[j
  118. Ŧŧ •q•ļ, ‰Á‰ę’J ŒĢ, ŽRĒ ‘å•ã, ŧ“‡ —˛–ž, ˆÉ“Ą _”V, ÎŒ´ ¸, ‰v ˆęÆ, ’Ŧ“c Ž”V, ”N‹g —m,
    uƒGƒlƒ‹ƒM[ƒn[ƒxƒXƒeƒBƒ“ƒOƒfƒoƒCƒX‚ĖŒŸ“ĸi3jv
    ‘æ61‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī@13.3uSiƒvƒƒZƒXE”züEMEMSEWĪ‰ģ‹Zpv, 2014”N3ŒŽ17“ú|20“ú, ÂŽRŠw‰@‘åŠw‘Š–ÍŒ´ƒLƒƒƒ“ƒpƒX, 19p-PG3-4, pp. 13-158.iƒ|ƒXƒ^[j
  119. ŧ“‡ —˛–ž, Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uƒAƒŒƒCŒ^MEMS‰Á‘Ŧ“xƒZƒ“ƒT-2Ž˛MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸ-v
    ‘æ61‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī@13.3uSiƒvƒƒZƒXE”züEMEMSEWĪ‰ģ‹Zpv, 2014”N3ŒŽ17“ú|20“ú, ÂŽRŠw‰@‘åŠw‘Š–ÍŒ´ƒLƒƒƒ“ƒpƒX, 19p-PG3-2, pp. 13-156.iƒ|ƒXƒ^[j
  120. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uSub-1G MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    ‘æ61‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī@13.3uSiƒvƒƒZƒXE”züEMEMSEWĪ‰ģ‹Zpv, 2014”N3ŒŽ17“ú|20“ú, ÂŽRŠw‰@‘åŠw‘Š–ÍŒ´ƒLƒƒƒ“ƒpƒX, 19p-PG3-1, pp. 13-155.iƒ|ƒXƒ^[j
  121. ˆÉ“Ą _”V, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ŽRĒ ‘å•ã, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uRFŽķM‹@‚Ė‚Ŋ‚ß‚ĖƒAƒŒƒCŒ^MEMS‹¤UŠíƒ~ƒLƒT‚ĖŒŸ“ĸv
    ‘æ61‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰ī@13.3uSiƒvƒƒZƒXE”züEMEMSEWĪ‰ģ‹Zpv, 2014”N3ŒŽ17“ú|20“ú, ÂŽRŠw‰@‘åŠw‘Š–ÍŒ´ƒLƒƒƒ“ƒpƒX, 19p-PG3-5, pp. 13-159. iƒ|ƒXƒ^[j
  122. ‚ˆĀ Šî‘å, ”’Ē “ÄŽj, —› Žž@, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, ƒ~ƒC ƒVƒƒƒIƒ†ƒE, ˆäã LÍ. ’†āV •ļ•F, ã“c ’mŽj, ÎŒ´ ¸, ‰v ˆęÆ,
    uCMOS‹Zp‚É‚æ‚é8-ch 20-Vo—ÍMEMSƒhƒ‰ƒCƒo‰ņ˜Hv
    “dŽqî•ņ’ʐMŠw‰ī ‘æ34‰ņ ƒAƒiƒƒORFŒ¤‹†‰ī, 2013”N11ŒŽ18“ú-19“ú, “Œ‹žH‹Æ‘åŠw ‘å‰ĒŽRƒLƒƒƒ“ƒpƒX “ŒH‘å‘ ‘O‰īŠŲ, “Œ‹ž“s, Vol. RF2013-2, p. 7.iŒû“Ēj
  123. ‰Á‰ę’J ŒĢ, Ŧŧ•q•ļ, ŽRĒ ‘å•ã, ŧ“‡ —˛–ž, ’Ī ^•ļ, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uƒGƒlƒ‹ƒM[ƒn[ƒxƒXƒgƒfƒoƒCƒX‚ĖŦŒ^‰ģ‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ5‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2013”N11ŒŽ5“ú-7“ú, å‘䍑ÛƒZƒ“ƒ^[, ‹{éŒ§[6PM3-PIM-003].iƒ|ƒXƒ^[j
  124. ˆÉ“Ą _”V, Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uƒ~ƒLƒTƒtƒ@[ƒXƒgRF ŽķM‹@‚Ė‚Ŋ‚ß‚ĖMEMS ‹¤UŠíƒ~ƒLƒT‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ5‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2013”N11ŒŽ5“ú-7“ú, å‘䍑ÛƒZƒ“ƒ^[, ‹{éŒ§[7AM2-E-8].iŒû“Ēj
  125. ‚ˆĀ Šî‘å, ”’Ē “ÄŽj, —› Žž@, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, ƒ~ƒC ƒVƒƒƒIƒ†ƒE, ˆäã LÍ. ’†āV •ļ•F, ã“c ’mŽj, ÎŒ´ ¸, ‰v ˆęÆ,
    uMEMS §Œä—p‚‘ĪˆŗCMOS ƒXƒCƒbƒ`ƒ“ƒOƒhƒ‰ƒCƒo‰ņ˜Hv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ5‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2013”N11ŒŽ5“ú-7“ú, å‘䍑ÛƒZƒ“ƒ^[, ‹{éŒ§[7AM2-E-6].iŒû“Ēj
  126. Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ŧ“‡ —˛–ž, ŠÛŽR ’qŽj, ‰Á‰ę’J ŒĢ, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uƒ}ƒ‹ƒ`ƒtƒBƒWƒNƒXƒVƒ~ƒ…ƒŒ[ƒVƒ‡ƒ“‚đ—p‚ĸ‚ŊWĪ‰ģCMOS-MEMS‹Zp‚Ė‚Ŋ‚ß‚ĖƒZƒ“ƒT‰ņ˜H‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ5‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2013”N11ŒŽ5“ú-7“ú, å‘䍑ÛƒZƒ“ƒ^[, ‹{éŒ§[6PM3-PIM-001].iƒ|ƒXƒ^[j
  127. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ‰Á‰ę’J ŒĢ, ’Ī ^•ļ, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uƒAƒŒƒCŒ^MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚Ė“ÁĢ•]‰ŋv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ5‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€, 2013”N11ŒŽ5“ú-7“ú, å‘䍑ÛƒZƒ“ƒ^[, ‹{éŒ§[6PM3-PIM-002].iƒ|ƒXƒ^[j
  128. yĩ‘Ōu‰‰z
    Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ŧ“‡ —˛–ž, ’Ŧ“c Ž”V, ‰v ˆęÆ, ”N‹g —m
    uCMOS‚ÆMEMSWĪ‚Ė‚Ŋ‚ß‚ĖƒVƒ~ƒ…ƒŒ[ƒVƒ‡ƒ“‰đÍ -WĪ‰ģCMOS-MEMSƒfƒoƒCƒXŽĀŒģ‚ÉŒü‚¯‚Ä-v
    “dŽqî•ņ’ʐMŠw‰ī@ƒVƒŠƒRƒ“EƒtƒHƒgƒjƒNƒXŒ¤‹†‰ī, 2013”N10ŒŽ18“ú, “Œ‹žH‹Æ‘åŠw‘å‰ĒŽRƒLƒƒƒ“ƒpƒX [SIPH2013-99].
  129. ‰Á‰ę’J ŒĢ, Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ŧ“‡ —˛–ž, ’Ī ^•ļ, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uƒGƒlƒ‹ƒM[ƒn[ƒxƒXƒgƒfƒoƒCƒX‚ĖŒŸ“ĸ(1)v
    ‘æ74‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰īE”ŧ“ą‘ĖAiMEMS, NEMS‚ĖŠî‘b‚Ɖž—pFˆŲŽí‹@”\WĪ‰ģj, 2013”N9ŒŽ16“ú-20“ú, “¯ŽuŽĐ‘åŠw ‹ž“c•ĶƒLƒƒƒ“ƒpƒX [18p-P11-5], pp. 13-204.iƒ|ƒXƒ^[j
  130. Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ŧ“‡ —˛–ž, ŠÛŽR ’qŽj, ‰Á‰ę’J ŒĢ, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uWĪ‰ģCMOS-MEMS‰Á‘Ŧ“xƒZƒ“ƒT‰ņ˜H‚ĖŒŸ“ĸv
    ‘æ74‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰īE”ŧ“ą‘ĖAiMEMS, NEMS‚ĖŠî‘b‚Ɖž—pFˆŲŽí‹@”\WĪ‰ģj, 2013”N9ŒŽ16“ú-20“ú, “¯ŽuŽĐ‘åŠw ‹ž“c•ĶƒLƒƒƒ“ƒpƒX [18p-P11-3], pp. 13-202.iƒ|ƒXƒ^[j
  131. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ‰Á‰ę’J ŒĢ, ’Ī ^•ļ, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uƒAƒŒƒCŒ^MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŠî–{“ÁĢ•]‰ŋv
    ‘æ74‰ņ‰ž—p•¨—Šw‰īH‹GŠwpu‰‰‰īE”ŧ“ą‘ĖAiMEMS, NEMS‚ĖŠî‘b‚Ɖž—pFˆŲŽí‹@”\WĪ‰ģj, 2013”N9ŒŽ16“ú-20“ú, “¯ŽuŽĐ‘åŠw ‹ž“c•ĶƒLƒƒƒ“ƒpƒX [18p-P11-4], pp. 13-203.iƒ|ƒXƒ^[j
  132. ’Ī ^•ļ, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ‰Á‰ę’J ŒĢ, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uƒAƒŒƒCŒ^MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŠî‘bŒŸ“ĸv
    •ŊŦ25”N“x“d‹CŠw‰īƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“•”–å@ƒ}ƒCƒNƒƒ}ƒVƒ“EƒZƒ“ƒTƒVƒXƒeƒ€Œ¤‹†‰ī, 2013”N8ŒŽ8“ú, “Œ‹žH‰Č‘åŠw@Š—“cƒLƒƒƒ“ƒpƒX [MSS-13-001]. iŒû“Ēj
  133. Ŧŧ •q•ļ, ŠÛŽR’qŽj, ŽRĒ ‘å•ã, ŧ“‡ —˛–ž, ’Ŧ“c Ž”V, ‰v ˆęÆ, ”N‹g —m
    u‰ņ˜HƒVƒ~ƒ…ƒŒ[ƒ^‚đ—p‚ĸ‚ŊWĪ‰ģCMOS-MEMS‚Ė‚Ŋ‚ß‚Ė“‡ŨŒvŠÂ‹Ģ‚Ė\’zv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ4‰ņWĪ‰ģMEMS‹ZpŒ¤‹†ƒ[ƒNƒVƒ‡ƒbƒv, 2013”N7ŒŽ26“ú, ‘åã•{—§‘åŠw‚Q‚Pĸ‹I‰ČŠwŒ¤‹†‹@\uA•¨HęŒ¤‹†ƒZƒ“ƒ^[v, P9.iƒ|ƒXƒ^[j
  134. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ‰Á‰ę’J ŒĢ, ’Ī ^•ļ, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    u‹āƒƒbƒLWĪ‰ģCMOS-MEMS‚É‚æ‚éƒAƒŒƒCŒ^‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŦŒ^‰ģv
    ‰ž—p•¨—Šw‰īWĪ‰ģMEMS‹ZpŒ¤‹†‰ī@‘æ4‰ņWĪ‰ģMEMS‹ZpŒ¤‹†ƒ[ƒNƒVƒ‡ƒbƒv, 2013”N7ŒŽ26“ú, ‘åã•{—§‘åŠw21ĸ‹I‰ČŠwŒ¤‹†‹@\uA•¨HęŒ¤‹†ƒZƒ“ƒ^[v, P7. iƒ|ƒXƒ^[j
  135. ‰Á‰ę’J ŒĢ, Ŧŧ•q•ļ, ŽRĒ ‘å•ã, –{‹´ „, ŧ“‡ —˛–ž, ˆÉ“Ą_”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uƒAƒŒƒCŒ^CMOS-MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚Ė‚Ŋ‚ß‚ĖƒfƒoƒCƒX‚Ė•]‰ŋv
    ‘æ60‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰īE‡“¯ƒZƒbƒVƒ‡ƒ“LiMEMS, NEMS‚ĖŠî‘b‚Ɖž—pFˆŲŽí‹@”\WĪ‰ģj, 2013”N3ŒŽ27“ú-30“ú, _“ŪėH‰Č‘åŠw [29p-PA4-4], pp. 22-015.iƒ|ƒXƒ^[j
  136. Ŧŧ •q•ļ, ŽRĒ ‘å•ã, –{‹´ „, ‰Á‰ę’J ŒĢ, ŧ“‡ —˛–ž, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uƒAƒŒƒCŒ^MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŨŒvv
    ‘æ60‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰īE‡“¯ƒZƒbƒVƒ‡ƒ“LiMEMS, NEMS‚ĖŠî‘b‚Ɖž—pFˆŲŽí‹@”\WĪ‰ģj, 2013”N3ŒŽ27“ú-30“ú, _“ŪėH‰Č‘åŠw [29p-PA4-5], pp. 22-016.iƒ|ƒXƒ^[j
  137. ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, –{‹´ „, ‰Á‰ę’J ŒĢ, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ,
    uƒAƒŒƒCŒ^MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    ‘æ60‰ņ‰ž—p•¨—Šw‰īt‹GŠwpu‰‰‰īE‡“¯ƒZƒbƒVƒ‡ƒ“LiMEMS, NEMS‚ĖŠî‘b‚Ɖž—pFˆŲŽí‹@”\WĪ‰ģj, 2013”N3ŒŽ27“ú-30“ú, _“ŪėH‰Č‘åŠw [29p-PA4-6], pp. 22-017.iƒ|ƒXƒ^[j
  138. yĩ‘Ōu‰‰z
    ’Ŧ“c Ž”V, Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ”N‹g —m, ‰v ˆęÆ
    "WĪ‰ģCMOS-MEMS‹Zp‚ĖŒŸ“ĸ,"
    •ŊŦ25”N“x“d‹CŠw‰ī‘S‘‘å‰īEƒVƒ“ƒ|ƒWƒEƒ€iS24jƒƒCƒ„ƒŒƒX’ʐM‰ž—pRF-MEMS‹Zp, 2013”N3ŒŽ22“ú, –ŧŒÃ‰Ž‘åŠw [3-S24-1].
  139. Ŧŧ •q•ļ, ŠÛŽR ’qŽj, ŽO“c M, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, ÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ, “Ą“c ”Ž”V, ”N‹g —m,
    uƒn[ƒhƒEƒFƒA‹LqŒžŒę‚đ—p‚ĸ‚ŊWĪ‰ģCMOS-MEMS“‡ŨŒv‹Zpv
    ‰ž—p•¨—Šw‰īEWĪ‰ģMEMS‹ZpŒ¤‹†‰īŽåÃ‘æ4‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€@–k‹ãB‘Û‰ī‹cęEŧ“ú–{‘‡“WŽĻę, •ŊŦ24”N10ŒŽ22“ú-24“ú.
  140. ŽRĒ ‘å•ã, –{‹´ „, Ŧŧ•q•ļ, ŧ“‡ —˛–ž, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ
    uƒAƒŒƒCŒ^CMOS-MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚Ė‚Ŋ‚ß‚ĖƒfƒoƒCƒX‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰īEWĪ‰ģMEMS‹ZpŒ¤‹†‰īŽåÃ‘æ4‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€@–k‹ãB‘Û‰ī‹cęEŧ“ú–{‘‡“WŽĻę, •ŊŦ24”N10ŒŽ22“ú-24“ú.
  141. –{‹´ „, Ŧŧ•q•ļ, ŧ“‡ —˛–ž, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ
    u0.35ƒĘmCMOS-LSI‚É‚æ‚éMEMSƒZƒ“ƒT—pVCO‰ņ˜H‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰īEWĪ‰ģMEMS‹ZpŒ¤‹†‰īŽåÃ‘æ4‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€@–k‹ãB‘Û‰ī‹cęEŧ“ú–{‘‡“WŽĻę, •ŊŦ24”N10ŒŽ22“ú-24“ú.
  142. ‰Á‰ę’J ŒĢ, Ŧŧ •q•ļ, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ
    u“‡ŨŒv‹Zp‚Ė‚Ŋ‚ß‚ĖMEMS‰Á‘Ŧ“xƒZƒ“ƒT‚Ėƒ‚ƒfƒ‹‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰īEWĪ‰ģMEMS‹ZpŒ¤‹†‰īŽåÃ‘æ4‰ņWĪ‰ģMEMSƒVƒ“ƒ|ƒWƒEƒ€@–k‹ãB‘Û‰ī‹cęEŧ“ú–{‘‡“WŽĻę, •ŊŦ24”N10ŒŽ22“ú-24“ú.
  143. ŧ“‡ —˛–ž, Ŧŧ •q•ļ, –{‹´ „, ŽRĒ ‘å•ã, ˆÉ“Ą, _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c, Ž”V, ‰v ˆęÆ
    uƒAƒŒƒCŒ^CMOS-MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸi3jv
    2012”NHŠú‘æ73‰ņ‰ž—p•¨—Šw‰īŠwpu‰‰‰ī, ˆ¤•Q‘åŠwEŧŽR‘åŠw, 2012”N9ŒŽ11“ú-14“úi‡“¯ƒZƒbƒVƒ‡ƒ“L, uMEMS, NEMS‚ĖŠî‘b‚Ɖž—pFˆŲŽí‹@”\WĪ‰ģj, pp. 22-006.
  144. –{‹´ „, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ŽRĒ ‘å•ã, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ
    uƒAƒŒƒCŒ^CMOS-MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸi4jv
    2012”NHŠú‘æ73‰ņ‰ž—p•¨—Šw‰īŠwpu‰‰‰ī, ˆ¤•Q‘åŠwEŧŽR‘åŠw, 2012”N9ŒŽ11“ú-14“úi‡“¯ƒZƒbƒVƒ‡ƒ“‚k, uMEMS, NEMS‚ĖŠî‘b‚Ɖž—pFˆŲŽí‹@”\WĪ‰ģj, pp. 22-007.
  145. ŽRĒ ‘å•ã, –{‹´ „, Ŧŧ •q•ļ, ŧ“‡ —˛–ž, ˆÉ“Ą _”V, ÎŒ´ ¸, ”N‹g —m, ’Ŧ“c Ž”V, ‰v ˆęÆ
    uƒAƒŒƒCŒ^CMOS-MEMS‰Á‘Ŧ“xƒZƒ“ƒT‚ĖŒŸ“ĸv
    ‰ž—p•¨—Šw‰īEWĪ‰ģMEMS‹ZpŒ¤‹†‰īŽåÃ@‘æ3‰ņWĪ‰ģMEMS‹ZpŒ¤‹†ƒ[ƒNƒVƒ‡ƒbƒv@•ŊŦ24”N7ŒŽ20“ú, ŠâŽčŒ§Ž´ÎEˇ‰ĒƒZƒCƒR[H‹ÆŠ”ŽŽ‰īŽĐ, P5.
  146. ŽRĒ ‘å•ã, Winston Sun, ėč ”É’j, “Ą“c ”Ž”V, ”N‹g —m
    uSOIƒŒƒCƒ„•Ē—ŖŨŒv‚É‚æ‚郂ƒmƒŠƒVƒbƒNRF-MEMSˆÚ‘ŠŠív
    “d‹CŠw‰īƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“•”–å@‘æ28‰ņuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€, ƒ^ƒ[ƒz[ƒ‹‘D–x, “Œ‹ž“s, •ŊŦ23”N9ŒŽ26-27“ú, A2-1.
  147. ŽRĒ ‘å•ã, “Ą“c ”Ž”V, ”N‹g —m
    u‹@”\ƒŒƒCƒ„•Ē—ŖŨŒv‚É‚æ‚éSOI RF-MEMSŽķ“Ž‘fŽq‚ÉŠÖ‚ˇ‚錤‹†v
    ŒÅ‘ĖƒGƒŒƒNƒgƒƒjƒNƒXEŒõƒGƒŒƒNƒgƒƒjƒNƒXŒ¤‹†‰ī, ƒOƒ[ƒoƒ‹COEuŽáŽčŒ¤‹†v•ņ‰ī
    “Œ‹ž‘åŠwHŠw•”2†ŠŲ, “Œ‹ž“s, •ŊŦ23”N3ŒŽ2“ú.
  148. ŽRĒ ‘å•ã, Winston Sun, ėč ”É’j, “Ą“c ”Ž”V, ”N‹g —m
    uKu‘Ņƒfƒ…ƒAƒ‹SPDT RF-MEMSƒXƒCƒbƒ`‚ĖŠJ”­v
    “d‹CŠw‰īƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“•”–å@‘æ27‰ņuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€, ‚­‚É‚Ņ‚ĢƒƒbƒZ, “‡ĒŒ§ŧ]Žs, •ŊŦ22”N10ŒŽ14-15“ú, B5-4.
  149. Winston Sun, Daisuke Yamane, Yuheon Yi, Hiroshi. Toshiyoshi, Hiroyuki Fujita, Kiyotaka Yamashita,
    gA Loaded-Line Phase Shifter Using MEMS Switches,h
    “d‹CŠw‰īƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“•”–å@‘æ26‰ņuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ɖž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€, ƒ^ƒ[ƒz[ƒ‹‘D–x, “Œ‹ž“s, •ŊŦ21”N10ŒŽ15-16“ú.
  150. ’Ŗ ‰s, ŽRĒ ‘å•ã, “Ą“c ”Ž”V, ”N‹g —m
    uRF-MEMS‹Zp‚É‚æ‚é‰Â•Īƒƒ^ƒ}ƒeƒŠƒAƒ‹“ą”g˜H‚ĖŨŒv‚ÆŽŽėv
    “d‹CŠw‰īE•”–呍‡Œ¤‹†‰īiƒ}ƒCƒNƒƒ}ƒVƒ“EƒZƒ“ƒTƒVƒXƒeƒ€Œ¤‹†‰īj, “Œ‹žH‰Č‘åŠw2009”N7ŒŽ23-24“ú, MSS-09-3, pp.13-17.
  151. ŽRĒ ‘å•ã, Winston Sun, ´“c °M, ėč ”É’j, ”N‹g —m
    uKu‘ŅˆÚ‘ŠŠí—pDPDTŒ^RF-MEMSƒXƒCƒbƒ`‚ĖŨŒv‚Æ•]‰ŋv
    •ŊŦ21”N“dŽqî•ņ’ʐMŠw‰ī‘S‘‘å‰ī, ˆ¤•Q‘åŠw 2009”N3ŒŽ17-20“ú.
  152. ŽRĒ ‘å•ã
    uRF-MEMSƒXƒCƒbƒ`‚Ė“ą”g˜H^ƒAƒNƒ`ƒ…ƒG[ƒ^•Ē—ŖŨŒvEŽŽėv
    The Second Active Phased Array Antenna Symposium, “Œ‹ž‘åŠwļŽY‹ZpŒ¤‹†Š, •ŊŦ20”N3ŒŽ26“ú.
  153. ŽRĒ ‘å•ã, Winston Sun, ´“c °M, ėč ”É’j, “Ą“c ”Ž”V, ”N‹g —m
    u“ą”g˜H/ƒAƒNƒ`ƒ…ƒG[ƒ^‚ĖƒŒƒCƒ„•Ē—Ŗ\‘ĸŨŒv‹Zp‚É‚æ‚éRF-MEMSƒXƒCƒbƒ`v
    •ŊŦ20”N“d‹CŠw‰ī‘S‘‘å‰ī, •Ÿ‰ĒH‹Æ‘åŠw, 2008”N3ŒŽ19-21“ú.
  154. ŽR–{ „Ži, ´“c tM, ėč ”É’j, ŽR‰ē ´—˛, Îč r—Y, “c‘ē š–į, ŽRĒ ‘å•ã, ”N‹g —m, ŽÂŒ´ ^‹B, ŽO’J —F•F
    uLTCCŠî”‚đ—p‚ĸ‚ŊƒAƒNƒeƒBƒuWĪƒtƒF[ƒYƒhƒAƒŒƒCƒAƒ“ƒeƒi—pˆÚ‘ŠŠí‚ĖŽŽėv
    “dŽqî•ņ’ʐMŠw‰īƒ}ƒCƒNƒ”gŒ¤‹†‰īiMWŒ¤‹†‰īj, •Ÿˆä‘åŠw•ļ‹žƒLƒƒƒ“ƒpƒXƒAƒJƒfƒ~[ƒz[ƒ‹, 2007”N12ŒŽ18“ú.
  155. ŽRĒ ‘å•ã, ‚‹´ ˆę_, Winston Sun, ´“c °M, ėč ”É’j, “Ą“c ”Ž”V, ”N‹g —m
    uƒAƒNƒeƒBƒuƒtƒFƒCƒYƒhƒAƒŒƒCƒAƒ“ƒeƒi‚ĖˆÚ‘ŠŠí‰ž—pRF-MEMSƒXƒCƒbƒ`v
    •ŊŦ19”N“x“d‹CŠw‰īƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“€•”–呍‡Œ¤‹†‰ī, ’}”g‘åŠw ‘åŠw‰īŠŲ, •ŊŦ19”N7ŒŽ2-3“ú.
  156. ŽRĒ ‘å•ã, Winston Sun, ”N‹g —m
    uRF-MEMSƒXƒCƒbƒ`‚ÉŠÖ‚ˇ‚錤‹†“ŽŒü•ņv
    The First Active Phased Array Antenna Symposium, “Œ‹ž‘åŠwļŽY‹ZpŒ¤‹†Š, •ŊŦ19”N3ŒŽ29“ú.



Award
  1. Award of Senior Membership
    Received Award of Senior Membership from IEEJ (The Institute of Electrical Engineers of Japan)
    (Oct. 9, 2019j
    GrantorFDaisuke Yamane
  2. SDGs Award
    Nature's 150th anniversary symposium, THE FUTURE OF JAPANESE SCIENCE
    Poster session: Your vision ` Foreseeing the impact of your research on society `
    (April 4, 2019j
    Presentation TitleF"Energy Harvesters for Autonomous Wireless Sensors in True IoT Society"
    RecipientFDaisuke Yamane
  3. Excellent Poster Award
    The Study Group of The Integrated MEMS, 9th Integrated MEMS Symposium
    (March 2018j
    Paper TitleF"A study on a damping constant model for structure design of a MEMS inertial sensor fabricated by multi-layer metal technology"
    RecipientsFToshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Daisuke Yamane, Masato Sone, Katsuyuki Machida, Kazuya Masu"
  4. IEEE SENSORS 2016 Best Industry Paper Award
    IEEE Sensors Council
    (Nov. 2016j
    Paper TitleF"A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology"
    RecipientsFToshifumi Konishi, Teruaki Safu, Katsuyuki Machida, Daisuke Yamane, Masato Sone, Kazuya Masu, Hiroshi Toshiyoshi
  5. Å—DG‹Zp“WŽĻÜ
    “d‹CŠw‰īƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“•”–å
    (Oct. 2016j
    Paper TitleFuƒiƒmŠĩĢŒv‘ĒƒfƒoƒCƒXEƒVƒXƒeƒ€‹Zp‚Æ‚ģ‚Ė‰ž—p‘nov
    RecipientsF“Œ‹žH‹Æ‘åŠw ‰vŒ¤‹†ŽēCŽO‘‹†ŽēC‘]ĒŒ¤‹†Žē
  6. 2016 Tokyo Tech Challenging Research Award, Granted a special award by the president
    i•ŊŦ28”N“xu“ŒH‘å’§í“IŒ¤‹†Üv Šw’ˇ“Á•ĘÜj
    Tokyo Institute of Technology
    (Aug. 2016j
    Paper TitleF"Invention of nano-G inertia sensor by metal-crystal-grain controlled micro-electro-mechanical devices"
    RecipientsFDaisuke Yamane
  7. Å—DGƒ|ƒXƒ^[ÜiŠwļ•”–åj
    “dŽqî•ņ’ʐMŠw‰īWĪ‰ņ˜HŒ¤‹†ę–åˆĪˆõ‰ī@LSI‚ƃVƒXƒeƒ€‚Ėƒ[ƒNƒVƒ‡ƒbƒv
    (May 2016j
    Paper TitleFuŦŒ^‚Š´“xMEMSŠĩĢƒZƒ“ƒTƒ‚ƒWƒ…[ƒ‹‚ĖŽŽė•]‰ŋv
    RecipientsF‚ˆĀ Šî‘å, žÜ“c “՝î, ŽRĒ ‘å•ã, Ŧŧ •q•ļ, ˆÉ“Ą _”V, “šŗ Žu˜YCÎŒ´ ¸, ’Ŧ“c Ž”V, ‰v ˆęÆ
  8. Research Encouragement Prize
    The Study Group of The Integrated MEMS, 6th Integrated MEMS Workshop
    (March 2016j
    Paper TitleF"A Study on Mobile Vehicle Control by MEMS Inertial Sensorsh
    RecipientsFMotohiro Takayasu, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
  9. 16th Tanaka Kikinzoku Memorial Foundation, MMS Prize
    (March 2015j
    Research TitleF"A Study on MEMS Accelerometers for Sub-1G Detection"
    RecipientsFDaisuke Yamane
  10. Excellent Paper Presentation Award
    2015 The Institute of Electrical Engineers of Japan, Annual Meeting
    (March 2015j
    Paper TitleF"A Study on MEMS Accelerometers for Sub-1G Detection"
    RecipientsFDaisuke Yamane
  11. Poster Award
    The 74th JSPS Spring Meeting, 2013
    (Sept. 2013j
    Paper TitleF"Evaluation of an Arrayed MEMS Accelerometer"
    RecipientsFDaisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Ken Kagaya, Masafumi Tsukuda, Hiroyuki Ito, NoboruIshihara, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu
  12. Excellent Paper Presentation Awardi‘‡Œ¤‹†‰ī—DG˜_•ļ”­•\Üj
    2013 IEEJ Sensors and Micromachines
    (Aug. 2013j
    Paper TitleF"A Study on an Arrayed MEMS Accelerometer"
    RecipientsFMasafumi Tsukuda, Daisuke Yamane, Ken Kagaya, Hiroyuki Ito, Nobiru Ishihara, Kazuya Masu, Toshifumi Konishi, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi
  13. Excellent Paper Awardi—DG˜_•ļÜj
    The Study Group of The Integrated MEMS, 4th Integrated MEMS Symposium
    (March 2013j
    Paper TitleF"An Integrated CMOS-MEMS Design Technique with Hardware Description Language"
    RecipientsFToshifumi Konishi, Satoshi Maruyama, Makoto Mita, Katsuyuki Machida, Daisuke Yamane, Hiroyuki Ito, Noboru Ishihara, Kazuya Masu, Hiroyuki Fujita, and Hiroshi Toshiyoshi
  14. Gold Prize
    Asia-Pacific Microwave Conference (APMC) Student Paper Contest
    Singapore, Dec. 7th-10th, 2009
    Paper titleF"A Dual-SPDT RF-MEMS Switch on a Small-Sized LTCC Phase Shifter for Ku-band operation"
    RecipientsFDaisuke Yamane



Press Release, Article, etc.
  1. (in Japanese)u‰Á‘Ŧ“xƒZƒ“ƒT[AŠ´“x100”{v
    Aug. 9th, 2019, newspaper article: “úŒoŽY‹ÆV•ˇ@2019”N8ŒŽ9“ú 6–Ę

  2. (in Japanese)uŦŒ^‰Á‘Ŧ“xƒZƒ“ƒT[@ˆę‘w‚Ė•‹y‚ց@Š´“x100”{’´AƒmƒCƒY1/10v
    The Science News, pp.10, Aug. 2, 2019

  3. (in Japanese)u“ŒH‘å‚Æ‚m‚s‚s\‚`‚s@‚PƒĘ‚f‹‰‚ĖŒŸ’mŽĀŒģ@‚l‚d‚l‚r‰Á‘Ŧ“xƒZƒ“ƒT[v
    Electronic Device Industry News, pp.10, Aug. 1, 2019

  4. (in Japanese)u1ƒĘGƒŒƒxƒ‹‚ĖŒŸo‚Ē‰Â”\‚ɁFMEMS‰Á‘Ŧ“xƒZƒ“ƒT[A‚Š´“x‚Å’áƒmƒCƒY‚đŽĀŒģv
    EE Times Japan, July. 25, 2019

  5. (in Japanese)uMEMS‰Á‘Ŧ“xƒZƒ“ƒT[A‚Š´“x‚Å’áƒmƒCƒY‚đŽĀŒģv
    Yahoo! JAPAN News, July. 25, 2019

  6. (in Japanese)u“ŒH‘å‚įC‰Á‘Ŧ“xƒZƒ“ƒT[‚đ‚Š´“xE’áƒmƒCƒY‰ģv
    OPTRONICS ONLINE@2019”N7ŒŽ25“ú

  7. (in Japanese)u‰Á‘Ŧ“xƒZƒ“ƒT[‚Ė‚Š´“x‰ģE’áƒmƒCƒY‰ģ‚ɐŦŒ÷v
    excite ƒjƒ…[ƒX@2019”N7ŒŽ23“ú

  8. (in Japanese)u“ŒH‘å‚ÆNTT-ATA’´’áŽG‰šE’´‚Š´“x“ÁĢ‚đ—L‚ˇ‚éMEMS‰Á‘Ŧ“xƒZƒ“ƒT[‚ĖŠJ”­‚ɐŦŒ÷v
    “ú–{ŒoĪV•ˇ“dŽq”Ł@2019”N7ŒŽ23“ú

  9. "Succeed in sensitivity increase and noise reduction of accelerometer: Sensitivity over 100 times, noise less than one-tenth"
    Tokyo Tech News, July 23, 2019

  10. (in Japanese)u‘Ŋ—l‚Č—h‚ę‚Š‚į”­“d‰Â”\‚Ɂv
    July. 11th, 2019, newspaper article: “úŒoŽY‹ÆV•ˇA5–Ę

  11. Nature's 150th anniversary symposium SDGs Award-Interview article of award winners
    "Energy harvesting - Autonomous wireless sensors for an age of IOT, contributing to SDG 7"
    Article: Nature Digest (July 2019)

  12. “ŒH‘å‚Æ“Œ‘å@ŠÂ‹ĢU“Ž”­“d‘fŽq‚đL‘Ņˆæ‰ģ
    ’á臒lŽ—Ŧ¸ˆŗ‰ņ˜H‚ÅŽĀŒģ
    Dempa Shimbun Daily, July 5, 2019, Page 8

  13. uŠÂ‹ĢU“Ž”­“d‘fŽq‚ĖL‘Ņˆæ‰ģ‚ɐŦŒ÷@|ƒGƒlƒ‹ƒM[ƒn[ƒxƒXƒeƒBƒ“ƒO‚Ö‚Ė‰ž—p‚ÉŠú‘Ō|v
    Tokyo Tech Electrical and Electronic Engineering News News, July 1, 2019

  14. uŠÂ‹ĢU“Ž”­“d‘fŽq‚ĖL‘Ņˆæ‰ģ‚ɐŦŒ÷@|ƒGƒlƒ‹ƒM[ƒn[ƒxƒXƒeƒBƒ“ƒO‚Ö‚Ė‰ž—p‚ÉŠú‘Ō|v
    Tokyo Tech News (Japanese), June 27, 2019

  15. (in Japanese)@“ŒH‘å‚ÆJST‚Č‚ĮAŠÂ‹ĢU“Ž”­“d‘fŽq‚ĖL‘Ņˆæ‰ģ‚ɐŦŒ÷
    “ú–{ŒoĪV•ˇ“dŽq”Ł@June 26, 2019

  16. uŠÂ‹ĢU“Ž”­“d‘fŽq‚ĖL‘Ņˆæ‰ģ‚ɐŦŒ÷@`ƒGƒlƒ‹ƒM[ƒn[ƒxƒXƒeƒBƒ“ƒO‚Ö‚Ė‰ž—p‚ÉŠú‘Ō`v
    JST Press release (Jointed with Tokyo Tech), June 26, 2019

  17. Springer Nature's official video: The presentation of the energy harvester research, and the award ceremony of SDGs Award in Nature's 150th anniversary symposium
    Springer Nature, 14 May 2019

  18. "Putting that free energy around you to good use with minuscule energy harvesters"
    - Scientists at Tokyo Tech developed a micro-electromechanical energy harvester that allows for more flexibility in design, which is crucial for future IoT applications.
    Tokyo Tech Bulletin No. 54
    March 26, 2019

  19. (in Japanese)@u“ŒH‘å‚Æ“Œ‘å@“d‰×‘w‚Ė•Ē—Ŗ‚ɐŦŒ÷@‚l‚d‚l‚rU“Ž”­“d‘fŽqv
    Electronic Device Industry News, pp.12, March 21, 2019

  20. "A MEMS Device Harvests Vibrations to Power the IoT"
    Scientists in Japan have developed a MEMS energy harvester charged by an off-chip electret
    IEEE SPECTRUM, 4 Feb 2019 | 16:21 GMT

  21. (in Japanese)@“ŒH‘å‚Æ“Œ‘å@VŒ´—‚ĖU“Ž”­“d‘fŽq‚đŠJ”­
    ƒGƒlƒ‹ƒM[ƒn[ƒxƒXƒeƒBƒ“ƒO‹ZpĢ”\Œüã‚ÉŠú‘Ō
    Dempa Shimbun Daily, Feb. 1, 2019, Page 8

  22. (in Japanese)@“ŒH‘å‚Č‚ĮAU“Ž”­“d‘fŽq‚ĖƒGƒŒƒNƒgƒŒƒbƒgŠO•t‚¯‚ɐŦŒ÷
    “ú–{ŒoĪV•ˇ“dŽq”Ł@Jan. 28, 2019

  23. (in Japanese)uŪ—ŋ‘I‘đ‚âŨŒv‚ĖŽŠ—R“x‚đŒüãF“ŒH‘åAU“Ž”­“d‘fŽq‚ĖƒGƒŒƒNƒgƒŒƒbƒg‚đŠO•t‚¯v
    EE Times Japan, Jan. 28, 2019

  24. uU“Ž”­“d‘fŽq‚ĖƒGƒŒƒNƒgƒŒƒbƒgŠO•t‚¯‚ɐŦŒ÷@|–ŗüIoT’[––“dŒš‚Æ‚ĩ‚ĐĢ”\Œüã‚ÉŠú‘Ō|v
    Tokyo Tech News (Japanese), Jan. 28, 2019
    uPutting that free energy around you to good use with minuscule energy harvestersv
    Tokyo Tech News (English), Jan. 28, 2019

  25. uU“Ž”­“d‘fŽq‚ĖƒGƒŒƒNƒgƒŒƒbƒgŠO•t‚¯‚ɐŦŒ÷@|–ŗüIoT’[––“dŒš‚Æ‚ĩ‚ĐĢ”\Œüã‚ÉŠú‘Ō|v
    JST Press release (Jointed with Tokyo Techj@Jan. 27, 2019

  26. uPutting that free energy around you to good use with minuscule energy harvestersv
    Eurekalert AAAS, Jan. 27, 2019

  27. u•ŊŦ28”N“xu“ŒH‘å’§í“IŒ¤‹†ÜvŽķÜŽŌŒˆ’čv
    Challenging Research President's Honorary Award irecipient: Daisuke Yamanej
    Aug. 19th, 2015, Tokyo Tech News
    Tokyo Tech E.E. News@Sept. 7th, 2016

  28. gSensing Below the 1G Acceleration Barrierh
    Dec. 8th, 2015, Tokyo Tech News

  29. (in Japanese)u“ŒH‘åA1GˆČ‰ē‚Ė‚•Ē‰đŒŸ’m‚đŽĀŒģ‚ˇ‚é’´ŦŒ^‰Á‘Ŧ“xƒZƒ“ƒT[‚đŠJ”­v
    Dec. 1st, 2015: ƒ}ƒCƒiƒrƒjƒ…[ƒX

  30. (in Japanese)@TBS TV program@u–ĸ—ˆ‚Ė‹NŒšv
    Feb. 1st, 2015, 23:04`23:10
    iOur research was shownj

  31. (in Japanese)u“ŒH‘å‚Č‚Į@MEMSƒZƒ“ƒT[A’´Lˆæ‰Á‘Ŧ“x‚đŒŸ’mA1ƒ`ƒbƒv‚ÅŽĀŒģEv
    Dec. 9th, 2014, newspaper article: ‰ģŠwH‹Æ“ú•ņA’ŠŠ§8–Ę

  32. (in Japanese)uŒŸo”͈͈Ų‚Č‚é‰Á‘Ŧ“xƒZƒ“ƒT[@1ƒ`ƒbƒv‰ģA•Ē‰đ”\ 1^1000v
    Dec. 5th, 2014, newspaper article: “úŠ§H‹Æ“ú•ņA’ŠŠ§19–Ę
    Dec. 5th, 2014: “úŠ§H‹ÆV•ˇ@ƒIƒ“ƒ‰ƒCƒ“”Å

  33. gDevelopment of High-Resolution MEMS Accelerometer with Capability to Detect Wide Range of Accelerationh
    Dec. 4th, 2014, Tokyo Tech News

  34. (in Japanese)u4ƒ~ƒŠŠp‚Ė‰Á‘Ŧ“xƒZƒ“ƒT[A‘Ė‚Ė“Ž‚ĢAíŽžŠÄŽ‹‚ցv
    Dec. 4th, 2014, newspaper article: “úŒoŽY‹ÆV•ˇA10–Ę

  35. (in Japanese)u“ŒH‘å‚Č‚ĮA‹āƒƒbƒLŽg‚ĸ‰Á‘Ŧ“xƒZƒ“ƒT[AŒŸoŠ´“x10”{‚Ɂv
    March 6th, 2014, newspaper article: “úŠ§H‹ÆV•ˇA22–Ę
    March 6th, 2014: “úŠ§H‹ÆV•ˇ@ƒIƒ“ƒ‰ƒCƒ“”Å

  36. (in Japanese)uMEMSƒZƒ“ƒT[Š´“x10”{‚đŽĀŒģA“ŒH‘å‚Č‚ĮAƒ`ƒbƒv–ʐĪ‚Í”ŧŒ¸v
    Feb. 12th, 2014, newspaper article: ‰ģŠwH‹Æ“ú•ņA’ŠŠ§8–Ę

  37. (in Japanese)u“ŒH‘å‚Č‚ĮA”÷Ŧ‰Á‘Ŧ“x‚ĒŒŸo‰Â”\‚Č’´‚•Ē‰đ”\MEMSƒZƒ“ƒT‚đŠJ”­v
    Feb. 12th, 2014: ƒ}ƒCƒiƒrƒjƒ…[ƒX

Books
  1. Chun-Yi Chen, Masaharu Yoshiba, Haochun Tang, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi and Katsuyuki Machida:
    "4. Pulse-Current Electrodeposition of Gold" in Masato Sone and Kazuya Masu (Eds.) :"Novel Metal Electrodeposition and the Application toward MEMS Device," March 6th, 2019, IntechOpen, London, UK.
    DOI: 10.5772/intechopen.80845
  2. Haochun Tang, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi and Katsuyuki Machida:
    "5. Electrodeposition of Gold Alloys and the Mechanical Properties" in Masato Sone and Kazuya Masu (Eds.) :"Novel Metal Electrodeposition and the Application toward MEMS Device," March 6th, 2019, IntechOpen, London, UK.
    DOI: 10.5772/intechopen.80755
  3. Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, and Hiroyuki Ito:
    "8. Multi-Physics Simulation Platform and Multi-Layer Metal Technology for CMOS-MEMS Accelerometer with Gold Proof Mass" in Masato Sone and Kazuya Masu (Eds.) :"Novel Metal Electrodeposition and the Application toward MEMS Device," March 6th, 2019, IntechOpen, London, UK.
    DOI: 10.5772/intechopen.81832
  4. Tso-Fu Mark Chang, Chun-Yi Chen, Yota Ishizuka, Minami Teranishi, Takuma Suzuki, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors"
    Advances in Microelectronics Reviews, Vol. 2, IFSA Publishing, S. L. (Barcelona, Spain) pp. 23-48, Feb. 2019
  5. Tso-Fu Mark Chang, Chun-Yi Chen, Hao-Chun Tang, Masaharu Yoshiba, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
    "Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors"
    Advances in Microelectronics Reviews, Vol. 1, IFSA Publishing, S. L. (Barcelona, Spain) pp. 93-106, Dec. 2017
Miscellaneous
  1. ŽRĒ ‘å•ã
    •”–å‹LŽ–u‘Û‰ī‹c•ņFThe 12th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017)v
    “d‹CŠw‰ī˜_•ļŽEiƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“•”–厏j, vol.137, no.7, P NL7_1, July 2017.
    DOI: http://doi.org/10.1541/ieejsmas.137.NL7_1
Seminar Talk, Exhibition, etc.
  1. Cheng-Yao Lo, and Daisuke Yamane
    "High-Sensitivity Capacitive Tactile Sensor with Vertically Stacked Hollow Structures,"
    —ߘaŒŗ”N“xļ‘ĖˆãŽ•HŠw‹¤“¯Œ¤‹†‹’“_Ŧ‰Ę•ņ‰ī
    2020”N3ŒŽ13“ú, “Œ‹žH‹Æ‘åŠw‚ˇ‚¸‚Š‚¯‘äƒLƒƒƒ“ƒpƒX ‘åŠw‰īŠŲ, 1-62, pp.88.iƒ|ƒXƒ^[j
  2. ”䍲 Œ’lC“Ąˆä“ÖŽiCŠpė •‘ CŽÄ“c —˛sC‰iˆä –G“yCŽRĒ ‘å•ã
    "’Pˆę×–E‚ĖŒõŽhŒƒ”Ŋ‰ž‚ƈâ“`Žq”­Œģ‚Ė‘ŠŠÖ‰đÍ‚ÉŒü‚¯‚Ŋ’´•Ā—ņ”÷Ŧ—n‰t‘€ė‹Zp‚ĖŠJ”­,"
    —ߘaŒŗ”N“xļ‘ĖˆãŽ•HŠw‹¤“¯Œ¤‹†‹’“_Ŧ‰Ę•ņ‰ī
    2020”N3ŒŽ13“ú, “Œ‹žH‹Æ‘åŠw‚ˇ‚¸‚Š‚¯‘äƒLƒƒƒ“ƒpƒX ‘åŠw‰īŠŲ, 1-43, pp.69.iƒ|ƒXƒ^[j
  3. yInvitedz
    ŽRĒ ‘å•ã
    "IoT‰ž—p‚ÉŒü‚¯‚ŊŠÂ‹ĢU“Ž‚l‚d‚l‚rƒGƒiƒW[ƒn[ƒxƒXƒ^‹Zp"
    “ú–{ŠwpU‹ģ‰ī •ĒŽqƒiƒmƒeƒNƒmƒƒW[‘æ174ˆĪˆõ‰ī ‘æ67‰ņŒ¤‹†‰ī
    2019”N12ŒŽ11“ú, _“ŪėŒ§‰Ą•lŽsÂ—t‹æ ŽO•HƒPƒ~ƒJƒ‹ SIC.
  4. yInvitedz
    ŽRĒ ‘å•ã
    "U“Ž‚Š‚į“d‹C‚đļ‚Ũo‚ˇŠÂ‹Ģ”­“d‚ɂ‚ĸ‚Ä"
    VƒGƒlƒ‹ƒM[ˆĪˆõ‰īƒŒƒNƒ`ƒ…ƒACŽž‘ã‚đüV‚ˇ‚é‰ī
    2019”N11ŒŽ6“ú, “Œ‹ž“sį‘ã“c‹æ ŽQ‹c‰@‹cˆõ‰īŠŲ ’n‰ē1ŠK B105‰ī‹cŽē.
  5. Daisuke Yamane
    "Power Generation from Ultra Weak Vibration! : Low-Threshold Electronic Circuit Technology for Energy Harvesters,"
    Innovation Japan 2019@`‘åŠwŒŠ–{Žs•ƒrƒWƒlƒXƒ}ƒbƒ`ƒ“ƒO`
    i‚Pj‘åŠw“™ƒV[ƒY“WŽĻ@Short Presentation
    2019/8/30, Tokyo Big Sight, Aomi Exhibition Halls, Hall B, Area B 0830-B-35.
    i‚Qj‘åŠw“™ƒV[ƒY“WŽĻƒ][ƒ“@’á’Y‘fEƒGƒlƒ‹ƒM[•Ē–ė@Demonstration
    2019/8/29-30, Tokyo Big Sight, Aomi Exhibition Halls, Hall B, E-13.
  6. yInvitedz
    Daisuke Yamane
    (in Japanese) "ŽŸĸ‘ãIoT’[––‚Ė‚Ŋ‚ß‚ĖU“ŽŒ^‚l‚d‚l‚rƒGƒiƒW[ƒn[ƒxƒXƒ^‹Zp,"
    ƒiƒm’ƒ˜_‘æ3‰ņƒZƒ~ƒi[i2019/7/5j
    ėčŽsƒiƒmEƒ}ƒCƒNƒ‹ZpŽx‰‡uĀ
    2019.7.5, Shin-Kawasaki Sozo no MoriuNANOBICv2F.
  7. yInvitedz
    Daisuke Yamane
    (in Japanese) "ŽŸĸ‘ã‚h‚‚sŽĐ‰ī‚ÉŒü‚¯‚Ŋ‚l‚d‚l‚rU“Ž”­“d‘fŽq,"
    JSAP - THE SYSTEM DEVICE ROADMAP COMMITTEE OF JAPAN- (SDRJ) 5th BCiBeyond CMOS/ERMiEmerging Research MaterialsjjJoin Meeting
    2019.3.28, Keio University Yagami Campus.
  8. Cheng-Yao Lo, and Daisuke Yamane
    "Development of a Highly-sensitive Flexible Tactile Sensor for Assistance Robots,"
    Research Center for Biomedical Engineering Year-end report, 2019.3.9, Tokyo Medical and Dental University M&D Tower, P011.iPosterj
  9. Špė •‘ C”䍲 Œ’lCŽRĒ ‘å•ãCŽÄ“c —˛sC‰iˆä –G“y
    "‘”—Ū‚Ė‘–sĢEˆâ“`Žq‘ŠŠÖ‰đÍ‚Ė‚Ŋ‚ß‚Ė•Ā—ņ”÷Ŧ—n‰t‘€ė‹Zp‚ĖŠJ”­,"
    Research Center for Biomedical Engineering Year-end report, 2019.3.9, Tokyo Medical and Dental University M&D Tower, P061.iPosterj
  10. Daisuke Yamane
    "Microelectromechanical Systems for IoT Society,"
    Tokyo Tech Research Festival 2018
    2018.11.15, Tokyo Institute of Technology Centennial Hall building, 31.iShort presentation and Posterj
  11. Cheng-Yao Lo, Kazuya Masu, and Daisuke Yamane
    "Development of a Highly-sensitive Flexible Tactile Sensor for Assistance Robots,"
    Research Center for Biomedical Engineering Year-end report, 2018.3.9, Tokyo Institute of Technology, Suzukakedai Campus, 2-44.iPosterj
  12. Daisuke Yamane, Kazuya Masu, and Cheng-Yao Lo,
    "Development of a Highly-sensitive Flexible Tactile Sensor for Assistance Robots,"
    Research Center for Biomedical Engineering Year-end report, 2017.3.24, Tokyo Medical and Dental University M&D Tower, P-34.iPosterj
  13. •ŊŦ24”N“x@‘æ2‰ņ§—ã‰ī“Á•ĘŒ¤‹†ˆĪˆõ‰ī
    i2012.9.4@@Institute of Industrial Science, the University of Tokyoj
  14. •ŊŦ22”N“x@‘æ4‰ņ§—ã‰ī“Á•ĘŒ¤‹†ˆĪˆõ‰ī
    i2011.2.22@Institute of Industrial Science, the University of Tokyoj
  15. •ŊŦ22”N“x@‘æ2‰ņ§—ã‰ī“Á•ĘŒ¤‹†ˆĪˆõ‰ī
    i2010.8.26@Institute of Industrial Science, the University of Tokyoj
  16. •ŊŦ20”N“x@‘æ5‰ņ§—ã‰ī“Á•ĘŒ¤‹†ˆĪˆõ‰ī
    i2009.2.20@Institute of Industrial Science, the University of Tokyoj
International Academic Interaction
  1. Nano and Micro Systems Workshop, National Tsing Hua University, Taiwan, Dec. 19-21, 2014
  2. Nano and Micro Systems and Marathon Workshop, National Tsing Hua University, Taiwan, Dec. 13-16, 2013
  3. Nano and Micro Systems and Marathon Workshop, National Tsing Hua University, Taiwan, Dec. 14-16, 2012
    (Jointly organized and supported by National Tsing Hua University and CIRMM/IIS/IST-The University of Tokyo)
  4. Nano and Micro Systems and Marathon Workshop, National Tsing Hua University, Taiwan, Dec. 16-18, 2011
    (Jointly organized and supported by National Tsing Hua University and CIRMM/IIS/IST-The University of Tokyo)
  5. Nano and Micro Systems and Marathon Workshop, National Tsing Hua University, Taiwan, Dec. 17-19, 2010
    (Jointly organized and supported by National Tsing Hua University and CIRMM/IIS-The University of Tokyo)
Talk in Overseas Univ.
  1. "CMOS-MEMS Accelerometer for sub-1g Detection"
    National United University, Miaoli, Taiwan, Dec.11, 2013



Grant
  1. JSPS KAKENHI@Grant-in-Aid for Scientific Research (C) [IDF19K05232]
    iPI : 2019.4`2022.3j
  2. JST(Japan Science and Technology Agency) PRESTO
    Scientific Innovation for Energy Harvesting Technology
    iPI : 2017.10`2021.3j
  3. 2019 Cooperative Research Projects at Research Center for Biomedical Engineering
    (in collaboration with National Tsing Hua University, TAIWAN)
    iCo-I : 2019.5`2020.3j
  4. 2019 Cooperative Research Projects at Research Center for Biomedical Engineering
    (in collaboration with Toyohashi University of Technology)
    iCo-I : 2019.5`2020.3j
  5. 2018 Cooperative Research Projects at Research Center for Biomedical Engineering
    (in collaboration with Toyohashi University of Technology)
    iCo-I : 2018.4`2019.3j
  6. 2017 Cooperative Research Projects at Research Center for Biomedical Engineering
    (in collaboration with National Tsing Hua University, TAIWAN)
    iCo-I : 2017.4`2018.3j
  7. 2017 Cooperative Research Projects at Research Center for Biomedical Engineering
    (in collaboration with Toyohashi University of Technology)
    iCo-I : 2017.4`2018.3j
  8. 2016 Tokyo Tech Challenging Research Award, Granted a special award by the president
    iPI : 2016.8`2017.3j
  9. 2016 Cooperative Research Projects at Research Center for Biomedical Engineering
    (in collaboration with National Tsing Hua University, TAIWAN)
    iCo-I : 2016.6`2017.3j
  10. JSPS KAKENHI@Grant-in-Aid for Young Scientists (B) [IDF15K17453]
    iPI : 2015.4`2018.3j
  11. 16th Tanaka Kikinzoku Memorial Foundation
    ‘æ16‰ņ “c’†‹M‹ā‘Žu‹M‹ā‘Ž‚ÉŠÖ‚í‚錤‹†•Ŧ‹āv
    MMS Prize
    iPI : 2015j
  12. ‹¤“¯Œ¤‹† ”ŧ“ą‘Ė—HŠwŒ¤‹†ƒZƒ“ƒ^[ u’´’á“d—ÍRF CMOS‰ņ˜H‹Zp‚đ—p‚ĸ‚ŊŠÂ‹Ģ”­“dŒ^ƒZƒ“ƒTƒlƒbƒgƒ[ƒNƒVƒXƒeƒ€‚ĖŒ¤‹†v
    iCo-I F2014.4 ` 2016.3j
  13. JSPS KAKENHI@Grant-in-Aid for Exploratory Research [IDF25630138]
    iPI : 2013.4`2015.3j
  14. JSPS KAKENHI@Grant-in-Aid for Exploratory Research [IDF25560190]
    iCo-I : 2013.4`2015.3j
  15. 2013 Tokyo Institute of Technology Fund
    •ŊŦ24”N“x“ŒH‘åŠî‹ā@uŒ¤‹†‚ĖŽí”­Œ@vŽx‰‡
    iPIF2013.3.1 ` 2014.2.28j
  16. JSPS KAKENHI@Grant-in-Aid for Research Activity Start-up [IDF24860027]
    iPI : 2012.9`2013.3j
  17. JSPS KAKENHI@Grant-in-Aid for JSPS Fellows [IDF10J07437]
    iPI : 2010.4`2012.3j
Lecture
  1. School of Engineering,@Engineering Literacy Iycz 2Q i2019j
  2. School of Engineering,@Engineering Literacy Iycz 1Q i2019j
  3. Department of Electrical and Electronic Engineering,@Electrical and Electronic Engineering Laboratory II B 1Q i2019j
  4. Department of Electrical and Electronic Engineering,@Electrical and Electronic Engineering Laboratory II A 4Q i2019j
  5. Department of Electrical and Electronic Engineering,@Electrical and Electronic Engineering Laboratory II B 1Q i2018j
  6. Department of Electrical and Electronic Engineering,@Electrical and Electronic Engineering Laboratory II A 4Q i2018j
  7. Department of Electrical and Electronic Engineering,@Electrical and Electronic Engineering Laboratory II B 1Q i2017j
  8. Department of Electrical and Electronic Engineering,@Electrical and Electronic Engineering Laboratory II A 4Q i2017j
  9. Department of Electrical and Electronic Engineering,@Electrical and Electronic Engineering Laboratory II A 4Q i2016j
  10. Department of Electrical and Electronic Engineering,@Programing ia, bj@i2015j
  11. Department of Electrical and Electronic Engineering,@Programing ia, bj@i2014j
  12. Department of Electrical and Electronic Engineering,@Programing ibj@@i2013j
  13. Department of Electrical and Electronic Engineering,@Programing ibj@@i2012j
International Activities
  1. 32nd International Microprocesses and Nanotechnology Conference, Program Committee Member (2019.4-2019.12.31)
  2. 31st International Microprocesses and Nanotechnology Conference, Program Committee Member (2018.4-2018.12.31)
  3. IEEE-NEMS 2017 Invited Session Organizer (2016.8-2017)
Domestic Activities
  1. Energy Harvesting ConsortiumiEHCj,@Observer@@i2018.7`j
  2. IEEJ 2019 Sensors and Micromachines [Division E] ‘‡Œ¤‹†‰ī Executive Committee,@Committee Memberi2019.2.1`2019.9.30j
  3. Member of IEEJ Journal Committee, Trans. Sensors and Micromachines@i2015.4.1`j
  4. VLSI Design and Education Center iVDECj,@Cooperative Research Fellows@i2013.12.1`2021.3.31j
  5. Department of Chemistry, School of Science, The University of Tokyo: Visiting Researcher@i2013.9`@j
  6. Institute of Industrial Science, The University of Tokyo@Associate Research Fellow@i2013.4.1`j
  7. Member of 2012 NEDO Study Group on Innovative MEMS and Strategic Roadmap@i2012.11`2013.3j
  8. "The Study Group of the Integrated MEMS, The Japan Society of Applied Physics(JSPS)"
    steering committee member@i2012.9.10`2020.3.31j
  9. "The Study Group of the Integrated MEMS, The Japan Society of Applied Physics(JSPS)"
    Website manager@i2017.4.1`2020.3.31j
  10. "The Study Group of the Integrated MEMS, The Japan Society of Applied Physics(JSPS)"
    Accounting and website manager@i2012.9.10`2016.3.31j
  11. TPC Member and vice facilitator of the 32th IEICE Workshop on Circuits and Systems@i2018.10.20`j
  12. TPC Member and facilitator of the 31th IEICE Workshop on Circuits and Systems@i2017.9.25`2018.10.20j
  13. TPC Member of the 30th IEICE Workshop on Circuits and Systems@i2016.7.1`2017.9.25j
  14. TPC Member and vice]chairman (Area 2) of the 36th IEEJ Sensors & Micromachine Symposium@i2019.2.20`2020.1.31j
  15. TPC Member of the 35th IEEJ Sensors & Micromachine Symposium@i2018.2.1`2019.1.31j
  16. TPC Member of the 34th IEEJ Sensors & Micromachine Symposium@i2017.2.1`2018.1.31j
  17. TPC Member of the 33th IEEJ Sensors & Micromachine Symposium@i2016.2.1`2017.1.31j
  18. TPC Member of the 32th IEEJ Sensors & Micromachine Symposium@i2015.2.1`2016.1.31j
  19. TPC Member of the 31th IEEJ Sensors & Micromachine Symposium@i2014.2.1`2015.1.31j
  20. VDEC Designers Forum 2019, Organizing Committee
  21. VDEC Designers Forum 2018, Organizing Committee
  22. VDEC Designers Forum 2017, Organizing Committee
  23. VDEC Designers Forum 2016, Organizing Committee
  24. VDEC Designers Forum 2015, Organizing Committee
  25. VDEC Designers Forum 2014, Organizing Committee
Activities (on-campus)
  1. Laboratory for Future Interdisciplinary Research of Science and Technology, Web Network Committee, Member i2016.4-2017.3j
  2. Precision and Intelligence Laboratory, Web Network Committee, Member i2015.4-2016.3j
  3. Precision and Intelligence Laboratory, ŦŒ’‰īŠ˛Ž–@i2014.3-2015.2j
  4. Precision and Intelligence Laboratory, Power Saving Committee, Member i2012.4-2013.3j
Society Membership
  1. IEEE (Institute of Electrical and Electronics Engineers)@iMemberFsince 2013j
  2. IEEJ (Institute of Electrical Engineers of Japan)@iMemberFsince 2007, Senior MemberFsince 2019.10j
  3. JSAP (Japan Society of Applied Physics)@iMemberFsince 2012j
  4. Study Group on Integrated MEMS, JSAP@iMemberFsince 2012j
  5. IEICE (Institute of Electronics, Information and Communication Engineers)@iMemberFsince 2013j
Misc.

Hobby : Alpine skiCSoccerCRunning

Travel experience : USA, Canada, Holland, Belgium, Germany, France, England, Switzerland, Liechtenstein, Austria, Czech, Italia, Monaco, Spain, Singapore, Thailand, Taiwan, Korea, Palau, Australia, New Zealand

E-mail yamane.d.aayatzm.titech.ac.jp
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